CA870764A - Sputtering apparatus - Google Patents

Sputtering apparatus

Info

Publication number
CA870764A
CA870764A CA870764A CA870764DA CA870764A CA 870764 A CA870764 A CA 870764A CA 870764 A CA870764 A CA 870764A CA 870764D A CA870764D A CA 870764DA CA 870764 A CA870764 A CA 870764A
Authority
CA
Canada
Prior art keywords
sputtering apparatus
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA870764A
Inventor
M. Moseson Roger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bendix Corp
Original Assignee
Bendix Corp
Publication date
Application granted granted Critical
Publication of CA870764A publication Critical patent/CA870764A/en
Expired legal-status Critical Current

Links

CA870764A Sputtering apparatus Expired CA870764A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA870764T

Publications (1)

Publication Number Publication Date
CA870764A true CA870764A (en) 1971-05-11

Family

ID=36356799

Family Applications (1)

Application Number Title Priority Date Filing Date
CA870764A Expired CA870764A (en) Sputtering apparatus

Country Status (1)

Country Link
CA (1) CA870764A (en)

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