CA822787A - Magnetically confined electrical discharge getter ion vacuum pump having a cathode projection extending into the anode cell
- Google Patents
Magnetically confined electrical discharge getter ion vacuum pump having a cathode projection extending into the anode cell
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA822787A
Inventor
Lawrence T. Lamont, Jr.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Publication date
Application grantedgrantedCritical
Publication of CA822787ApublicationCriticalpatent/CA822787A/en
H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
CA822787AMagnetically confined electrical discharge getter ion vacuum pump having a cathode projection extending into the anode cell
ExpiredCA822787A
(en)