CA828946A - Boron nitride thin film device and process for making same - Google Patents

Boron nitride thin film device and process for making same

Info

Publication number
CA828946A
CA828946A CA828946A CA828946DA CA828946A CA 828946 A CA828946 A CA 828946A CA 828946 A CA828946 A CA 828946A CA 828946D A CA828946D A CA 828946DA CA 828946 A CA828946 A CA 828946A
Authority
CA
Canada
Prior art keywords
thin film
boron nitride
film device
making same
nitride thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA828946A
Inventor
R. Haberecht Rolf
J. Patterson Robert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Publication date
Application granted granted Critical
Publication of CA828946A publication Critical patent/CA828946A/en
Expired legal-status Critical Current

Links

CA828946A Boron nitride thin film device and process for making same Expired CA828946A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA828946T

Publications (1)

Publication Number Publication Date
CA828946A true CA828946A (en) 1969-12-02

Family

ID=36306400

Family Applications (1)

Application Number Title Priority Date Filing Date
CA828946A Expired CA828946A (en) Boron nitride thin film device and process for making same

Country Status (1)

Country Link
CA (1) CA828946A (en)

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