CA2428218A1 - Apparatus for parallel detection of the behaviour of mechanical micro-oscillators - Google Patents
Apparatus for parallel detection of the behaviour of mechanical micro-oscillators Download PDFInfo
- Publication number
- CA2428218A1 CA2428218A1 CA002428218A CA2428218A CA2428218A1 CA 2428218 A1 CA2428218 A1 CA 2428218A1 CA 002428218 A CA002428218 A CA 002428218A CA 2428218 A CA2428218 A CA 2428218A CA 2428218 A1 CA2428218 A1 CA 2428218A1
- Authority
- CA
- Canada
- Prior art keywords
- micro
- oscillators
- incident light
- light beams
- integer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 title claims abstract 7
- 238000005259 measurement Methods 0.000 claims abstract 4
- 230000003287 optical effect Effects 0.000 claims abstract 3
- 230000035508 accumulation Effects 0.000 claims abstract 2
- 238000009825 accumulation Methods 0.000 claims abstract 2
- 239000000919 ceramic Substances 0.000 claims 4
- 230000010287 polarization Effects 0.000 claims 3
- 230000000737 periodic effect Effects 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- 230000005284 excitation Effects 0.000 claims 1
- 239000000835 fiber Substances 0.000 claims 1
- 230000010355 oscillation Effects 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 230000001360 synchronised effect Effects 0.000 claims 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Acoustics & Sound (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Optics & Photonics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Abstract
L'invention concerne un appareil de détection en parallèle du comportement de microoscillateurs mécaniques interagissant avec l'échantillon (21). Par des moyens optiques, on mesure l'amplitude et la phase de résonance des microoscillateurs (12). Selon l'invention, une source (1) est active pendant une fraction 1/n de la période (n entier) et de phase variable p/n de la période (p entier). On réalise des interférences entre des faisceaux lumineux produits par réflexion de faisceaux lumineux incidents (7) et (8), sur les microoscillateurs (12). Des moyens déplacent périodiquement les microoscillateurs (12). On fait varier la valeur du paramètre p (p entier) et on intègre N mesures élémentaires pour obtenir une mesure représentative pour chacune des valeurs de p. On calcule la phase et l'amplitude de chaque microoscillateur (12) à partir des données représentatives obtenues pour chaque valeur de p et ceci pour un grand nombre d'accumulations. Cette invention est appliquée dans le domaine des nanotechnologies.The invention relates to an apparatus for parallel detection of the behavior of mechanical micro-oscillators interacting with the sample (21). By optical means, the amplitude and the resonance phase of the microoscillators (12) are measured. According to the invention, a source (1) is active during a fraction 1 / n of the period (n integer) and of variable phase p / n of the period (p integer). Interference is produced between light beams produced by reflection of incident light beams (7) and (8), on the microoscillators (12). Means periodically move the micro oscillators (12). The value of the parameter p (p integer) is varied and N elementary measurements are integrated to obtain a representative measurement for each of the values of p. The phase and the amplitude of each micro-oscillator (12) are calculated from the representative data obtained for each value of p and this for a large number of accumulations. This invention is applied in the field of nanotechnologies.
Claims (9)
- des microoscillateurs mécaniques (12) montés sur un support (13) interagissant avec l'échantillon (21), des moyens optiques pour la mesure de l'amplitude et de la phase des oscillations des microoscillateurs (12), caractérisé en ce que lesdits moyens optiques comportent - une source lumineuse (1) périodique, active pendant une fraction 1/n de la période (n entier) et de phase variable p/n de la période (p entier), des moyens de production de faisceaux lumineux incidents (7) et (8), dirigés respectivement sur chacune des extrémités (10) et (11) des microoscillateurs (12), - des moyens de séparation desdits faisceaux lumineux incidents (7) et (8), - des moyens d'interférence des faisceaux lumineux réfléchis et modulés, produits par réflexion des faisceaux lumineux incidents sur . les microoscillateurs (12), produisant ,une image d'interférence, - un détecteur multicanal (14) comprenant au moins autant de canaux qu'il existe de microoscillateurs (12), et en ce qu'il comporte:
des moyens de déplacement périodique des microosciliateurs (12), dans leur ensemble (21), - des moyens permettant de faire varier la valeur du paramètre p (p entier) et d'intégrer N mesures élémentaires pour obtenir une mesure représentative pour chacune des valeurs de p, - un ordinateur (20) permet d'enregistrer, dans une mémoire tampon, les données représentatives obtenues pour chaque valeur de p et ceci pour un grand nombre d'accumulations et permet ensuite le calcul de la phase et de l'amplitude de chaque microoscillateur (12). 1. Apparatus for parallel detection of the behavior of mechanical micro oscillators:
- mechanical microoscillators (12) mounted on a support (13) interacting with the sample (21), optical means for measuring the amplitude and phase of micro oscillator oscillations (12), characterized in that said optical means comprise - a periodic light source (1), active for a fraction 1 / n of the period (n integer) and of variable phase p / n of the period (p integer), means for producing incident light beams (7) and (8), directed respectively on each of the ends (10) and (11) of the micro oscillators (12), - means for separating said incident light beams (7) and (8) means of interference of the reflected light beams and modulated, produced by reflection of the incident light beams on. the microoscillators (12), producing an interference image, - a multi-channel detector (14) comprising at least as many channels that there are micro oscillators (12), and in that it comprises:
means for periodically moving the microosciliators (12), as a whole (21), means for varying the value of the parameter p (p integer) and integrate N elementary measurements to obtain a measurement representative for each of the values of p, - a computer (20) makes it possible to record, in a buffer memory, the representative data obtained for each value of p and this for a large number of accumulations and then allows the calculation of the phase and the amplitude of each micro-oscillator (12).
