CA797443A - High capacity epitaxial apparatus and method - Google Patents

High capacity epitaxial apparatus and method

Info

Publication number
CA797443A
CA797443A CA797443A CA797443DA CA797443A CA 797443 A CA797443 A CA 797443A CA 797443 A CA797443 A CA 797443A CA 797443D A CA797443D A CA 797443DA CA 797443 A CA797443 A CA 797443A
Authority
CA
Canada
Prior art keywords
high capacity
epitaxial apparatus
epitaxial
capacity
capacity epitaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA797443A
Inventor
O. Ernst Eric
Seeley Gerard
J. Hurd Donald
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA797443A publication Critical patent/CA797443A/en
Expired legal-status Critical Current

Links

CA797443A High capacity epitaxial apparatus and method Expired CA797443A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA797443T

Publications (1)

Publication Number Publication Date
CA797443A true CA797443A (en) 1968-10-22

Family

ID=36265443

Family Applications (1)

Application Number Title Priority Date Filing Date
CA797443A Expired CA797443A (en) High capacity epitaxial apparatus and method

Country Status (1)

Country Link
CA (1) CA797443A (en)

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