CA857858A - Method of and device for sputtering - Google Patents

Method of and device for sputtering

Info

Publication number
CA857858A
CA857858A CA857858A CA857858DA CA857858A CA 857858 A CA857858 A CA 857858A CA 857858 A CA857858 A CA 857858A CA 857858D A CA857858D A CA 857858DA CA 857858 A CA857858 A CA 857858A
Authority
CA
Canada
Prior art keywords
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA857858A
Inventor
K. Wehner Gottfried
S. Anderson Gerald
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Litton Industries Inc
Original Assignee
Litton Industries Inc
Publication date
Application granted granted Critical
Publication of CA857858A publication Critical patent/CA857858A/en
Expired legal-status Critical Current

Links

CA857858A Method of and device for sputtering Expired CA857858A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA857858T

Publications (1)

Publication Number Publication Date
CA857858A true CA857858A (en) 1970-12-08

Family

ID=36343355

Family Applications (1)

Application Number Title Priority Date Filing Date
CA857858A Expired CA857858A (en) Method of and device for sputtering

Country Status (1)

Country Link
CA (1) CA857858A (en)

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