CA2968601A1 - Combined membrane and pressure swing adsorption method for recovery of helium - Google Patents

Combined membrane and pressure swing adsorption method for recovery of helium Download PDF

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CA2968601A1
CA2968601A1 CA2968601A CA2968601A CA2968601A1 CA 2968601 A1 CA2968601 A1 CA 2968601A1 CA 2968601 A CA2968601 A CA 2968601A CA 2968601 A CA2968601 A CA 2968601A CA 2968601 A1 CA2968601 A1 CA 2968601A1
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helium
membrane
process gas
separation stage
stream
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CA2968601C (en
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Christian Voss
Akos Tota
Martin Bauer
Frank Jennewein
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Linde GmbH
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Linde GmbH
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    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D51/00—Auxiliary pretreatment of gases or vapours to be cleaned
    • B01D51/10—Conditioning the gas to be cleaned
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/225—Multiple stage diffusion
    • B01D53/226—Multiple stage diffusion in serial connexion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/229—Integrated processes (Diffusion and at least one other process, e.g. adsorption, absorption)
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    • C01B23/00—Noble gases; Compounds thereof
    • C01B23/001—Purification or separation processes of noble gases
    • C01B23/0036—Physical processing only
    • C01B23/0042—Physical processing only by making use of membranes
    • C—CHEMISTRY; METALLURGY
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    • C01B23/0094—Combined chemical and physical processing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/18—Noble gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/108—Hydrogen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/30—Sulfur compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/40—Nitrogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/50—Carbon oxides
    • B01D2257/504—Carbon dioxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
    • B01D2257/553—Compounds comprising hydrogen, e.g. silanes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40001—Methods relating to additional, e.g. intermediate, treatment of process gas
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    • C01B2210/00—Purification or separation of specific gases
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    • C01B2210/0009—Physical processing
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    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0029—Obtaining noble gases
    • C01B2210/0031—Helium
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    • C01—INORGANIC CHEMISTRY
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    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0043—Impurity removed
    • C01B2210/0093—Metals or metal compounds
    • C01B2210/0096—Metal hydrides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
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    • C01B2210/0043—Impurity removed
    • C01B2210/0098—Other impurities
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/40—Capture or disposal of greenhouse gases of CO2
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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  • Chemical & Material Sciences (AREA)
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  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Inorganic Chemistry (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Separation Of Gases By Adsorption (AREA)

Abstract

The invention relates to a method of obtaining helium from a process gas, wherein at least the following steps are executed: feeding a helium-containing process gas having a pressure of less than 15 bar to a first membrane separation stage (2) having a first membrane (4) which is more readily permeable for helium than for at least one further component present in the process gas; guiding a first retentate stream to a second membrane separation stage (3) having a second membrane (5) which is more readily permeable for helium than for at least one further component present in the process gas; separating helium from a first helium-containing permeate stream by means of pressure swing adsorption to produce a helium-containing product stream; and recycling a second helium-containing permeate stream to the first membrane separation stage (2), and recycling a purge gas from the pressure swing adsorption to the first membrane separation stage (2).

