CA2417393C - Micro-dispositif a micro-plateforme mobile et processus de fabrication connexe - Google Patents

Micro-dispositif a micro-plateforme mobile et processus de fabrication connexe Download PDF

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Publication number
CA2417393C
CA2417393C CA 2417393 CA2417393A CA2417393C CA 2417393 C CA2417393 C CA 2417393C CA 2417393 CA2417393 CA 2417393 CA 2417393 A CA2417393 A CA 2417393A CA 2417393 C CA2417393 C CA 2417393C
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CA
Canada
Prior art keywords
photoresist layer
microplatform
microdevice
support member
selectively
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA 2417393
Other languages
English (en)
Other versions
CA2417393A1 (fr
Inventor
Hubert Jerominek
Patrice Topart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institut National dOptique
Original Assignee
Institut National dOptique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institut National dOptique filed Critical Institut National dOptique
Priority to CA 2417393 priority Critical patent/CA2417393C/fr
Publication of CA2417393A1 publication Critical patent/CA2417393A1/fr
Application granted granted Critical
Publication of CA2417393C publication Critical patent/CA2417393C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00182—Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0156—Lithographic techniques
    • B81C2201/0159—Lithographic techniques not provided for in B81C2201/0157

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
CA 2417393 2003-01-27 2003-01-27 Micro-dispositif a micro-plateforme mobile et processus de fabrication connexe Expired - Fee Related CA2417393C (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA 2417393 CA2417393C (fr) 2003-01-27 2003-01-27 Micro-dispositif a micro-plateforme mobile et processus de fabrication connexe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA 2417393 CA2417393C (fr) 2003-01-27 2003-01-27 Micro-dispositif a micro-plateforme mobile et processus de fabrication connexe

Publications (2)

Publication Number Publication Date
CA2417393A1 CA2417393A1 (fr) 2004-07-27
CA2417393C true CA2417393C (fr) 2010-09-21

Family

ID=32739221

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2417393 Expired - Fee Related CA2417393C (fr) 2003-01-27 2003-01-27 Micro-dispositif a micro-plateforme mobile et processus de fabrication connexe

Country Status (1)

Country Link
CA (1) CA2417393C (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015226155A1 (de) * 2015-12-21 2017-06-22 Robert Bosch Gmbh Verfahren zur Herstellung eines Schockdetektors und ein solcher Schockdetektor

Also Published As

Publication number Publication date
CA2417393A1 (fr) 2004-07-27

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