CA2093257C - Electro-pneumatic signal converter - Google Patents
Electro-pneumatic signal converter Download PDFInfo
- Publication number
- CA2093257C CA2093257C CA 2093257 CA2093257A CA2093257C CA 2093257 C CA2093257 C CA 2093257C CA 2093257 CA2093257 CA 2093257 CA 2093257 A CA2093257 A CA 2093257A CA 2093257 C CA2093257 C CA 2093257C
- Authority
- CA
- Canada
- Prior art keywords
- bending element
- signal converter
- support
- housing
- sleeve insert
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005452 bending Methods 0.000 claims abstract description 43
- 230000000694 effects Effects 0.000 description 4
- 239000011324 bead Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- -1 e.g. Substances 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B5/00—Transducers converting variations of physical quantities, e.g. expressed by variations in positions of members, into fluid-pressure variations or vice versa; Varying fluid pressure as a function of variations of a plurality of fluid pressures or variations of other quantities
- F15B5/003—Transducers converting variations of physical quantities, e.g. expressed by variations in positions of members, into fluid-pressure variations or vice versa; Varying fluid pressure as a function of variations of a plurality of fluid pressures or variations of other quantities characterised by variation of the pressure in a nozzle or the like, e.g. nozzle-flapper system
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
- Measuring Fluid Pressure (AREA)
- Support Of The Bearing (AREA)
Abstract
In an electro-pneumatic signal converter, the piezoelectric bending element is elastically pretensioned against at least three support bearings, of which one can be adjusted to a desired setting. This consists of a sleeve insert, the position of which is fixed relative to the other support bearings after the initial adjustment, for example, by being cemented, and a support pin that can also be moved subsequently in an axial direction relative to the sleeve insert, which can also be simultaneously in the form of a contact pin.
Description
The present invention relates to an electro-pneumatic signal converter comprising a piezoelectric bending element which is elastically pretensioned against at least three bearing supports, of which at least one is adjustable to permit setting of the bending element relative to the port.
A signal converter of this type is known, for example, from EP-B1 191011. In this converter, the piezoelectric bending element is held by a guide spring that is anchored in the sender housing, pressed against the bearing supports, and lies on the supply-air port, for example, under spring tension. As soon as a voltage is applied to the bending element, this lifts away from the supply-air port and closes the exhaust-air port. The signal output of the signal converter, which was evacuated through the exhaust-air port, is thus connected to the supply-air port, so that pressure medium supplied through the supply-air port is present at the signal output as a pneumatic pressure signal. As soon as the voltage at the piezoelectric bending element is switched off, or its polarity is reversed, the bending element moves back into the starting position, when the air is once again removed from the signal output. This electro-pneumatic signal converter is distinguished by a low power requirement and operates without any notable energy consumption, so that it can advantageously be used to replace conventional solenoid valves for the electrical activation of pneumatic circuits and apparatuses.
The three point suspension of the piezoelectric on the support bearings permits initial setting or adjustment of the position of the bending element between the ports that are to be controlled. In addition to an adjustment by axial displacement of the ports that are to be controlled, this initial adjustment can be effected, in particular, by setting at least one of the three support bearings, when the effect of the pneumatic output signal can be very easily observed.
During the installation of the known signal converter described heretofore, it is usually difficult to avoid the piezoelectric bending element from being mechanically warped, at least briefly. As a result of the so-called mechanical relaxation (this is a familiar characteristic, in particular of piezo-ceramic), this bending only reverts in part l0 immediately after mechanical relief. Because of the fact that the relief of the bending element is effected by the adjustment of the support bearings, which are then preferably secured by adhesive, mechanical relaxation can still take place even after this initial adjustment. Signal converters that react in this way drift in the course of a few hours after installation or adjustment out of the usable and adjusted range of the bending element position; because of the adjustable support bearings that have already been permanently secured (and in particular cemented) this leads to the fact that the complete signal converter has to be considered as scrap.
It is an object of the present invention to so improve a signal converter of the type described in the introduction hereto that the disadvantages addressed heretofore are alleviated, and in that, in particular, the production wastage rate is not increased as a result of additional mechanical relaxation of the piezoelectric bending element or by adjustment errors only noted subsequently.
