CA809620A - Large volume semiconductor coating reactor - Google Patents

Large volume semiconductor coating reactor

Info

Publication number
CA809620A
CA809620A CA809620A CA809620DA CA809620A CA 809620 A CA809620 A CA 809620A CA 809620 A CA809620 A CA 809620A CA 809620D A CA809620D A CA 809620DA CA 809620 A CA809620 A CA 809620A
Authority
CA
Canada
Prior art keywords
large volume
semiconductor coating
coating reactor
volume semiconductor
reactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA809620A
Inventor
G. Currin Cedric
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Silicones Corp
Original Assignee
Dow Corning Corp
Publication date
Application granted granted Critical
Publication of CA809620A publication Critical patent/CA809620A/en
Expired legal-status Critical Current

Links

CA809620A Large volume semiconductor coating reactor Expired CA809620A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA809620T

Publications (1)

Publication Number Publication Date
CA809620A true CA809620A (en) 1969-04-01

Family

ID=36280136

Family Applications (1)

Application Number Title Priority Date Filing Date
CA809620A Expired CA809620A (en) Large volume semiconductor coating reactor

Country Status (1)

Country Link
CA (1) CA809620A (en)

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