Description

Combined membrane-pressure swing adsorption method for recovery of helium Description The invention relates to a method of recovering helium from a process gas.
The prior art discloses various methods of obtaining or recovering helium (especially pure helium) from a helium-containing gas, or concentrating the helium content. For example, EP 1 427 508 Al discloses a combined membrane adsorption method for recovery of helium. In this case, helium (especially pure helium) used is contaminated by an application. The contaminated helium is subsequently subjected to adsorptive purification.
In addition, US 5,632,803 A discloses a method in which a helium-enriched permeate stream is obtained from a process gas at elevated pressure in a first step by means of a membrane separation stage. In a first pressure swing adsorption, the permeate stream is subsequently concentrated to about 50% by volume of helium. A second pressure swing adsorption is then used to obtain a helium product having a purity of more than 95% by volume from this concentrated stream.
There are also known methods in which purely adsorptive or cryogenic approaches are pursued. These are frequently methods which serve merely for concentration of helium.
Helium is of great significance for many applications, but is generally only available in diluted form, for example in natural gas or purge gases from various production methods. Because helium is a finite raw material, methods by which helium can be obtained or recovered are of increasing economic significance. It is therefore necessary to find a method by which helium can be obtained/recovered with high purity but simultaneously high yield.
Proceeding from this, the problem addressed by the present invention is that of providing a process by which helium is obtainable with preferably high purity with a simultaneously high yield. The features of the invention are apparent from the independent claim, for which advantageous configurations are indicated in the dependent claims and described hereinafter. The features of the claims can be
2 combined in any technically viable manner, for which it is also possible to refer to the elucidations from the description which follows and features from the figures comprising supplementary configurations of the invention.
The problem addressed by the invention is solved in that a method of obtaining helium from a helium-containing process is described, which is especially conducted using a plant according to the invention, and which at least comprises the following steps:
a. feeding a helium-containing process gas having a pressure of less than bar, preferably of less than 10 bar, to a compression which compresses the process gas by means of a compressor prior to introduction into the first membrane separation stage. More particularly, no further compressor is provided in the plant;
b. feeding the process gas that leaves the compression to a prepurifying unit in which the troublesome components such as SF6 or NF3, a metal hydride, are removed;
c. guiding the process gas removed from the troublesome components to a first membrane separation stage having a first membrane which is more readily permeable for helium than for at least one further component present in the process gas (e.g. nitrogen, CO2, Ar, 02, methane, see also above), producing a first retentate stream and a first permeate stream, with helium depleted in the first retentate stream and enriched in the first permeate stream;
d. guiding the first retentate stream including components retained by the first membrane to a second membrane separation stage having a second membrane which is more readily permeable for helium than for at least one further component present in the process gas (e.g. nitrogen and/or methane, see above), producing a second retentate stream and a second permeate stream, with helium depleted in the second retentate stream and enriched in the second permeate stream;
e. removing helium from the first helium-containing permeate stream including components that have passed through the first membrane by means of pressure swing adsorption to produce a helium-containing product stream especially having a high helium content; and f. recycling the second helium-containing permeate stream including components that have passed through the second membrane to the first
3 membrane separation stage, and recycling a purge gas from the pressure swing adsorption to the first membrane separation stage, the purge gas especially having been used beforehand for purging of an adsorber used in the pressure swing adsorption.
The two membrane separation stages can of course also be operated by means of a sweep gas. For this purpose, for example, it is possible to provide one sweep gas inlet on each permeate side.
The at least one membrane of the particular membrane separation stage has better, i.e. higher, permeability for helium than for at least one other component present in the process gas stream. Preferably, the permeability of the particular membrane is at its highest for helium and lower for all other components of the process gas. Such an other component or a corresponding gas molecule may especially be nitrogen (N2), /5 carbon dioxide (CO2), argon (Ar), oxygen (02) or methane (CH4). The helium correspondingly accumulates in the particular permeate stream, while it is depleted in the particular retentate stream.
In an advantageous embodiment, the process gas is also conducted through a prepurifying unit which serves to remove components that are troublesome in the downstream process in the process gas. The pre purifying unit is provided downstream of the compressor and upstream of the first membrane separation stage. The prepurifying unit preferably has at least one of the following functional units:
a temperature swing adsorption unit, - a reactor for conducting a reaction for removing the troublesome component(s) from the process gas (e.g. a non-regeneratable ad- or chemisorption unit (called a guard bed)).
In principle, however, it is also possible to use a catalyst for conversion of trace components (e.g. oxidation of Hz, S11-14, hydrocarbons).
The prepurifying unit is preferably set up to remove at least one of the following troublesome components: Hz, hydrocarbons, H20, CO2, ammonia, sulphur compounds, fluorine gases (SF6, NF3), silanes, phosphines/arsine, halogenated hydrocarbons (CFa, etc.), metal hydrides etc., which are used, for example, in chemical vapour deposition and alternative methods.
4 For adsorptive removal of the impurities, one or more non-regeneratable adsorbers (called guard beds) is/are used as pre purifying unit upstream of the first membrane separation stage. Alternatively, it is possible to use a temperature swing adsorption (TSA) with at least two adsorbers. In this case, the process stream is first guided into a first adsorber in which the adsorption of troublesome components is conducted.
Other adsorbers are being regenerated or are on standby. The gas from the first adsorber, in order to achieve high bed exploitation with simultaneously high purity, can be guided into a downstream adsorber which is not to be regenerated, into the guard bed.
The arrangement of a prepurifying unit (especially TSA and/or guard bed) upstream of the membrane separation stages protects the membranes from impurities.
In the method according to the invention, preferably two and especially exactly two membrane separation stages are used, in which case preferably only the first membrane separation stage is arranged as a preliminary stage to the pressure swing adsorption unit for processing the product gas, i.e. (pure) helium, from the helium-containing gas supplied. The second membrane separation stage, by contrast, preferably provides a permeate gas for recycling to the first membrane separation stage.
A first retentate stream conduit arranged between the first membrane separation stage and the second membrane separation stage thus connects the first retentate outlet of the first membrane separation stage to the second product gas inlet of the second membrane separation stage.
A first permeate stream conduit arranged between the first membrane separation stage and the pressure swing adsorption unit connects the first permeate stream outlet of the first membrane separation stage to the third product gas inlet of the pressure swing adsorption unit. The pressure swing adsorption unit in this case especially has at least two adsorbers, such that one adsorber can always be in adsorptive operation, while the other adsorber can be regenerated, for which purpose the pressure in the adsorber is lowered and the adsorber is purged with a purge gas. It is thus possible to run the adsorption process continuously. Other modes of operation are also conceivable.

