CA764933A - Processes for the removal of semiconductor material deposited on a support in epitaxy processes - Google Patents

Processes for the removal of semiconductor material deposited on a support in epitaxy processes

Info

Publication number
CA764933A
CA764933A CA764933A CA764933DA CA764933A CA 764933 A CA764933 A CA 764933A CA 764933 A CA764933 A CA 764933A CA 764933D A CA764933D A CA 764933DA CA 764933 A CA764933 A CA 764933A
Authority
CA
Canada
Prior art keywords
processes
removal
support
semiconductor material
material deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA764933A
Inventor
Rummel Theodor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens and Halske AG
Original Assignee
Siemens and Halske AG
Publication date
Application granted granted Critical
Publication of CA764933A publication Critical patent/CA764933A/en
Expired legal-status Critical Current

Links

CA764933A Processes for the removal of semiconductor material deposited on a support in epitaxy processes Expired CA764933A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA764933T

Publications (1)

Publication Number Publication Date
CA764933A true CA764933A (en) 1967-08-08

Family

ID=36208347

Family Applications (1)

Application Number Title Priority Date Filing Date
CA764933A Expired CA764933A (en) Processes for the removal of semiconductor material deposited on a support in epitaxy processes

Country Status (1)

Country Link
CA (1) CA764933A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3645812A (en) * 1968-05-03 1972-02-29 Siemens Ag Method of purifying a quartz processing vessel for use in the production of semiconductors

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3645812A (en) * 1968-05-03 1972-02-29 Siemens Ag Method of purifying a quartz processing vessel for use in the production of semiconductors

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