CA854347A - Methods and apparatus for measuring semiconductor doping profiles - Google Patents

Methods and apparatus for measuring semiconductor doping profiles

Info

Publication number
CA854347A
CA854347A CA854347A CA854347DA CA854347A CA 854347 A CA854347 A CA 854347A CA 854347 A CA854347 A CA 854347A CA 854347D A CA854347D A CA 854347DA CA 854347 A CA854347 A CA 854347A
Authority
CA
Canada
Prior art keywords
methods
doping profiles
semiconductor doping
measuring semiconductor
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA854347A
Inventor
John A. Copeland, Iii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Publication date
Application granted granted Critical
Publication of CA854347A publication Critical patent/CA854347A/en
Expired legal-status Critical Current

Links

CA854347A Methods and apparatus for measuring semiconductor doping profiles Expired CA854347A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA854347T

Publications (1)

Publication Number Publication Date
CA854347A true CA854347A (en) 1970-10-20

Family

ID=36339945

Family Applications (1)

Application Number Title Priority Date Filing Date
CA854347A Expired CA854347A (en) Methods and apparatus for measuring semiconductor doping profiles

Country Status (1)

Country Link
CA (1) CA854347A (en)

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