CA845597A - Multi-zone thin film processing apparatus and method - Google Patents

Multi-zone thin film processing apparatus and method

Info

Publication number
CA845597A
CA845597A CA845597A CA845597DA CA845597A CA 845597 A CA845597 A CA 845597A CA 845597 A CA845597 A CA 845597A CA 845597D A CA845597D A CA 845597DA CA 845597 A CA845597 A CA 845597A
Authority
CA
Canada
Prior art keywords
thin film
processing apparatus
film processing
zone thin
zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA845597A
Inventor
J. Monty Leo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Artisan Industries Inc
Original Assignee
Artisan Industries Inc
Publication date
Application granted granted Critical
Publication of CA845597A publication Critical patent/CA845597A/en
Expired legal-status Critical Current

Links

CA845597A Multi-zone thin film processing apparatus and method Expired CA845597A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA845597T

Publications (1)

Publication Number Publication Date
CA845597A true CA845597A (en) 1970-06-30

Family

ID=36329814

Family Applications (1)

Application Number Title Priority Date Filing Date
CA845597A Expired CA845597A (en) Multi-zone thin film processing apparatus and method

Country Status (1)

Country Link
CA (1) CA845597A (en)

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