According to the present invention there is provided an electro-pneumatic signal converter, for controlling at least one pneumatic port, comprising a housing and a piezoelectric bending element mounted in that housing and resiliently biased against at least three supports. At least one of the supports is adjustable to permit setting of the bending element relative to the at least one port. The at least one adjustable support comprises a sleeve insert fixedly-mounted in the housing and a supporting pin axially-movable in that sleeve.
A signal converter of this type is known, for example, from EP-B1 191011. In this converter, the piezoelectric bending element is held by a guide spring that is anchored in the sender housing, pressed against the bearing supports, and lies on the supply-air port, for example, under spring tension. As soon as a voltage is applied to the bending element, this lifts away from the supply-air port and closes the exhaust-air port. The signal output of the signal converter, which was evacuated through the exhaust-air port, is thus connected to the supply-air port, so that pressure medium supplied through the supply-air port is present at the signal output as a pneumatic pressure signal. As soon as the voltage at the piezoelectric bending element is switched off, or its polarity is reversed, the bending element moves back into the starting position, when the air is once again removed from the signal output. This electro-pneumatic signal converter is distinguished by a low power requirement and operates without any notable energy consumption, so that it can advantageously be used to replace conventional solenoid valves for the electrical activation of pneumatic circuits and apparatuses.
The three point suspension of the piezoelectric on the support bearings permits initial setting or adjustment of the position of the bending element between the ports that are to be controlled. In addition to an adjustment by axial displacement of the ports that are to be controlled, this initial adjustment can be effected, in particular, by setting at least one of the three support bearings, when the effect of the pneumatic output signal can be very easily observed.
During the installation of the known signal converter described heretofore, it is usually difficult to avoid the piezoelectric bending element from being mechanically warped, at least briefly. As a result of the so-called mechanical relaxation (this is a familiar characteristic, in particular of piezo-ceramic), this bending only reverts in part l0 immediately after mechanical relief. Because of the fact that the relief of the bending element is effected by the adjustment of the support bearings, which are then preferably secured by adhesive, mechanical relaxation can still take place even after this initial adjustment. Signal converters that react in this way drift in the course of a few hours after installation or adjustment out of the usable and adjusted range of the bending element position; because of the adjustable support bearings that have already been permanently secured (and in particular cemented) this leads to the fact that the complete signal converter has to be considered as scrap.
It is an object of the present invention to so improve a signal converter of the type described in the introduction hereto that the disadvantages addressed heretofore are alleviated, and in that, in particular, the production wastage rate is not increased as a result of additional mechanical relaxation of the piezoelectric bending element or by adjustment errors only noted subsequently.
According to the present invention there is provided an electro-pneumatic signal converter, for controlling at least one pneumatic port, comprising a housing and a piezoelectric bending element mounted in that housing and resiliently biased against at least three supports. At least one of the supports is adjustable to permit setting of the bending element relative to the at least one port. The at least one adjustable support comprises a sleeve insert fixedly-mounted in the housing and a supporting pin axially-movable in that sleeve.
More specifically, there is provided a signal converter wherein the adjustable support bearing has a supporting pin arranged in a concentric sleeve insert, the position of which relative to the other support bearings is fixed after adjustment, and which can be adjusted axially relative to the sleeve insert. The adjustable support bearing is thus made essentially so as to be divided into two parts. The outer part, which is configured as a concentric sleeve insert, can be secured relative to the housing or to the other support bearings during the initial setting adjustment or after this has been done, for example, by adhesion, by compression or the like. The second part, which is configured as a supporting pin, is also adjustable after the initial setting or fixing of the first part in an axial direction relative to the insert sleeve, whereby corrections, for example, to counteract the continuing mechanical relaxation that has already been described, are possible after initial adjustment of the signal converter. The supporting pin itself needs only very small adjustment travel, for the positional errors of the bending element that occur after the initial adjustment are usually very small, relatively speaking. If the adjustable support pin is not to be additionally secured relative to the sleeve insert, the supporting pin can naturally be such as to be difficult to move within the sleeve insert so that any unintended maladjustment is precluded.
In a signal converter of the type described heretofore, in which the support bearing that can be moved to provide adjustment is also configured as an electrical contact for the bending element, in a preferred additional embodiment of the present invention provision is made such that the adjustable support pin serves directly as a contact pin. This permits a simple configuration of the signal converter, for both the support pin and the contact pin require direct contact with the surface of the piezoelectric bending element or the electrodes that are installed there.
