CA791349A - Chemical polishing of a substrate - Google Patents

Chemical polishing of a substrate

Info

Publication number
CA791349A
CA791349A CA791349A CA791349DA CA791349A CA 791349 A CA791349 A CA 791349A CA 791349 A CA791349 A CA 791349A CA 791349D A CA791349D A CA 791349DA CA 791349 A CA791349 A CA 791349A
Authority
CA
Canada
Prior art keywords
substrate
chemical polishing
polishing
chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA791349A
Inventor
Reisman Arnold
L. Rohr Robert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA791349A publication Critical patent/CA791349A/en
Expired legal-status Critical Current

Links

CA791349A Chemical polishing of a substrate Expired CA791349A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA791349T

Publications (1)

Publication Number Publication Date
CA791349A true CA791349A (en) 1968-07-30

Family

ID=36255332

Family Applications (1)

Application Number Title Priority Date Filing Date
CA791349A Expired CA791349A (en) Chemical polishing of a substrate

Country Status (1)

Country Link
CA (1) CA791349A (en)

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