CA892779A - Thin film piezoelectric device - Google Patents

Thin film piezoelectric device

Info

Publication number
CA892779A
CA892779A CA892779A CA892779DA CA892779A CA 892779 A CA892779 A CA 892779A CA 892779 A CA892779 A CA 892779A CA 892779D A CA892779D A CA 892779DA CA 892779 A CA892779 A CA 892779A
Authority
CA
Canada
Prior art keywords
thin film
piezoelectric device
film piezoelectric
thin
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA892779A
Inventor
R. Poirier Armand
F. Newkirk Terry
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lockheed Corp
Original Assignee
Sanders Associates Inc
Publication date
Application granted granted Critical
Publication of CA892779A publication Critical patent/CA892779A/en
Expired legal-status Critical Current

Links

CA892779A Thin film piezoelectric device Expired CA892779A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA892779T

Publications (1)

Publication Number Publication Date
CA892779A true CA892779A (en) 1972-02-08

Family

ID=36398845

Family Applications (1)

Application Number Title Priority Date Filing Date
CA892779A Expired CA892779A (en) Thin film piezoelectric device

Country Status (1)

Country Link
CA (1) CA892779A (en)

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