CA2606964A1 - Surveillance d'articles electroniques mos, etiquette/dispositif rf et/ou d'identification rf, et procedes de fabrication et methodes d'utilisation connexes - Google Patents
Surveillance d'articles electroniques mos, etiquette/dispositif rf et/ou d'identification rf, et procedes de fabrication et methodes d'utilisation connexes Download PDFInfo
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- CA2606964A1 CA2606964A1 CA 2606964 CA2606964A CA2606964A1 CA 2606964 A1 CA2606964 A1 CA 2606964A1 CA 2606964 CA2606964 CA 2606964 CA 2606964 A CA2606964 A CA 2606964A CA 2606964 A1 CA2606964 A1 CA 2606964A1
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- Prior art keywords
- semiconductor component
- capacitor plate
- dielectric film
- semiconductor
- inductor
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- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 238000001029 thermal curing Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910021341 titanium silicide Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/10—Inductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
- H01L21/02628—Liquid deposition using solutions
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA2606964A CA2606964C (fr) | 2007-10-18 | 2007-10-18 | Surveillance d'articles electroniques mos, etiquette/dispositif rf et/ou d'identification rf, et procedes de fabrication et methodes d'utilisation connexes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA2606964A CA2606964C (fr) | 2007-10-18 | 2007-10-18 | Surveillance d'articles electroniques mos, etiquette/dispositif rf et/ou d'identification rf, et procedes de fabrication et methodes d'utilisation connexes |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2606964A1 true CA2606964A1 (fr) | 2009-04-18 |
CA2606964C CA2606964C (fr) | 2013-08-13 |
Family
ID=40560103
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA2606964A Expired - Fee Related CA2606964C (fr) | 2007-10-18 | 2007-10-18 | Surveillance d'articles electroniques mos, etiquette/dispositif rf et/ou d'identification rf, et procedes de fabrication et methodes d'utilisation connexes |
Country Status (1)
Country | Link |
---|---|
CA (1) | CA2606964C (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112523610A (zh) * | 2019-09-18 | 2021-03-19 | 南京日杰通信科技有限公司 | Rf8.2m电子开锁器 |
-
2007
- 2007-10-18 CA CA2606964A patent/CA2606964C/fr not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112523610A (zh) * | 2019-09-18 | 2021-03-19 | 南京日杰通信科技有限公司 | Rf8.2m电子开锁器 |
Also Published As
Publication number | Publication date |
---|---|
CA2606964C (fr) | 2013-08-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKLA | Lapsed |
Effective date: 20211018 |