CA822839A - Production of epitaxial films - Google Patents

Production of epitaxial films

Info

Publication number
CA822839A
CA822839A CA822839A CA822839DA CA822839A CA 822839 A CA822839 A CA 822839A CA 822839 A CA822839 A CA 822839A CA 822839D A CA822839D A CA 822839DA CA 822839 A CA822839 A CA 822839A
Authority
CA
Canada
Prior art keywords
production
epitaxial films
epitaxial
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA822839A
Inventor
A. Ruehrwein Robert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Monsanto Co
Original Assignee
Monsanto Co
Publication date
Application granted granted Critical
Publication of CA822839A publication Critical patent/CA822839A/en
Expired legal-status Critical Current

Links

CA822839A Production of epitaxial films Expired CA822839A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA822839T

Publications (1)

Publication Number Publication Date
CA822839A true CA822839A (en) 1969-09-09

Family

ID=36300251

Family Applications (1)

Application Number Title Priority Date Filing Date
CA822839A Expired CA822839A (en) Production of epitaxial films

Country Status (1)

Country Link
CA (1) CA822839A (en)

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