CA652986A - Metal film removal by vaporization - Google Patents

Metal film removal by vaporization

Info

Publication number
CA652986A
CA652986A CA652986A CA652986DA CA652986A CA 652986 A CA652986 A CA 652986A CA 652986 A CA652986 A CA 652986A CA 652986D A CA652986D A CA 652986DA CA 652986 A CA652986 A CA 652986A
Authority
CA
Canada
Prior art keywords
vaporization
metal film
film removal
removal
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA652986A
Inventor
G. W. J. Forshaw Kenneth
B. Charlton Cyril
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Telephone Manufacturing Co Ltd
Original Assignee
Telephone Manufacturing Co Ltd
Publication date
Application granted granted Critical
Publication of CA652986A publication Critical patent/CA652986A/en
Expired legal-status Critical Current

Links

CA652986A Metal film removal by vaporization Expired CA652986A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA652986T

Publications (1)

Publication Number Publication Date
CA652986A true CA652986A (en) 1962-11-27

Family

ID=35946305

Family Applications (1)

Application Number Title Priority Date Filing Date
CA652986A Expired CA652986A (en) Metal film removal by vaporization

Country Status (1)

Country Link
CA (1) CA652986A (en)

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