According to another configuration of the present invention, the supporting pin can have a fine pitch thread that works in conjunction with the sleeve insert, which ensures precise adjustability and at the same time provides a simple method of ensuring that loss of adjustment will be difficult; this is achieved by the dimensions of the threads that work in conjunction with each other.
According to another embodiment of the present invention, the supporting pin can also have a sloping front end that lies against a support that projects eccentrically to the supporting pin on the bending element. This also provides for simple and precise subsequent adjustability of the supporting pin relative to the sleeve insert.
The invention will now be described in more detail, by way of example only, with reference to the accompanying drawings, in which:
Figure 1 is an axial cross-section through a signal converter configured according to the present invention, on the line I-I in figure 2;
Figure 2 is a cross-section on the line II-II in figure 1; and Figure 3 is a cross-section on the line III-IIT in figure 2.
The electric-pneumatic signal converter shown in figures 1 to 3 consists of a pick-up housing 1 forming a tightly sealed chamber 2, within which a piezoelectric bending element 3 is arranged. A pneumatic signal output 4 leads out of the chamber 2. In addition, a supply-air port 5 and an exhaust-air port 6 are installed in drilled holes in the housing 1 that are aligned with each other. The piezoelectric bending element 3 is secured and guided in the chamber 2 by means of a guide spring 7. This controls the supply-air port 5 and the exhaust-air part 6. Contact pins 8 and 9 are installed in the pick-up housing 1 in order to deliver electric power to the piezoelectric bending element 3.
The pick-up housing Z consists of two solid plates 10 and 11, which are preferably of rigid and preferably electrically insulating material, e.g., ceramic or glass.
The chamber 2 is formed by flat recesses 12 and 13 in the plates 10 and 11. It can be seen, in particular from figures 1 and 3, that the recesses 12, 13 in the plates 10 and 11 fit tightly around the piezoelectric bending element 3 and the associated guide spring 7, so that only the required tree play and the over-dimension that is required for manufacturing tolerances remain. The two plates 10 and 11 are an air-tight fit around the recesses 12, 13, and they are preferably cemented to each other.
Z5 The piezoelectric bending element 3 is essentially supported on three support bearings within the chamber 2, these being spaced apart from each other. In the exemplary embodiment that is shown, one support bearing 14 is formed on the lower end of a supporting pin that simultaneously serves as a contact pin 8. This is installed with a sleeve insert 15 in a drilled hole in the plate 11 of the pick-up housing 1. In contrast to this, the other supporting bearings are in the form of pivot bearings 16 that project from the plate 11 into the chamber 2 like knobs. The two supporting or pivot bearings 16 are indicated by dashed lines in figure 2.
The guide spring 7, which is shown in plan view in figure 2, presses the piezoelectric bending element 3 against the support bearings 14 and 16. This acts on the piezoelectric bending element 3 with a point-like supporting point 17 that is formed from a hemispherical bead, in an area that lies in an axial direction between the support bearing 14, at one end, and the bearings 16, at the other.
It can be seen from figure 2 that the point of support 17 is on a tongue 18 that is formed by lateral cuts 19. The guide spring 17 is secured to the pick-up housing 1 by tabs 20 that project from the sides over the piezoelectric bending element 3 and which are clamped securely between the two plates 10 and 11 of the pick-up housing 1. The contact pins 9 that are anchored in the pick-up housing 1 engage in drillings in the tabs 20 to provide a centering effect.
This also ensures the supply of electrical power through the contact spring 7 to the piezoelectric bending element 3. A
bead 21 that runs transversely to the guide spring 7 between the tabs 20 provides a stiffening effect. The bent-over edge 22 of the guide spring 7 also serves the same purpose and provides an additional centering effect; this edge extends into a groove 23 in the plate 10 of the pick-up housing 1.~ The guide spring has similar retaining tabs 24 that extend from the side in the area of the tongue 18;
these are bent around the piezoelectric bending element 3 and secure this.
It can be seen from the drawings that the piezoelectric bending element 3 is held securely in the pick-up housing 1 by the guide spring 7 and is guided precisely. It presses the piezoelectric bending element 3 against the support bearings 14 and 16 that are so arranged relative to each other that the end of the piezoelectric bending element 3 is pressed onto the supply-air part 5 and closes this tightly.
