CA893387A - Method for sputtering a film on an irregular surface and article produced thereby - Google Patents

Method for sputtering a film on an irregular surface and article produced thereby

Info

Publication number
CA893387A
CA893387A CA893387A CA893387DA CA893387A CA 893387 A CA893387 A CA 893387A CA 893387 A CA893387 A CA 893387A CA 893387D A CA893387D A CA 893387DA CA 893387 A CA893387 A CA 893387A
Authority
CA
Canada
Prior art keywords
sputtering
film
irregular surface
article produced
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA893387A
Inventor
D. Davidse Pieter
S. Logan Joseph
S. Maddocks Fred
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA893387A publication Critical patent/CA893387A/en
Expired legal-status Critical Current

Links

CA893387A Method for sputtering a film on an irregular surface and article produced thereby Expired CA893387A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA893387T

Publications (1)

Publication Number Publication Date
CA893387A true CA893387A (en) 1972-02-15

Family

ID=36399432

Family Applications (1)

Application Number Title Priority Date Filing Date
CA893387A Expired CA893387A (en) Method for sputtering a film on an irregular surface and article produced thereby

Country Status (1)

Country Link
CA (1) CA893387A (en)

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