CA738393A - Sputtering mask - Google Patents
Sputtering maskInfo
- Publication number
- CA738393A CA738393A CA738393A CA738393DA CA738393A CA 738393 A CA738393 A CA 738393A CA 738393 A CA738393 A CA 738393A CA 738393D A CA738393D A CA 738393DA CA 738393 A CA738393 A CA 738393A
- Authority
- CA
- Canada
- Prior art keywords
- sputtering mask
- sputtering
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA738393T |
Publications (1)
Publication Number | Publication Date |
---|---|
CA738393A true CA738393A (en) | 1966-07-12 |
Family
ID=36136536
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA738393A Expired CA738393A (en) | Sputtering mask |
Country Status (1)
Country | Link |
---|---|
CA (1) | CA738393A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4024041A (en) * | 1974-12-18 | 1977-05-17 | Hitachi, Ltd. | Method of forming deposition films for use in multi-layer metallization |
US4416759A (en) * | 1981-11-27 | 1983-11-22 | Varian Associates, Inc. | Sputter system incorporating an improved blocking shield for contouring the thickness of sputter coated layers |
US5223108A (en) * | 1991-12-30 | 1993-06-29 | Materials Research Corporation | Extended lifetime collimator |
-
0
- CA CA738393A patent/CA738393A/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4024041A (en) * | 1974-12-18 | 1977-05-17 | Hitachi, Ltd. | Method of forming deposition films for use in multi-layer metallization |
US4416759A (en) * | 1981-11-27 | 1983-11-22 | Varian Associates, Inc. | Sputter system incorporating an improved blocking shield for contouring the thickness of sputter coated layers |
US5223108A (en) * | 1991-12-30 | 1993-06-29 | Materials Research Corporation | Extended lifetime collimator |
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