CA2391373A1 - Systeme d'inspection de composants optiques - Google Patents

Systeme d'inspection de composants optiques Download PDF

Info

Publication number
CA2391373A1
CA2391373A1 CA002391373A CA2391373A CA2391373A1 CA 2391373 A1 CA2391373 A1 CA 2391373A1 CA 002391373 A CA002391373 A CA 002391373A CA 2391373 A CA2391373 A CA 2391373A CA 2391373 A1 CA2391373 A1 CA 2391373A1
Authority
CA
Canada
Prior art keywords
inspection system
optical components
optical component
producing
high contrast
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002391373A
Other languages
English (en)
Other versions
CA2391373C (fr
Inventor
Sheldon L. Epstein
Richard G. Gore
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Novartis AG
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority claimed from CA002167675A external-priority patent/CA2167675C/fr
Publication of CA2391373A1 publication Critical patent/CA2391373A1/fr
Application granted granted Critical
Publication of CA2391373C publication Critical patent/CA2391373C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Image Input (AREA)
CA002391373A 1993-07-29 1994-07-28 Systeme d'inspection de composants optiques Expired - Fee Related CA2391373C (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US9996693A 1993-07-29 1993-07-29
US08/099,966 1993-07-29
CA002167675A CA2167675C (fr) 1993-07-29 1994-07-28 Systeme d'inspection de composants optiques

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CA002167675A Division CA2167675C (fr) 1993-07-29 1994-07-28 Systeme d'inspection de composants optiques

Publications (2)

Publication Number Publication Date
CA2391373A1 true CA2391373A1 (fr) 1995-02-09
CA2391373C CA2391373C (fr) 2004-09-28

Family

ID=25678309

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002391373A Expired - Fee Related CA2391373C (fr) 1993-07-29 1994-07-28 Systeme d'inspection de composants optiques

Country Status (1)

Country Link
CA (1) CA2391373C (fr)

Also Published As

Publication number Publication date
CA2391373C (fr) 2004-09-28

Similar Documents

Publication Publication Date Title
CA2156461A1 (fr) Inspection par moyen optique des parametres dimensionnels du revetement de contenants
CA2167675A1 (fr) Systeme d'inspection de composants optiques
CA2263360A1 (fr) Appareil d'imagerie d'empreintes digitales avec lentille auxiliaire
CA2351086A1 (fr) Systeme d'acquisition optique a contraste eleve et a faible distorsion pour la capture d'images
CA2150524A1 (fr) Methode et systeme servant a inspecter des emballages
CA2246698A1 (fr) Microscope confocal
CA2372376A1 (fr) Dispositif et procede permettant de controler les yeux d'un sujet au moyen de deux longueurs d'ondes lumineuses differentes
CA2098043A1 (fr) Systeme de support sans ecartement pour capteur d'images du type a contact
KR910004158B1 (en) Thermal deformation measuring system of ceranics and the like
DE69225284T2 (de) Regelbares Bildaufnahmesystem mit zwei Detektoren
EP0152181A3 (fr) Appareil de contrôle
CA2152914A1 (fr) Detection pour l'analyse spectrale de parties d'image multiples
EP0571891A3 (en) Camera system optics
CA2153591A1 (fr) Methode et appareil d'imagerie
EP0383307A3 (fr) Appareil de lecture d'image
MY134609A (en) Dynamic three dimensional vision inspection system
GB2147764B (en) Microscope for producing high resolution images without precision optics
CA2179077A1 (fr) Methode d'inspection automatique pour la mesure sans contact du defaut de centrage d'un element sur un objet
ES550396A0 (es) Un dispositivo sensor de campo visual multiple.
WO1996013738A3 (fr) Systeme et procede d'eclairage a masquage central
WO1997022883A3 (fr) Procede et dispositif de mesure optique pour mesurer une grandeur alternative avec mise a l'echelle de l'intensite
EP0384377A3 (fr) Système de détecteur optique
EP0273295A3 (en) Optical pick-up apparatus
CA2391373A1 (fr) Systeme d'inspection de composants optiques
TW365652B (en) Method and system for improved optical imaging in microlithography

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed