CA721884A - Epitaxial growth and doping from a gaseous source - Google Patents
Epitaxial growth and doping from a gaseous sourceInfo
- Publication number
- CA721884A CA721884A CA721884A CA721884DA CA721884A CA 721884 A CA721884 A CA 721884A CA 721884 A CA721884 A CA 721884A CA 721884D A CA721884D A CA 721884DA CA 721884 A CA721884 A CA 721884A
- Authority
- CA
- Canada
- Prior art keywords
- doping
- epitaxial growth
- gaseous source
- gaseous
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA721884T |
Publications (1)
Publication Number | Publication Date |
---|---|
CA721884A true CA721884A (en) | 1965-11-16 |
Family
ID=36057461
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA721884A Expired CA721884A (en) | Epitaxial growth and doping from a gaseous source |
Country Status (1)
Country | Link |
---|---|
CA (1) | CA721884A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017182329A1 (en) * | 2016-04-22 | 2017-10-26 | Nexwafe Gmbh | Silicon wafer for an electronic component and method for the production thereof |
-
0
- CA CA721884A patent/CA721884A/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017182329A1 (en) * | 2016-04-22 | 2017-10-26 | Nexwafe Gmbh | Silicon wafer for an electronic component and method for the production thereof |
US10985005B2 (en) | 2016-04-22 | 2021-04-20 | Nexwafe Gmbh | Silicon wafer for an electronic component and method for the production thereof |
US11915922B2 (en) | 2016-04-22 | 2024-02-27 | Nexwafe Gmbh | Silicon wafer for an electronic component and method for the production thereof |
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