CA720601A - Gas etching - Google Patents

Gas etching

Info

Publication number
CA720601A
CA720601A CA720601A CA720601DA CA720601A CA 720601 A CA720601 A CA 720601A CA 720601 A CA720601 A CA 720601A CA 720601D A CA720601D A CA 720601DA CA 720601 A CA720601 A CA 720601A
Authority
CA
Canada
Prior art keywords
gas etching
etching
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA720601A
Inventor
J. Corrigan Wilfred
L. Smith David
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Publication date
Application granted granted Critical
Publication of CA720601A publication Critical patent/CA720601A/en
Expired legal-status Critical Current

Links

CA720601A Gas etching Expired CA720601A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA720601T

Publications (1)

Publication Number Publication Date
CA720601A true CA720601A (en) 1965-11-02

Family

ID=36056178

Family Applications (1)

Application Number Title Priority Date Filing Date
CA720601A Expired CA720601A (en) Gas etching

Country Status (1)

Country Link
CA (1) CA720601A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3392069A (en) * 1963-07-17 1968-07-09 Siemens Ag Method for producing pure polished surfaces on semiconductor bodies

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3392069A (en) * 1963-07-17 1968-07-09 Siemens Ag Method for producing pure polished surfaces on semiconductor bodies

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