In this position, which is shown in figure 1, the signal output 4 is connected through the chamber 2 with the exhaust-air port 6 and is thereby relieved. When an electric voltage is supplied through the contact pins 8 and 9, the piezoelectric bending element flexes, whereupon it lifts away from the supply-air port 5 and closes the exhaust-air port 6. The pressure medium that is delivered through the supply-air port 5 can then move into the chamber 2, and out of this to the signal output 4, which means that the electrical signal is converted into a pneumatic pressure signal. As soon as the supply of electrical power is cut oft, the piezoelectric bending element 3 moves back into its starting position, whereupon the signal output 4 is once again relieved.
The three-point suspension of the piezoelectric bending element 3 on the plate 11 of the pick-up housing 1, or on the supporting bearings 14 and 16, respectively, permits precise adjustment of the position of the bending element 3 between the supply-air port 5 and the exhaust-air port 6.
Initial adjustment or setting is possible by axial adjustment of the supply-air port 5 and of the exhaust-air port 6, as well as of the sleeve insert 15 together with the support or contact pin 8, the lower end of which forms the support bearing 14. After this initial adjustment of the correct position of the bending element relative to the two ports 5 and 6, the sleeve insert 15 is fixed in its position relative to the pick-up housing 1, to which end, for example, the sleeve insert can be cemented into the drilling.
In order to permit another subsequent correction to this setting even after this initial adjustment or after the final establishment of the position of the sleeve insert 15 relative to the housing 1, the supporting or contact pin 8 is adjustable in the axial direction by way of a thread 25 with a. fine pitch that acts in conjunction with the sleeve insert 15, by rotation relative to the sleeve insert 1'S, when the supporting bearing 14 also remains additionally adjustable. Despite the small deflection of the piezoelectric bending element 3, this also makes precise subsequent adjustment of the signal converter.
Quite apart from the arrangement of three supporting bearings that is shown and which has been discussed, of which the one that simultaneously serves as an electrical contact is adjustable both initially and subsequently, a plurality of supporting bearings could also be provided and of these, once again, several could be adjustable either initially and/or subsequently, when this could also be done independently o~ the electrical contact that they provide.
In a signal converter of the type described heretofore, in which the support bearing that can be moved to provide adjustment is also configured as an electrical contact for the bending element, in a preferred additional embodiment of the present invention provision is made such that the adjustable support pin serves directly as a contact pin. This permits a simple configuration of the signal converter, for both the support pin and the contact pin require direct contact with the surface of the piezoelectric bending element or the electrodes that are installed there.
According to another configuration of the present invention, the supporting pin can have a fine pitch thread that works in conjunction with the sleeve insert, which ensures precise adjustability and at the same time provides a simple method of ensuring that loss of adjustment will be difficult; this is achieved by the dimensions of the threads that work in conjunction with each other.
According to another embodiment of the present invention, the supporting pin can also have a sloping front end that lies against a support that projects eccentrically to the supporting pin on the bending element. This also provides for simple and precise subsequent adjustability of the supporting pin relative to the sleeve insert.
The invention will now be described in more detail, by way of example only, with reference to the accompanying drawings, in which:
Figure 1 is an axial cross-section through a signal converter configured according to the present invention, on the line I-I in figure 2;
Figure 2 is a cross-section on the line II-II in figure 1; and Figure 3 is a cross-section on the line III-IIT in figure 2.
The electric-pneumatic signal converter shown in figures 1 to 3 consists of a pick-up housing 1 forming a tightly sealed chamber 2, within which a piezoelectric bending element 3 is arranged. A pneumatic signal output 4 leads out of the chamber 2. In addition, a supply-air port 5 and an exhaust-air port 6 are installed in drilled holes in the housing 1 that are aligned with each other. The piezoelectric bending element 3 is secured and guided in the chamber 2 by means of a guide spring 7. This controls the supply-air port 5 and the exhaust-air part 6. Contact pins 8 and 9 are installed in the pick-up housing 1 in order to deliver electric power to the piezoelectric bending element 3.
The pick-up housing Z consists of two solid plates 10 and 11, which are preferably of rigid and preferably electrically insulating material, e.g., ceramic or glass.
The chamber 2 is formed by flat recesses 12 and 13 in the plates 10 and 11. It can be seen, in particular from figures 1 and 3, that the recesses 12, 13 in the plates 10 and 11 fit tightly around the piezoelectric bending element 3 and the associated guide spring 7, so that only the required tree play and the over-dimension that is required for manufacturing tolerances remain. The two plates 10 and 11 are an air-tight fit around the recesses 12, 13, and they are preferably cemented to each other.
