CA863895A - Etchant regeneration - Google Patents

Etchant regeneration

Info

Publication number
CA863895A
CA863895A CA863895A CA863895DA CA863895A CA 863895 A CA863895 A CA 863895A CA 863895 A CA863895 A CA 863895A CA 863895D A CA863895D A CA 863895DA CA 863895 A CA863895 A CA 863895A
Authority
CA
Canada
Prior art keywords
etchant regeneration
etchant
regeneration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA863895A
Inventor
P. Thomas John
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chemcut Corp
Original Assignee
Chemcut Corp
Publication date
Application granted granted Critical
Publication of CA863895A publication Critical patent/CA863895A/en
Expired legal-status Critical Current

Links

CA863895A Etchant regeneration Expired CA863895A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA863895T

Publications (1)

Publication Number Publication Date
CA863895A true CA863895A (en) 1971-02-16

Family

ID=36349239

Family Applications (1)

Application Number Title Priority Date Filing Date
CA863895A Expired CA863895A (en) Etchant regeneration

Country Status (1)

Country Link
CA (1) CA863895A (en)

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