CA3189581A1 - Processing system - Google Patents

Processing system

Info

Publication number
CA3189581A1
CA3189581A1 CA3189581A CA3189581A CA3189581A1 CA 3189581 A1 CA3189581 A1 CA 3189581A1 CA 3189581 A CA3189581 A CA 3189581A CA 3189581 A CA3189581 A CA 3189581A CA 3189581 A1 CA3189581 A1 CA 3189581A1
Authority
CA
Canada
Prior art keywords
measurement
processing
irradiation
light
processing system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CA3189581A
Other languages
English (en)
French (fr)
Inventor
Shinji Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of CA3189581A1 publication Critical patent/CA3189581A1/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction
    • B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
    • B23K26/0884—Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least three axial directions, e.g. manipulators, robots
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/088—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices with position, velocity or acceleration sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/021—Optical sensing devices
    • B25J19/022—Optical sensing devices using lasers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/021—Optical sensing devices
    • B25J19/023—Optical sensing devices including video camera means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1679—Program controls characterised by the tasks executed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1694—Program controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • B25J9/1697—Vision controlled systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/005—Manipulators for mechanical processing tasks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J5/00—Manipulators mounted on wheels or on carriages

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Plasma & Fusion (AREA)
  • Human Computer Interaction (AREA)
  • Multimedia (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Laser Beam Processing (AREA)
  • Wire Bonding (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
CA3189581A 2020-07-29 2020-07-29 Processing system Pending CA3189581A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/029000 WO2022024246A1 (ja) 2020-07-29 2020-07-29 加工システム

Publications (1)

Publication Number Publication Date
CA3189581A1 true CA3189581A1 (en) 2022-02-03

Family

ID=80035454

Family Applications (1)

Application Number Title Priority Date Filing Date
CA3189581A Pending CA3189581A1 (en) 2020-07-29 2020-07-29 Processing system

Country Status (8)

Country Link
US (2) US12459056B2 (https=)
EP (1) EP4190477A4 (https=)
JP (2) JP7601100B2 (https=)
CN (1) CN116133783A (https=)
AU (1) AU2020460879A1 (https=)
BR (1) BR112023001423A2 (https=)
CA (1) CA3189581A1 (https=)
WO (1) WO2022024246A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4534257A4 (en) * 2022-06-02 2026-04-22 Nikon Corp MEASURING SYSTEM, PROCESSING SYSTEM, MEASURING METHOD AND PROCESSING METHOD
EP4534258A4 (en) * 2022-06-02 2026-04-22 Nikon Corp MEASURING SYSTEM, PROCESSING SYSTEM, MEASURING METHOD AND PROCESSING METHOD

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023199473A1 (ja) * 2022-04-14 2023-10-19 株式会社ニコン 加工システム及び計測システム
DE102022116927A1 (de) * 2022-07-07 2024-01-18 Trumpf Laser Gmbh Laserbearbeitungsmaschine mit frequenzkammbasiertem Abstandssensor sowie zugehöriges Verfahren mit frequenzkammbasierter Abstandsmessung
DE102023129804A1 (de) * 2023-10-27 2025-04-30 Björn Steiger Stiftung -Stiftung bürgerlichen Rechts- Hangar für mindestens ein unbemanntes Luftfahrzeug

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI75994C (fi) 1986-05-15 1988-09-09 Temet Oy Avstaengningsanordning.
GB2226970B (en) 1989-01-11 1992-10-21 British Aerospace Methods of manufacture and surface treatment using laser radiation
JP2002538971A (ja) 1998-09-09 2002-11-19 ジーエスアイ ルモニクス ロボット的に動作するレーザ・ヘッド
US7800758B1 (en) 1999-07-23 2010-09-21 Faro Laser Trackers, Llc Laser-based coordinate measuring device and laser-based method for measuring coordinates
US6847436B2 (en) 2001-04-10 2005-01-25 Faro Laser Trackers, Llc Chopper-stabilized absolute distance meter
JP2005169397A (ja) * 2003-12-05 2005-06-30 Seiko Epson Corp レーザ照射装置、液滴吐出装置、レーザ照射方法、液滴吐出方法及び位置制御装置
JP2005337912A (ja) * 2004-05-27 2005-12-08 Nikon Corp 位置計測装置、露光装置、及びデバイスの製造方法
JP2013545976A (ja) 2010-10-25 2013-12-26 株式会社ニコン 装置、光学アセンブリ、物体を検査又は測定する方法、及び構造体を製造する方法
US9214353B2 (en) * 2012-02-26 2015-12-15 Solexel, Inc. Systems and methods for laser splitting and device layer transfer
JP2014083562A (ja) * 2012-10-23 2014-05-12 Olympus Corp レーザ照射ユニット及びレーザ加工装置
US9789462B2 (en) 2013-06-25 2017-10-17 The Boeing Company Apparatuses and methods for accurate structure marking and marking-assisted structure locating
JP6244017B2 (ja) 2014-04-23 2017-12-06 国立研究開発法人科学技術振興機構 ブレード複合型開放流路装置およびその接合体
JP5854083B2 (ja) * 2014-05-21 2016-02-09 セイコーエプソン株式会社 位置制御方法、ロボット
DE102014018912A1 (de) * 2014-12-17 2015-06-18 Daimler Ag Vorrichtung und Verfahren zur Positionsermittlung eines Endeffektors eines Roboters
JP2017019072A (ja) 2015-07-14 2017-01-26 トヨタ自動車株式会社 位置計測システム
JP6674655B2 (ja) * 2016-01-12 2020-04-01 株式会社Ihi 相対データ較正装置と方法
US9815204B2 (en) * 2016-01-22 2017-11-14 The Boeing Company Apparatus and method to optically locate workpiece for robotic operations
JP6464213B2 (ja) * 2017-02-09 2019-02-06 ファナック株式会社 レーザ加工ヘッドおよび撮影装置を備えるレーザ加工システム
JP6626036B2 (ja) * 2017-04-18 2019-12-25 ファナック株式会社 測定機能を有するレーザ加工システム
JP7014226B2 (ja) * 2017-05-01 2022-02-01 株式会社ニコン 加工装置
WO2019082312A1 (ja) * 2017-10-25 2019-05-02 株式会社ニコン 加工装置、及び、移動体の製造方法
CN111246965A (zh) * 2017-10-25 2020-06-05 株式会社尼康 加工装置、涂料、加工方法、及移动体的制造方法
EP3613544A1 (en) * 2018-08-22 2020-02-26 Hilti Aktiengesellschaft Mobile construction robot

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4534257A4 (en) * 2022-06-02 2026-04-22 Nikon Corp MEASURING SYSTEM, PROCESSING SYSTEM, MEASURING METHOD AND PROCESSING METHOD
EP4534258A4 (en) * 2022-06-02 2026-04-22 Nikon Corp MEASURING SYSTEM, PROCESSING SYSTEM, MEASURING METHOD AND PROCESSING METHOD

Also Published As

Publication number Publication date
US20230256537A1 (en) 2023-08-17
US20260034609A1 (en) 2026-02-05
EP4190477A1 (en) 2023-06-07
JP7601100B2 (ja) 2024-12-17
BR112023001423A2 (pt) 2023-03-07
EP4190477A4 (en) 2024-04-10
JP2025029124A (ja) 2025-03-05
US12459056B2 (en) 2025-11-04
JPWO2022024246A1 (https=) 2022-02-03
AU2020460879A1 (en) 2023-03-16
CN116133783A (zh) 2023-05-16
WO2022024246A1 (ja) 2022-02-03

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