There is at least one first recycle conduit arranged between the second permeate stream outlet of the second membrane separation stage and the feed conduit, through which the (second) permeate stream can be recycled from the second membrane separation stage into the feed conduit or into the first membrane separation stage. In
5 this case, the second permeate stream is thus fed to the process stream, and so the helium content of the process stream to the first membrane separation stage is correspondingly increased. There is a second recycle conduit arranged between the purge gas outlet and the feed conduit or the first recycle conduit, through which the purge gas can be fed to the process gas. This distinctly increases the yield, since He gets into the tail gas in the course of regeneration of the adsorbers, and this would be lost without the recycling. The second retentate stream outlet removes the fraction of gas which has not passed through the at least one second membrane, i.e. has ultimately remained on the second retentate side, as offgas. This fraction has only a very low helium content, preferably less than 0.1% by volume of helium.
In the first membrane separation stage, the permeate stream preferably has a helium content of 20% by volume or more. The pressure swing adsorption subsequently enables a helium content of more than 95% by volume, preferably of more than 99% by volume. Membrane materials used for the membranes of the first and second membrane separation stages are preferably polyinnides (PI), polysulphones (PSf) or polyaramids (PA). The temperatures in the two membrane separation stages and in the pressure swing and temperature swing adsorption are preferably within a range from 0 C to 120 C, preferably within a range from 20 C to 60 C. The inlet streams into the two membrane separation stages or into the temperature swing adsorption preferably have a pressure in the range from 10 bar to 80 bar, preferably in the range from 15 bar to 60 bar. The inlet stream into the pressure swing adsorption preferably has a pressure in the range from 5 bar to 20 bar. The outlet pressure is especially 0 bar to 3 bar lower in each case than the respective inlet pressure.
By removing a majority of the helium of the retentate stream of the first membrane separation stage as permeate stream in the second membrane separation stage, a high yield is achieved, i.e. a retentate stream having a very low helium content is discharged from the process. The process is especially intended for recovery of helium from process gases or offgas streams at atmospheric pressure or a slightly elevated pressure of preferably up to 15 bar. It is particularly suitable for recovering helium from
6 offgas streams from manufacturing processes, especially in the electronics industry and in the semiconductor industry.
The recycle stream from the second membrane separation stage (second permeate stream) and the recycle stream from the pressure swing adsorption unit (purge gas) is preferably introduced into the feed conduit to the first membrane separation stage upstream of the compressor.
The process proposed here is particularly suitable for being executed in a plant according to the invention or a helium recovery plant according to the above description. A characteristic feature in this process is that the second permeate stream from the second membrane and also the purge gas stream from the pressure swing adsorption can be recycled into the first membrane separation stage.
In this case, the first membrane separation stage preferably produces a first permeate stream having a helium content of 25% by volume or more. At the product gas outlet of the pressure swing adsorption, a product gas or helium gas having a purity of 95% by volume or more is produced, preferably of 99% by volume or more. In addition, the second retentate stream is especially discarded or sent to a further use (see below).
In a further advantageous embodiment of the process, the process gas is (especially exclusively) compressed upstream of the first membrane separation stage (preferably to a pressure in the range from 15 bara to 60 bara). It is thus especially possible to provide only one (optionally multistage) compression of the process gas in the method according to the invention. As a result, the capital and operating costs for this process are correspondingly comparatively low.
In a further advantageous embodiment of the process, upstream of the first membrane separation stage and especially downstream of said compression, the process gas is freed of any troublesome components, preferably by means of a temperature swing adsorption and/or another reaction (for example in an adsorber and/or reactor).
