CA698080A - Projecting device for photolithography - Google Patents

Projecting device for photolithography

Info

Publication number
CA698080A
CA698080A CA698080A CA698080DA CA698080A CA 698080 A CA698080 A CA 698080A CA 698080 A CA698080 A CA 698080A CA 698080D A CA698080D A CA 698080DA CA 698080 A CA698080 A CA 698080A
Authority
CA
Canada
Prior art keywords
photolithography
projecting device
projecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA698080A
Inventor
Giesecke Heinrich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
C P GOERZ AMERICAN OPTICAL Co
Original Assignee
C P GOERZ AMERICAN OPTICAL Co
Publication date
Application granted granted Critical
Publication of CA698080A publication Critical patent/CA698080A/en
Expired legal-status Critical Current

Links

CA698080A Projecting device for photolithography Expired CA698080A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA698080T

Publications (1)

Publication Number Publication Date
CA698080A true CA698080A (en) 1964-11-17

Family

ID=36008344

Family Applications (1)

Application Number Title Priority Date Filing Date
CA698080A Expired CA698080A (en) Projecting device for photolithography

Country Status (1)

Country Link
CA (1) CA698080A (en)

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