CA893389A - Diffusion source and method of producing same - Google Patents

Diffusion source and method of producing same

Info

Publication number
CA893389A
CA893389A CA893389A CA893389DA CA893389A CA 893389 A CA893389 A CA 893389A CA 893389 A CA893389 A CA 893389A CA 893389D A CA893389D A CA 893389DA CA 893389 A CA893389 A CA 893389A
Authority
CA
Canada
Prior art keywords
producing same
diffusion source
diffusion
source
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA893389A
Inventor
J. Lyons Vincent
S. Sandhu Jagtar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA893389A publication Critical patent/CA893389A/en
Expired legal-status Critical Current

Links

CA893389A Diffusion source and method of producing same Expired CA893389A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA893389T

Publications (1)

Publication Number Publication Date
CA893389A true CA893389A (en) 1972-02-15

Family

ID=36399434

Family Applications (1)

Application Number Title Priority Date Filing Date
CA893389A Expired CA893389A (en) Diffusion source and method of producing same

Country Status (1)

Country Link
CA (1) CA893389A (en)

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