CA2244271A1 - Evaporation of oxidation-sensitive compounds and evaporator for this purpose - Google Patents

Evaporation of oxidation-sensitive compounds and evaporator for this purpose

Info

Publication number
CA2244271A1
CA2244271A1 CA002244271A CA2244271A CA2244271A1 CA 2244271 A1 CA2244271 A1 CA 2244271A1 CA 002244271 A CA002244271 A CA 002244271A CA 2244271 A CA2244271 A CA 2244271A CA 2244271 A1 CA2244271 A1 CA 2244271A1
Authority
CA
Canada
Prior art keywords
solid surface
vaporizer
oxidation
fluid
sensitive compounds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002244271A
Other languages
French (fr)
Other versions
CA2244271C (en
Inventor
Jurgen Mohr
Frans Vansant
Axel Werner Polt
Stephan Scholl
Siegfried Kruger
Hartmut Staatz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BASF SE
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19602640A external-priority patent/DE19602640A1/en
Application filed by Individual filed Critical Individual
Publication of CA2244271A1 publication Critical patent/CA2244271A1/en
Application granted granted Critical
Publication of CA2244271C publication Critical patent/CA2244271C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

The invention concerns a method of vaporizing a fluid containing vaporizable oxidation-sensitive compounds in a vaporizer in which, for vaporization purposes, the fluid is brought into contact with a heated solid surface, direct contact between the resultant vapour phase and the heated solid surface axing largely prevented. The invention further concerns a vaporizer comprising a heatable solid surface (16), a device (2, 3) for heating the solid surface, and a device (10) for feeding a fluid containing vaporizable compounds to the healable solid surface. The fluid-feeding device is designed and disposed (12, 14, 18) in the vaporizer such that direct contact between the resultant vapour phase and the healable solid surface is largely prevented.
CA002244271A 1996-01-25 1997-01-20 Evaporation of oxidation-sensitive compounds and evaporator for this purpose Expired - Lifetime CA2244271C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19602640.7 1996-01-25
DE19602640A DE19602640A1 (en) 1996-01-25 1996-01-25 Process and evaporator for evaporating compounds sensitive to oxidation
PCT/EP1997/000245 WO1997026970A1 (en) 1996-01-25 1997-01-20 Method and vaporizer for vaporizing oxidation-sensitive compounds

Publications (2)

Publication Number Publication Date
CA2244271A1 true CA2244271A1 (en) 1997-07-31
CA2244271C CA2244271C (en) 2005-11-29

Family

ID=35520644

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002244271A Expired - Lifetime CA2244271C (en) 1996-01-25 1997-01-20 Evaporation of oxidation-sensitive compounds and evaporator for this purpose

Country Status (1)

Country Link
CA (1) CA2244271C (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115054931A (en) * 2022-08-18 2022-09-16 稀美资源(广东)有限公司 A splitter for tantalum ethoxide coarse product

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115054931A (en) * 2022-08-18 2022-09-16 稀美资源(广东)有限公司 A splitter for tantalum ethoxide coarse product

Also Published As

Publication number Publication date
CA2244271C (en) 2005-11-29

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Legal Events

Date Code Title Description
EEER Examination request
MKEX Expiry

Effective date: 20170120