In a further advantageous configuration of the method according to the invention, the process gas from which helium is to be recovered is a manufacturing offgas from a manufacturing process for production of an electronic element and/or semiconductor
7 element, especially with removal of at least one of the following components of the process gas in said prepurification: H2, hydrocarbons, H20, CO2, sulphur compounds, silanes, phosphines/arsine, halogenated hydrocarbons, fluorine gases (SFs, NF3), metal hydrides etc.
In a further advantageous configuration of the method according to the invention, the second retentate stream including components retained by the second membrane is used for regeneration of one (or more) adsorber(s) used in the temperature swing adsorption (see above).
In addition, the second retentate stream which has not passed through the second membrane can be expanded to perform work, especially with generation of electrical energy.
With regard to the recycling of the second permeate stream into the first membrane /5 separation stage and the recycling of the purge gas into the first membrane separation stage, it may not be necessary to recycle the entirety of each stream. It is also conceivable to recycle just a substream in each case into the first membrane separation stage.
The invention described above is elucidated in detail hereinafter against the technical background in question with reference to the accompanying drawings, which show preferred embodiments. The figure shows:
Fig. 1: a method according to the invention for separating helium from a process gas and a helium separation plant according to the invention.
Fig. 1 shows a plant 1 according to the invention. If a process gas to be treated is an offgas from a manufacturing process or a manufacturing line 25, especially for production of electronic elements and/or semiconductor elements, the plant is also referred to as helium recovery plant 24 and may comprise the manufacturing process or the manufacturing line 25.
The process gas/offgas is fed to a compressor 22 via a feed conduit 20 and is compressed therein and optionally prepurified downstream of the compressor 22, especially by means of a temperature swing adsorption 23. Subsequently, the
8 optionally prepurified process gas is fed via a first process gas inlet 8 to a first membrane separation stage 2, specifically on the first retentate side 6. A
process gas fraction having a high helium content which can pass through the first membrane 4 arrives on the first permeate side 12 and exits there as the first permeate stream via the first permeate stream outlet 14 and is fed to the pressure swing adsorption unit 16 via the first permeate stream conduit 27.
The proportion of the process gas which does not pass through the first membrane 4 in the first membrane separation stage 2, i.e. is ultimately retained by the membrane 4, remains on the first retentate side 6 and is discharged as first retentate stream via the first retentate stream outlet 10. Via the first retentate stream conduit 26, the first retentate stream is then introduced via the second process gas inlet 9 into the second membrane separation stage 3, namely to the second retentate side 7. The process gas which passes through the second membrane 5 arrives on the second permeate side and flows through the second permeate outlet 15 as the second permeate stream into the first recycle conduit 28, through which the second permeate stream is fed back to the feed conduit 20 or to the first membrane separation stage 2, preferably upstream of the compressor 22.
The process gas component in the second membrane separation stage 3 which does not pass through the second membrane 5 is removed as the second retentate stream through the second retentate stream outlet 11 and the first offgas conduit 30.
This (low-helium) offgas can especially be used for purging adsorbers of the temperature swing adsorption 23.
The first permeate stream is introduced into the pressure swing adsorption unit 16 via the first permeate stream conduit 27 and via the third process gas inlet 17. A
purge gas obtained in the pressure swing adsorption is introduced back into the feed conduit 20 or the first membrane separation stage 2, preferably upstream of the compressor 22, via the purge gas outlet 18 and via the second recycle conduit 29, here by means of the first recycle conduit 28. The first permeate stream which has been purified further by pressure swing adsorption is dispensed via the product gas outlet 19 as product gas or pure helium gas, preferably with a helium content of more than 95% by volume, more preferably more than 99% by volume, and can be sent to a further use via the
9 product gas conduit 21. A tail gas from the temperature swing adsorption 23 is removed via a second offgas conduit 31.

