CA888665A - Method of preparing silicon nitride films - Google Patents

Method of preparing silicon nitride films

Info

Publication number
CA888665A
CA888665A CA888665A CA888665DA CA888665A CA 888665 A CA888665 A CA 888665A CA 888665 A CA888665 A CA 888665A CA 888665D A CA888665D A CA 888665DA CA 888665 A CA888665 A CA 888665A
Authority
CA
Canada
Prior art keywords
silicon nitride
nitride films
preparing silicon
preparing
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA888665A
Inventor
S. Gleim Paul
E. Bean Kenneth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Publication date
Application granted granted Critical
Publication of CA888665A publication Critical patent/CA888665A/en
Expired legal-status Critical Current

Links

CA888665A Method of preparing silicon nitride films Expired CA888665A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA888665T

Publications (1)

Publication Number Publication Date
CA888665A true CA888665A (en) 1971-12-21

Family

ID=36394868

Family Applications (1)

Application Number Title Priority Date Filing Date
CA888665A Expired CA888665A (en) Method of preparing silicon nitride films

Country Status (1)

Country Link
CA (1) CA888665A (en)

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