CA893067A - Method of fabricating etch resistant masks - Google Patents

Method of fabricating etch resistant masks

Info

Publication number
CA893067A
CA893067A CA893067A CA893067DA CA893067A CA 893067 A CA893067 A CA 893067A CA 893067 A CA893067 A CA 893067A CA 893067D A CA893067D A CA 893067DA CA 893067 A CA893067 A CA 893067A
Authority
CA
Canada
Prior art keywords
etch resistant
resistant masks
fabricating
fabricating etch
masks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA893067A
Inventor
Haller Ivan
Hatzakis Michael
Srinivasan Rangaswamy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA893067A publication Critical patent/CA893067A/en
Expired legal-status Critical Current

Links

CA893067A Method of fabricating etch resistant masks Expired CA893067A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA893067T

Publications (1)

Publication Number Publication Date
CA893067A true CA893067A (en) 1972-02-15

Family

ID=36399122

Family Applications (1)

Application Number Title Priority Date Filing Date
CA893067A Expired CA893067A (en) Method of fabricating etch resistant masks

Country Status (1)

Country Link
CA (1) CA893067A (en)

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