List of reference numerals 1 Helium separation plant 2 First membrane separation stage 3 Second membrane separation stage 4 First membrane 5 Second membrane 6 First retentate side 7 Second retentate side 8 First process gas inlet 9 Second process gas inlet
10 First retentate stream outlet
11 Second retentate stream outlet
12 First permeate side
13 Second permeate side
14 First permeate stream outlet Second permeate stream outlet 16 Pressure swing adsorption unit 17 Third process gas inlet 18 Purge gas outlet 19 Product gas outlet Feed conduit 21 Product gas conduit 22 Compressor stage 23 Prepurifying unit 24 Helium recovery plant Manufacturing line 26 First retentate stream conduit 27 First permeate stream conduit 28 First recycle conduit 29 Second recycle conduit First offgas conduit 31 Second offgas conduit

Claims (7)

Claims
1. Method of obtaining helium from a helium-containing process gas, having at least the following steps:
a) feeding a helium-containing process gas to a compression (22), said helium-containing process gas having a pressure of less than 15 bar, preferably of less than 10 bar, b) feeding the process gas that leaves the compression (22) to a prepurifying unit (23) in which the troublesome components are removed;
c) guiding the process gas removed from the troublesome components to a first membrane separation stage (2) having a first membrane (4) which is more readily permeable for helium than for at least one further component present in the process gas;
d) guiding a first retentate stream that has not passed through the first membrane (4) to a second membrane separation stage (3) having a second membrane (5) which is more readily permeable for helium than for at least one further component present in the process gas;
e) separating helium from a first helium-containing permeate stream that has passed through the first membrane (4) by means of pressure swing adsorption to produce a helium-containing product stream; and f) recycling a second helium-containing permeate stream that has passed through the second membrane (5) to the first membrane separation stage (2), and recycling a purge gas from the pressure swing adsorption (16) to the first membrane separation stage (2).
2. Method according to Claim 1, characterized in that a temperature swing adsorption or a reaction, especially a thermal oxidation, is conducted in the prepurifying unit (23).
3. Method according to either of Claims 1 and 2, characterized i n that the process gas is a manufacturing offgas from a manufacturing process (25) for production of an electronic and/or semiconductor element, the troublesome components to be removed in said prepurification including at least one of the following components:
H2, a hydrocarbon, H2O, CO2, a sulphur compound, a silane, a phosphine, arsine, a halogenated hydrocarbon, a fluorine gas, especially SF6 or NF3, a metal hydride.
4. Method according to any of Claims 1 to 3, characterized in that a second retentate stream (30) that has not passed through the second membrane (5) is used for regeneration of an adsorber used in the temperature swing adsorption (23).
5. Method according to any of Claims 1 to 4, characterized in that a second retentate stream (30) that has not passed through the second membrane (5) is expanded to perform work, especially with generation of electrical energy.
6. Method according to any of Claims 1 to 5, characterized in that the helium content of the first permeate stream is not less than 25% by volume, and/or in that the helium content of the product stream is not less than 95% by volume, especially not less than 99% by volume.
7. Method according to any of Claims 1 to 6, characterized in that the helium-containing process gas h as a helium content of more than 0.1% by volume, preferably of more than 0.5% by volume.
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EP15000862.1A EP3034466B1 (en) 2014-12-17 2015-03-24 Combined membrane pressure change adsorption method for recovering helium
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