CA3028758A1 - Systemes et procedes d'interrogation de parametres a une pluralite d'emplacements dans un echantillon - Google Patents
Systemes et procedes d'interrogation de parametres a une pluralite d'emplacements dans un echantillon Download PDFInfo
- Publication number
- CA3028758A1 CA3028758A1 CA3028758A CA3028758A CA3028758A1 CA 3028758 A1 CA3028758 A1 CA 3028758A1 CA 3028758 A CA3028758 A CA 3028758A CA 3028758 A CA3028758 A CA 3028758A CA 3028758 A1 CA3028758 A1 CA 3028758A1
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- pulses
- laser source
- sample
- ultrafast laser
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- 238000005259 measurement Methods 0.000 claims abstract description 42
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- 238000004891 communication Methods 0.000 claims description 7
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
- G01B9/02008—Two or more frequencies or sources used for interferometric measurement by using a frequency comb
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4795—Scattering, i.e. diffuse reflection spatially resolved investigating of object in scattering medium
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/069—Supply of sources
- G01N2201/0696—Pulsed
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Optics & Photonics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Un système (100) d'interrogation de paramètres à une pluralité d'emplacements dans un échantillon (108) comprend une première et une seconde source laser ultrarapides (102, 104), un dispositif de référence (110), et des unités de détecteur et de processeur (124, 128). La première et la seconde source laser ultrarapides (102, 104) fournissent une première et une seconde pluralité d'impulsions, respectivement, dans un domaine temporel de l'ordre de la picoseconde ou moins pour interagir avec l'échantillon au niveau de la pluralité d'emplacements dans l'échantillon (108) pour fournir des impulsions traitées. En outre, la première et la seconde source laser ultrarapides (102 et 104) sont configurées pour fournir des fréquences de peigne ayant une première et une seconde fréquence de répétition, respectivement. L'unité de détection (124) est configurée pour détecter au moins une partie des impulsions traitées, de la seconde pluralité d'impulsions et des impulsions référencées. L'unité de processeur (128) est configurée pour traiter les impulsions détectées et fournir des mesures des paramètres pour la pluralité d'emplacements dans l'échantillon (108).
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IN201641022596 | 2016-06-30 | ||
| IN201641022596 | 2016-06-30 | ||
| PCT/US2017/040325 WO2018005987A1 (fr) | 2016-06-30 | 2017-06-30 | Systèmes et procédés d'interrogation de paramètres à une pluralité d'emplacements dans un échantillon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA3028758A1 true CA3028758A1 (fr) | 2018-01-04 |
Family
ID=59363241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA3028758A Abandoned CA3028758A1 (fr) | 2016-06-30 | 2017-06-30 | Systemes et procedes d'interrogation de parametres a une pluralite d'emplacements dans un echantillon |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP3479099A1 (fr) |
| CN (1) | CN109328300A (fr) |
| CA (1) | CA3028758A1 (fr) |
| RU (1) | RU2729950C2 (fr) |
| WO (1) | WO2018005987A1 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102022116927A1 (de) | 2022-07-07 | 2024-01-18 | Trumpf Laser Gmbh | Laserbearbeitungsmaschine mit frequenzkammbasiertem Abstandssensor sowie zugehöriges Verfahren mit frequenzkammbasierter Abstandsmessung |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5814820A (en) * | 1996-02-09 | 1998-09-29 | The Board Of Trustees Of The University Of Illinois | Pump probe cross correlation fluorescence frequency domain microscope and microscopy |
| EP1851532A1 (fr) * | 2005-02-14 | 2007-11-07 | Board of Trustees of Michigan State University | Systeme laser ultra-rapide |
| RU2384835C1 (ru) * | 2008-12-15 | 2010-03-20 | Институт физики полупроводников Сибирского отделения Российской академии наук | Эллипсометр |
| JP5984351B2 (ja) * | 2011-09-14 | 2016-09-06 | キヤノン株式会社 | 計測装置 |
| US9341516B2 (en) * | 2013-08-30 | 2016-05-17 | Agilent Technologies, Inc. | System for performing optical spectroscopy including interferometer |
| CN104316186B (zh) * | 2014-07-07 | 2016-08-24 | 华东师范大学 | 一种基于光学频率梳的光谱测量方法 |
| CN104316180B (zh) * | 2014-11-02 | 2016-06-01 | 华东师范大学 | 基于连续稳频激光的双光学频率梳光学成像方法 |
| US20160153835A1 (en) * | 2014-12-02 | 2016-06-02 | Imra America, Inc. | Comb resolved fourier transform spectroscopy |
| CN105548036B (zh) * | 2015-12-08 | 2018-04-06 | 上海理工大学 | 一种自适应双光梳光谱系统 |
-
2017
- 2017-06-30 EP EP17740541.2A patent/EP3479099A1/fr not_active Withdrawn
- 2017-06-30 CA CA3028758A patent/CA3028758A1/fr not_active Abandoned
- 2017-06-30 CN CN201780040823.9A patent/CN109328300A/zh active Pending
- 2017-06-30 WO PCT/US2017/040325 patent/WO2018005987A1/fr unknown
- 2017-06-30 RU RU2018145350A patent/RU2729950C2/ru active
Also Published As
| Publication number | Publication date |
|---|---|
| RU2018145350A (ru) | 2020-07-30 |
| WO2018005987A8 (fr) | 2019-03-14 |
| WO2018005987A1 (fr) | 2018-01-04 |
| RU2729950C2 (ru) | 2020-08-13 |
| RU2018145350A3 (fr) | 2020-07-30 |
| CN109328300A (zh) | 2019-02-12 |
| EP3479099A1 (fr) | 2019-05-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FZDE | Discontinued |
Effective date: 20221230 |
|
| FZDE | Discontinued |
Effective date: 20221230 |