CA2296090A1 - Pressure sensor and a method of manufacturing the same - Google Patents

Pressure sensor and a method of manufacturing the same Download PDF

Info

Publication number
CA2296090A1
CA2296090A1 CA002296090A CA2296090A CA2296090A1 CA 2296090 A1 CA2296090 A1 CA 2296090A1 CA 002296090 A CA002296090 A CA 002296090A CA 2296090 A CA2296090 A CA 2296090A CA 2296090 A1 CA2296090 A1 CA 2296090A1
Authority
CA
Canada
Prior art keywords
pressure sensor
manufacturing
diaphragm unit
same
spacer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002296090A
Other languages
French (fr)
Other versions
CA2296090C (en
Inventor
Masayoshi Esashi
Yoichi Haga
Takashi Katsumata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2296090A1 publication Critical patent/CA2296090A1/en
Application granted granted Critical
Publication of CA2296090C publication Critical patent/CA2296090C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light

Abstract

A reflective type movable diaphragm unit 2 is formed on a groove 26-carrying silicon substrate 3, and a bonding agent layer serving also as a spacer 24 is provided around the diaphragm unit, this spacer 24 being bonded to a half mirror layer 11 of an optical fiber 1 with a cross-sectionally semicircular diaphragm portion 25 further provided on the diaphragm unit 2, whereby a pressure sensor is formed.
CA002296090A 1998-05-14 1998-11-17 Pressure sensor and a method of manufacturing the same Expired - Lifetime CA2296090C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP13198798 1998-05-14
JP131987/1998 1998-05-14
PCT/JP1998/005163 WO1999058944A1 (en) 1998-05-14 1998-11-17 Pressure sensor and a method of manufacturing the same

Publications (2)

Publication Number Publication Date
CA2296090A1 true CA2296090A1 (en) 1999-11-18
CA2296090C CA2296090C (en) 2006-08-22

Family

ID=15070914

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002296090A Expired - Lifetime CA2296090C (en) 1998-05-14 1998-11-17 Pressure sensor and a method of manufacturing the same

Country Status (4)

Country Link
EP (1) EP0997721B1 (en)
AU (1) AU1172499A (en)
CA (1) CA2296090C (en)
WO (1) WO1999058944A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2599696C (en) 2005-03-02 2014-04-01 Fiso Technologies Inc. Fabry-perot optical sensor and method of manufacturing the same
US7684657B2 (en) 2005-08-12 2010-03-23 Fiso Technologies Inc. Single piece Fabry-Perot optical sensor and method of manufacturing the same
CN110207806B (en) * 2019-07-10 2021-10-26 国网上海市电力公司 Oblique end face optical fiber vibration sensor and vibration measuring method thereof
CN110207807A (en) * 2019-07-10 2019-09-06 国网上海市电力公司 A kind of optical fibre vibration sensor and its method of measurement vibration
CN112284585B (en) * 2020-10-16 2022-03-08 广州特种机电设备检测研究院 Device based on optical fiber testing wheel pressure

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61235731A (en) 1985-04-11 1986-10-21 Sharp Corp Pressure sensing element
JPH023128A (en) 1988-03-03 1990-01-08 Toray Ind Inc Optical disk substrate
SE515191C2 (en) * 1992-05-05 2001-06-25 Volvo Ab Process for manufacturing a pressure measuring device and pressure measuring device
JPH07260617A (en) * 1994-03-23 1995-10-13 Riken Corp Pressure sensor and pressure measuring system
JPH08201196A (en) 1995-01-26 1996-08-09 Mitsubishi Cable Ind Ltd Pressure sensor head and its manufacture
JPH10111202A (en) * 1996-10-08 1998-04-28 Yazaki Corp Composite mesa structure, its formation, composite mesa type diaphragm and pressure sensor using the same

Also Published As

Publication number Publication date
EP0997721A4 (en) 2002-11-05
CA2296090C (en) 2006-08-22
AU1172499A (en) 1999-11-29
EP0997721B1 (en) 2013-04-10
EP0997721A1 (en) 2000-05-03
WO1999058944A1 (en) 1999-11-18

Similar Documents

Publication Publication Date Title
CA2465311A1 (en) Optical displacement sensor
MY117895A (en) Optical recording medium and method of manufacturing same
CA2147070A1 (en) Method of securing optical fiber components, devices and fibers to the same or to mounting fixtures
AU4411000A (en) Composite ophthalmic lens and method for obtaining same
CA2313636A1 (en) Process for producing a primed rubber article for bonding to a pressure sensitive adhesive
CA2343132A1 (en) Improved seal for electrochromic devices
CA2465299A1 (en) Optical displacement sensor element
AU7258896A (en) Dual layer optical medium having partially reflecting gold alloy layer
EP0649008A3 (en) Zirconia diaphragm structure, method of producing the same, and piezoelectric/electrostrictive film element having the zirconia diaphragm structure.
EP0349206A3 (en) Bonded array of transmission media
AU2046592A (en) Process for the production of a composite sheet comprising a cellular core and at least one outer layer
EP2299310A3 (en) Electro-active semifinished lens blank
CA2183601A1 (en) Mirror Door and Method of Making Same
AU4584296A (en) Optical fiber and method of manufacturing the same
GB2368070A (en) Improved optical reflector for micro-machined mirrors
EP0854202A3 (en) Organic substrate provided with a light absorptive antireflection film and process for its production
CA2296090A1 (en) Pressure sensor and a method of manufacturing the same
CA2157070A1 (en) Optical lens of transparent plastic
EP0896229A3 (en) Anti-fogging and anti-reflection optical article
WO2002074706A8 (en) Attachment of optical elements
EP1145060A3 (en) Bonding operation for fabricating fiber optic terminus
CA2281653A1 (en) Lamination of optical fiber flexfoils
EP1271196A3 (en) Dispersion compensating optical fiber and dispersion compensating optical fiber module
CA2190285A1 (en) Optical Disk Structure, Method of Manufacturing the Same, and Apparatus for Manufacturing the Same
EP0341964A3 (en) Silicon micro sensor and manufacturing method therefor

Legal Events

Date Code Title Description
EEER Examination request
MKEX Expiry

Effective date: 20181119