CA2561630A1 - Detecteur segmente de rayonnement avec cathode de protection laterale - Google Patents
Detecteur segmente de rayonnement avec cathode de protection laterale Download PDFInfo
- Publication number
- CA2561630A1 CA2561630A1 CA002561630A CA2561630A CA2561630A1 CA 2561630 A1 CA2561630 A1 CA 2561630A1 CA 002561630 A CA002561630 A CA 002561630A CA 2561630 A CA2561630 A CA 2561630A CA 2561630 A1 CA2561630 A1 CA 2561630A1
- Authority
- CA
- Canada
- Prior art keywords
- detector
- cathode
- substrate
- sides
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000005855 radiation Effects 0.000 title claims abstract description 56
- 239000004065 semiconductor Substances 0.000 claims abstract description 51
- 239000010931 gold Substances 0.000 claims abstract description 32
- 229910052737 gold Inorganic materials 0.000 claims abstract description 32
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 31
- QWUZMTJBRUASOW-UHFFFAOYSA-N cadmium tellanylidenezinc Chemical compound [Zn].[Cd].[Te] QWUZMTJBRUASOW-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000008393 encapsulating agent Substances 0.000 claims abstract description 21
- 239000013078 crystal Substances 0.000 claims abstract description 19
- 238000005513 bias potential Methods 0.000 claims abstract description 8
- 238000001514 detection method Methods 0.000 claims abstract description 6
- 230000005251 gamma ray Effects 0.000 claims abstract description 6
- 239000004020 conductor Substances 0.000 claims description 57
- 238000000034 method Methods 0.000 claims description 55
- 238000004519 manufacturing process Methods 0.000 claims description 26
- 238000000151 deposition Methods 0.000 claims description 16
- 229920000642 polymer Polymers 0.000 claims description 15
- 239000011810 insulating material Substances 0.000 claims description 12
- 230000005684 electric field Effects 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 230000000873 masking effect Effects 0.000 claims description 6
- 229910004611 CdZnTe Inorganic materials 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 5
- 238000005289 physical deposition Methods 0.000 claims description 5
- 239000012777 electrically insulating material Substances 0.000 claims description 4
- 238000003491 array Methods 0.000 claims description 3
- 229910004613 CdTe Inorganic materials 0.000 claims description 2
- 229910007709 ZnTe Inorganic materials 0.000 claims description 2
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 claims description 2
- 238000007598 dipping method Methods 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 238000013461 design Methods 0.000 abstract description 32
- 239000010410 layer Substances 0.000 description 56
- 239000012212 insulator Substances 0.000 description 23
- 230000008569 process Effects 0.000 description 16
- 238000003384 imaging method Methods 0.000 description 15
- 230000006872 improvement Effects 0.000 description 15
- 230000001965 increasing effect Effects 0.000 description 12
- 230000000694 effects Effects 0.000 description 10
- 238000012545 processing Methods 0.000 description 9
- 230000008021 deposition Effects 0.000 description 8
- 230000005865 ionizing radiation Effects 0.000 description 8
- 239000000615 nonconductor Substances 0.000 description 7
- 230000004044 response Effects 0.000 description 7
- 238000000576 coating method Methods 0.000 description 6
- 238000005137 deposition process Methods 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 238000012937 correction Methods 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 238000011109 contamination Methods 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000007667 floating Methods 0.000 description 4
- 230000001464 adherent effect Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 208000032750 Device leakage Diseases 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- RPPBZEBXAAZZJH-UHFFFAOYSA-N cadmium telluride Chemical compound [Te]=[Cd] RPPBZEBXAAZZJH-UHFFFAOYSA-N 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000002939 deleterious effect Effects 0.000 description 2
- 238000002059 diagnostic imaging Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 206010053219 non-alcoholic steatohepatitis Diseases 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 238000010561 standard procedure Methods 0.000 description 2
- 229910052714 tellurium Inorganic materials 0.000 description 2
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- CEKJAYFBQARQNG-UHFFFAOYSA-N cadmium zinc Chemical compound [Zn].[Cd] CEKJAYFBQARQNG-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000031264 response to gamma radiation Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- XSOKHXFFCGXDJZ-UHFFFAOYSA-N telluride(2-) Chemical compound [Te-2] XSOKHXFFCGXDJZ-UHFFFAOYSA-N 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/24—Measuring radiation intensity with semiconductor detectors