fibre (11) des microoscillateurs (12) est fonctionnalisée pour la détection sélective et différenciée de l'échantillon (21). 4, Apparatus according to claim 2, characterized in that the end fiber (11) of the micro oscillators (12) is functionalized for detection selective and differentiated from the sample (21).
un cube séparateur de polarisation (5) qui polarise linéairement le faisceau lumineux incident, un prisme de Wollaston (6) qui sépare le faisceau lumineux incident en deux faisceaux de polarisations orthogonales (7) et (8). 5. Apparatus according to claim 1, characterized in that the means of separation and polarization of the incident light beams comprise:
a polarization splitter cube (5) which linearly polarizes the incident light beam, a Wollaston prism (6) which separates the incident light beam into two beams of orthogonal polarizations (7) and (8).
en ce que l'ensemble composé des microoscillateurs (12), du support (15) et de la céramique piézoélectrique (16) est placé sur un banc, l'ensemble étant à
la pression atmosphérique. 6. Apparatus according to any one of claims 1 to 5, characterized in that the assembly composed of the micro oscillators (12), the support (15) and piezoelectric ceramic (16) is placed on a bench, the assembly being at atmospheric pressure.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0014215A FR2816407B1 (en) | 2000-11-06 | 2000-11-06 | APPARATUS FOR PARALLEL DETECTION OF THE BEHAVIOR OF MECHANICAL MICROOSCILLATORS |
| FR00/14215 | 2000-11-06 | ||
| PCT/FR2001/003409 WO2002037090A1 (en) | 2000-11-06 | 2001-11-05 | Apparatus for parallel detection of the behaviour of mechanical micro-oscillators |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2428218A1 true CA2428218A1 (en) | 2002-05-10 |
| CA2428218C CA2428218C (en) | 2010-01-26 |
Family
ID=8856115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2428218A Expired - Fee Related CA2428218C (en) | 2000-11-06 | 2001-11-05 | Apparatus for parallel detection of the behaviour of mechanical micro-oscillators |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7173714B2 (en) |
| EP (1) | EP1412728A1 (en) |
| JP (1) | JP3971305B2 (en) |
| AU (1) | AU2002223742A1 (en) |
| CA (1) | CA2428218C (en) |
| FR (1) | FR2816407B1 (en) |
| WO (1) | WO2002037090A1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU168080U1 (en) * | 2016-06-10 | 2017-01-17 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Омский государственный университет путей сообщения" | DEVICE FOR DETERMINING THE AMPLITUDE OF THE OSCILLATION OF METAL SAMPLES IN LABORATORY CONDITIONS |
| CN106840359B (en) * | 2017-01-16 | 2020-07-07 | 北京航空航天大学 | Double-beam interference calibrating device for laser vibrometer |
| CN110595600B (en) * | 2019-08-21 | 2022-03-22 | 南京理工大学 | Video frame rate sound field visualization system and method based on polarization parameter imaging |
| CN115574214B (en) * | 2022-10-14 | 2024-05-07 | 季华实验室 | Multi-freedom-degree-adjustable camera centering device |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2664048B1 (en) * | 1990-06-29 | 1993-08-20 | Centre Nat Rech Scient | MULTICHANNEL ANALOGUE DETECTION METHOD AND DEVICE. |
| US5445008A (en) * | 1994-03-24 | 1995-08-29 | Martin Marietta Energy Systems, Inc. | Microbar sensor |
| US6219145B1 (en) * | 1998-02-17 | 2001-04-17 | California Institute Of Technology | Interferometric system for precision imaging of vibrating structures |
| US6016686A (en) * | 1998-03-16 | 2000-01-25 | Lockheed Martin Energy Research Corporation | Micromechanical potentiometric sensors |
| JP2001091441A (en) * | 1999-07-16 | 2001-04-06 | Japan Science & Technology Corp | Nanometer-order mechanical oscillator, manufacturing method thereof, and measurement device using it |
| US6906450B2 (en) * | 2000-04-20 | 2005-06-14 | The University Of Bristol | Resonant probe driving arrangement and a scanning probe microscope including such an arrangement |
| US6765680B2 (en) * | 2002-06-21 | 2004-07-20 | Agere Systems Inc. | Methods of testing and manufacturing micro-electrical mechanical mirrors |
-
2000
- 2000-11-06 FR FR0014215A patent/FR2816407B1/en not_active Expired - Fee Related
-
2001
- 2001-11-05 US US10/415,984 patent/US7173714B2/en not_active Expired - Fee Related
- 2001-11-05 CA CA2428218A patent/CA2428218C/en not_active Expired - Fee Related
- 2001-11-05 EP EP01992882A patent/EP1412728A1/en not_active Withdrawn
- 2001-11-05 WO PCT/FR2001/003409 patent/WO2002037090A1/en active Application Filing
- 2001-11-05 AU AU2002223742A patent/AU2002223742A1/en not_active Abandoned
- 2001-11-05 JP JP2002539795A patent/JP3971305B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004513341A (en) | 2004-04-30 |
| US20040052687A1 (en) | 2004-03-18 |
| US7173714B2 (en) | 2007-02-06 |
| EP1412728A1 (en) | 2004-04-28 |
| CA2428218C (en) | 2010-01-26 |
| WO2002037090A1 (en) | 2002-05-10 |
| AU2002223742A1 (en) | 2002-05-15 |
| FR2816407A1 (en) | 2002-05-10 |
| JP3971305B2 (en) | 2007-09-05 |
| FR2816407B1 (en) | 2003-03-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |
Effective date: 20151105 |