CA2590402A1 - Capteur sismique mems (microsysteme electromecanique) a fibre optique avec masse supportee par des poutres articulees - Google Patents

Capteur sismique mems (microsysteme electromecanique) a fibre optique avec masse supportee par des poutres articulees Download PDF

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Publication number
CA2590402A1
CA2590402A1 CA002590402A CA2590402A CA2590402A1 CA 2590402 A1 CA2590402 A1 CA 2590402A1 CA 002590402 A CA002590402 A CA 002590402A CA 2590402 A CA2590402 A CA 2590402A CA 2590402 A1 CA2590402 A1 CA 2590402A1
Authority
CA
Canada
Prior art keywords
reflector
sensor
proof mass
frame
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002590402A
Other languages
English (en)
Inventor
Tiansheng Zhou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CA002590402A priority Critical patent/CA2590402A1/fr
Publication of CA2590402A1 publication Critical patent/CA2590402A1/fr
Abandoned legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • G01V1/181—Geophones
    • G01V1/184—Multi-component geophones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Remote Sensing (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Environmental & Geological Engineering (AREA)
  • Geology (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geophysics (AREA)
  • Micromachines (AREA)
CA002590402A 2007-05-18 2007-05-18 Capteur sismique mems (microsysteme electromecanique) a fibre optique avec masse supportee par des poutres articulees Abandoned CA2590402A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA002590402A CA2590402A1 (fr) 2007-05-18 2007-05-18 Capteur sismique mems (microsysteme electromecanique) a fibre optique avec masse supportee par des poutres articulees

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA002590402A CA2590402A1 (fr) 2007-05-18 2007-05-18 Capteur sismique mems (microsysteme electromecanique) a fibre optique avec masse supportee par des poutres articulees

Publications (1)

Publication Number Publication Date
CA2590402A1 true CA2590402A1 (fr) 2008-11-18

Family

ID=40030420

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002590402A Abandoned CA2590402A1 (fr) 2007-05-18 2007-05-18 Capteur sismique mems (microsysteme electromecanique) a fibre optique avec masse supportee par des poutres articulees

Country Status (1)

Country Link
CA (1) CA2590402A1 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103513273A (zh) * 2012-06-28 2014-01-15 中国科学院地质与地球物理研究所 陆用四分量数字地震检波器
WO2015013839A1 (fr) * 2013-08-02 2015-02-05 中国科学院地质与地球物理研究所 Géophone numérique à plusieurs composants à double paramètre de vitesse et d'accélération à utilisation terrestre
CN105842478A (zh) * 2016-06-03 2016-08-10 中国航空工业集团公司北京长城计量测试技术研究所 一种耐高温一体化弹性结构光纤f-p腔加速度传感器
CN107167837A (zh) * 2017-05-25 2017-09-15 西安思坦测控技术有限公司 一种双检检波器
CN110133323A (zh) * 2019-06-05 2019-08-16 华北水利水电大学 一种反射式光纤加速度测量装置
EP3865453A1 (fr) * 2020-02-13 2021-08-18 Miraex SA Capteur de système micro-opto-mécanique, agencement et procédé de fabrication
CN116182919A (zh) * 2023-04-23 2023-05-30 西北工业大学 基于光纤f-p腔的三轴高温振动传感器及其制备方法

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103513273A (zh) * 2012-06-28 2014-01-15 中国科学院地质与地球物理研究所 陆用四分量数字地震检波器
WO2015013839A1 (fr) * 2013-08-02 2015-02-05 中国科学院地质与地球物理研究所 Géophone numérique à plusieurs composants à double paramètre de vitesse et d'accélération à utilisation terrestre
CN105842478A (zh) * 2016-06-03 2016-08-10 中国航空工业集团公司北京长城计量测试技术研究所 一种耐高温一体化弹性结构光纤f-p腔加速度传感器
CN107167837A (zh) * 2017-05-25 2017-09-15 西安思坦测控技术有限公司 一种双检检波器
CN107167837B (zh) * 2017-05-25 2023-06-23 西安思坦仪器股份有限公司 一种双检检波器
CN110133323A (zh) * 2019-06-05 2019-08-16 华北水利水电大学 一种反射式光纤加速度测量装置
CN110133323B (zh) * 2019-06-05 2021-05-11 华北水利水电大学 一种反射式光纤加速度测量装置
EP3865453A1 (fr) * 2020-02-13 2021-08-18 Miraex SA Capteur de système micro-opto-mécanique, agencement et procédé de fabrication
US11898899B2 (en) 2020-02-13 2024-02-13 Miraex Sa Micro-opto-mechanical system sensor, arrangement and manufacturing method
CN116182919A (zh) * 2023-04-23 2023-05-30 西北工业大学 基于光纤f-p腔的三轴高温振动传感器及其制备方法
CN116182919B (zh) * 2023-04-23 2023-09-12 西北工业大学 基于光纤f-p腔的三轴高温振动传感器及其制备方法

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