CA616771A - Resist forming method - Google Patents

Resist forming method

Info

Publication number
CA616771A
CA616771A CA616771A CA616771DA CA616771A CA 616771 A CA616771 A CA 616771A CA 616771 A CA616771 A CA 616771A CA 616771D A CA616771D A CA 616771DA CA 616771 A CA616771 A CA 616771A
Authority
CA
Canada
Prior art keywords
forming method
resist forming
resist
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA616771A
Inventor
M. Van Wagner Edward
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Publication date
Application granted granted Critical
Publication of CA616771A publication Critical patent/CA616771A/en
Expired legal-status Critical Current

Links

CA616771A Resist forming method Expired CA616771A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA616771T

Publications (1)

Publication Number Publication Date
CA616771A true CA616771A (en) 1961-03-21

Family

ID=35859070

Family Applications (1)

Application Number Title Priority Date Filing Date
CA616771A Expired CA616771A (en) Resist forming method

Country Status (1)

Country Link
CA (1) CA616771A (en)

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