CA2992321C - Device for electrically measuring a force - Google Patents

Device for electrically measuring a force Download PDF

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Publication number
CA2992321C
CA2992321C CA2992321A CA2992321A CA2992321C CA 2992321 C CA2992321 C CA 2992321C CA 2992321 A CA2992321 A CA 2992321A CA 2992321 A CA2992321 A CA 2992321A CA 2992321 C CA2992321 C CA 2992321C
Authority
CA
Canada
Prior art keywords
force
metal electrode
thin insulating
insulating film
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CA2992321A
Other languages
English (en)
French (fr)
Other versions
CA2992321A1 (en
Inventor
Jan Klemm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102015111425.9A external-priority patent/DE102015111425B4/de
Application filed by Individual filed Critical Individual
Publication of CA2992321A1 publication Critical patent/CA2992321A1/en
Application granted granted Critical
Publication of CA2992321C publication Critical patent/CA2992321C/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/225—Measuring circuits therefor
    • G01L1/2262—Measuring circuits therefor involving simple electrical bridges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Force In General (AREA)
CA2992321A 2015-07-14 2016-07-09 Device for electrically measuring a force Active CA2992321C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102015111425.9 2015-07-14
DE102015111425.9A DE102015111425B4 (de) 2014-07-18 2015-07-14 Verfahren und Einrichtung zur elektrischen Kraftmessung mittels Isolationsdünnschicht
PCT/DE2016/100305 WO2017008784A1 (de) 2014-07-18 2016-07-09 Verfahren und einrichtung zur elektrischen kraftmessung mittels isolationsdünnschicht

Publications (2)

Publication Number Publication Date
CA2992321A1 CA2992321A1 (en) 2017-01-19
CA2992321C true CA2992321C (en) 2020-06-09

Family

ID=56567326

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2992321A Active CA2992321C (en) 2015-07-14 2016-07-09 Device for electrically measuring a force

Country Status (3)

Country Link
AU (1) AU2016292465B2 (ru)
CA (1) CA2992321C (ru)
EA (1) EA039446B1 (ru)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003214962A (ja) * 2002-01-18 2003-07-30 Toyoda Mach Works Ltd 荷重センサー
DE10253178B4 (de) * 2002-09-10 2004-08-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verwendung einer Schicht aus diamantartigem Kohlenstoff
DE102010024808A1 (de) * 2010-06-23 2011-12-29 Deutsches Zentrum für Luft- und Raumfahrt e.V. Piezoresistiver Kraftsensor

Also Published As

Publication number Publication date
EA039446B1 (ru) 2022-01-27
AU2016292465B2 (en) 2020-10-29
CA2992321A1 (en) 2017-01-19
AU2016292465A1 (en) 2018-03-01
EA201890310A1 (ru) 2018-05-31

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Effective date: 20180222