CA595816A - Purification of silane - Google Patents

Purification of silane

Info

Publication number
CA595816A
CA595816A CA595816A CA595816DA CA595816A CA 595816 A CA595816 A CA 595816A CA 595816 A CA595816 A CA 595816A CA 595816D A CA595816D A CA 595816DA CA 595816 A CA595816 A CA 595816A
Authority
CA
Canada
Prior art keywords
silane
purification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA595816A
Inventor
J. Sheehan Edward
B. Conn John
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Merck and Co Inc
Original Assignee
Merck and Co Inc
Publication date
Application granted granted Critical
Publication of CA595816A publication Critical patent/CA595816A/en
Expired legal-status Critical Current

Links

CA595816A Purification of silane Expired CA595816A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA595816T

Publications (1)

Publication Number Publication Date
CA595816A true CA595816A (en) 1960-04-05

Family

ID=35809339

Family Applications (1)

Application Number Title Priority Date Filing Date
CA595816A Expired CA595816A (en) Purification of silane

Country Status (1)

Country Link
CA (1) CA595816A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4976944A (en) * 1987-10-28 1990-12-11 Rhone-Poulenc Chimie Purification of silane gas

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4976944A (en) * 1987-10-28 1990-12-11 Rhone-Poulenc Chimie Purification of silane gas

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