- G01T1/241—Electrode arrangements, e.g. continuous or parallel strips or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/1446—Devices controlled by radiation in a repetitive configuration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0296—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe
- H01L31/02966—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe including ternary compounds, e.g. HgCdTe
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/115—Devices sensitive to very short wavelength, e.g. X-rays, gamma-rays or corpuscular radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1828—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe
- H01L31/1832—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe comprising ternary compounds, e.g. Hg Cd Te
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA002561630A CA2561630A1 (fr) | 2006-02-22 | 2006-09-29 | Detecteur segmente de rayonnement avec cathode de protection laterale |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA 2541256 CA2541256A1 (fr) | 2006-02-22 | 2006-02-22 | Electrode de protection pour detecteur monolithique de rayonnement |
CA2,541,256 | 2006-02-22 | ||
US11/527,707 | 2006-09-27 | ||
CA002561630A CA2561630A1 (fr) | 2006-02-22 | 2006-09-29 | Detecteur segmente de rayonnement avec cathode de protection laterale |
Publications (1)
Publication Number | Publication Date |
---|---|
CA2561630A1 true CA2561630A1 (fr) | 2007-08-22 |
Family
ID=38433831
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002561630A Abandoned CA2561630A1 (fr) | 2006-02-22 | 2006-09-29 | Detecteur segmente de rayonnement avec cathode de protection laterale |
Country Status (1)
Country | Link |
---|---|
CA (1) | CA2561630A1 (fr) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2762924A3 (fr) * | 2013-01-31 | 2017-10-04 | Nuctech Company Limited | Détecteurs de rayonnement |
CN112436062A (zh) * | 2020-12-01 | 2021-03-02 | 上海大学 | 用于碲锌镉辐射探测器的复合电极及其制备方法 |
CN114447146A (zh) * | 2021-12-27 | 2022-05-06 | 江苏赛诺格兰医疗科技有限公司 | 一种sipm探测器的返修方法 |
-
2006
- 2006-09-29 CA CA002561630A patent/CA2561630A1/fr not_active Abandoned
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2762924A3 (fr) * | 2013-01-31 | 2017-10-04 | Nuctech Company Limited | Détecteurs de rayonnement |
CN112436062A (zh) * | 2020-12-01 | 2021-03-02 | 上海大学 | 用于碲锌镉辐射探测器的复合电极及其制备方法 |
CN114447146A (zh) * | 2021-12-27 | 2022-05-06 | 江苏赛诺格兰医疗科技有限公司 | 一种sipm探测器的返修方法 |
CN114447146B (zh) * | 2021-12-27 | 2023-05-26 | 江苏赛诺格兰医疗科技有限公司 | 一种sipm探测器的返修方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7223982B1 (en) | Segmented radiation detector with side shielding cathode | |
US6046454A (en) | Semiconductor radiation detector with enhanced charge collection | |
US5677539A (en) | Semiconductor radiation detector with enhanced charge collection | |
US6034373A (en) | Semiconductor radiation detector with reduced surface effects | |
US8063378B2 (en) | High-energy detector | |
US20100193694A1 (en) | Solid-state radiation detector with improved sensitivity | |
US6021173A (en) | X-ray apparatus with sensor matrix | |
US20130126746A1 (en) | Array of virtual frisch-grid detectors with common cathode and reduced length of shielding electrodes | |
WO2013006453A1 (fr) | Dispositif détecteur de rayonnement destiné à rejeter et à exclure des événements de collectage de charge incomplet | |
US9134439B2 (en) | Array of virtual Frisch-grid detectors with common cathode and reduced length of shielding electrodes | |
US20110272589A1 (en) | Hybrid Anode for Semiconductor Radiation Detectors | |
CA2561630A1 (fr) | Detecteur segmente de rayonnement avec cathode de protection laterale | |
WO2007100538A2 (fr) | Procédé de fabrication de contacts segmentés pour détecteurs de rayonnement par photolithographie directe | |
Bolotnikov et al. | Optimization of virtual Frisch-grid CdZnTe detector designs for imaging and spectroscopy of gamma rays | |
US10502842B2 (en) | Radiation detector | |
US8815627B2 (en) | Method of manufacturing an ionizing radiation detection device | |
CA2447403C (fr) | Element de detection de radiations a semiconducteurs | |
US20060033029A1 (en) | Low-voltage, solid-state, ionizing-radiation detector | |
Bolotnikov et al. | Large area/volume CZT nuclear detectors | |
US20120043633A1 (en) | Radiation detector | |
Bolotnikov et al. | Array of virtual Frisch-grid detectors with common cathode and reduced length of shielding electrodes | |
CN113140642A (zh) | 一种CdZnTe辐射探测器 | |
WO1998044568A2 (fr) | Appareil de radiographie a capteur matriciel | |
GB2352084A (en) | Forming contacts on semiconductor substrates for radiation detectors and imaging devices using two photoresist layers |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
FZDE | Dead |
Effective date: 20140930 |