CA705317A - Process for producing ultrafine silicon nitride - Google Patents

Process for producing ultrafine silicon nitride

Info

Publication number
CA705317A
CA705317A CA705317A CA705317DA CA705317A CA 705317 A CA705317 A CA 705317A CA 705317 A CA705317 A CA 705317A CA 705317D A CA705317D A CA 705317DA CA 705317 A CA705317 A CA 705317A
Authority
CA
Canada
Prior art keywords
silicon nitride
producing ultrafine
ultrafine silicon
producing
nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA705317A
Inventor
F. Forsyth Paul
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Union Carbide Corp
Original Assignee
Union Carbide Corp
Publication date
Application granted granted Critical
Publication of CA705317A publication Critical patent/CA705317A/en
Expired legal-status Critical Current

Links

CA705317A Process for producing ultrafine silicon nitride Expired CA705317A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA705317T

Publications (1)

Publication Number Publication Date
CA705317A true CA705317A (en) 1965-03-09

Family

ID=36018991

Family Applications (1)

Application Number Title Priority Date Filing Date
CA705317A Expired CA705317A (en) Process for producing ultrafine silicon nitride

Country Status (1)

Country Link
CA (1) CA705317A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4387079A (en) * 1979-01-10 1983-06-07 Toyo Soda Manufacturing Co., Ltd. Method of manufacturing high-purity silicon nitride powder
US4935214A (en) * 1987-09-15 1990-06-19 United States Department Of Energy Process for producing high purity silicon nitride by the direct reaction between elemental silicon and nitrogen-hydrogen liquid reactants

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4387079A (en) * 1979-01-10 1983-06-07 Toyo Soda Manufacturing Co., Ltd. Method of manufacturing high-purity silicon nitride powder
US4935214A (en) * 1987-09-15 1990-06-19 United States Department Of Energy Process for producing high purity silicon nitride by the direct reaction between elemental silicon and nitrogen-hydrogen liquid reactants

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