Z5 The piezoelectric bending element 3 is essentially supported on three support bearings within the chamber 2, these being spaced apart from each other. In the exemplary embodiment that is shown, one support bearing 14 is formed on the lower end of a supporting pin that simultaneously serves as a contact pin 8. This is installed with a sleeve insert 15 in a drilled hole in the plate 11 of the pick-up housing 1. In contrast to this, the other supporting bearings are in the form of pivot bearings 16 that project from the plate 11 into the chamber 2 like knobs. The two supporting or pivot bearings 16 are indicated by dashed lines in figure 2.
The guide spring 7, which is shown in plan view in figure 2, presses the piezoelectric bending element 3 against the support bearings 14 and 16. This acts on the piezoelectric bending element 3 with a point-like supporting point 17 that is formed from a hemispherical bead, in an area that lies in an axial direction between the support bearing 14, at one end, and the bearings 16, at the other.
It can be seen from figure 2 that the point of support 17 is on a tongue 18 that is formed by lateral cuts 19. The guide spring 17 is secured to the pick-up housing 1 by tabs 20 that project from the sides over the piezoelectric bending element 3 and which are clamped securely between the two plates 10 and 11 of the pick-up housing 1. The contact pins 9 that are anchored in the pick-up housing 1 engage in drillings in the tabs 20 to provide a centering effect.
This also ensures the supply of electrical power through the contact spring 7 to the piezoelectric bending element 3. A
bead 21 that runs transversely to the guide spring 7 between the tabs 20 provides a stiffening effect. The bent-over edge 22 of the guide spring 7 also serves the same purpose and provides an additional centering effect; this edge extends into a groove 23 in the plate 10 of the pick-up housing 1.~ The guide spring has similar retaining tabs 24 that extend from the side in the area of the tongue 18;
these are bent around the piezoelectric bending element 3 and secure this.
It can be seen from the drawings that the piezoelectric bending element 3 is held securely in the pick-up housing 1 by the guide spring 7 and is guided precisely. It presses the piezoelectric bending element 3 against the support bearings 14 and 16 that are so arranged relative to each other that the end of the piezoelectric bending element 3 is pressed onto the supply-air part 5 and closes this tightly.
In this position, which is shown in figure 1, the signal output 4 is connected through the chamber 2 with the exhaust-air port 6 and is thereby relieved. When an electric voltage is supplied through the contact pins 8 and 9, the piezoelectric bending element flexes, whereupon it lifts away from the supply-air port 5 and closes the exhaust-air port 6. The pressure medium that is delivered through the supply-air port 5 can then move into the chamber 2, and out of this to the signal output 4, which means that the electrical signal is converted into a pneumatic pressure signal. As soon as the supply of electrical power is cut oft, the piezoelectric bending element 3 moves back into its starting position, whereupon the signal output 4 is once again relieved.
The three-point suspension of the piezoelectric bending element 3 on the plate 11 of the pick-up housing 1, or on the supporting bearings 14 and 16, respectively, permits precise adjustment of the position of the bending element 3 between the supply-air port 5 and the exhaust-air port 6.
Initial adjustment or setting is possible by axial adjustment of the supply-air port 5 and of the exhaust-air port 6, as well as of the sleeve insert 15 together with the support or contact pin 8, the lower end of which forms the support bearing 14. After this initial adjustment of the correct position of the bending element relative to the two ports 5 and 6, the sleeve insert 15 is fixed in its position relative to the pick-up housing 1, to which end, for example, the sleeve insert can be cemented into the drilling.
In order to permit another subsequent correction to this setting even after this initial adjustment or after the final establishment of the position of the sleeve insert 15 relative to the housing 1, the supporting or contact pin 8 is adjustable in the axial direction by way of a thread 25 with a. fine pitch that acts in conjunction with the sleeve insert 15, by rotation relative to the sleeve insert 1'S, when the supporting bearing 14 also remains additionally adjustable. Despite the small deflection of the piezoelectric bending element 3, this also makes precise subsequent adjustment of the signal converter.
Quite apart from the arrangement of three supporting bearings that is shown and which has been discussed, of which the one that simultaneously serves as an electrical contact is adjustable both initially and subsequently, a plurality of supporting bearings could also be provided and of these, once again, several could be adjustable either initially and/or subsequently, when this could also be done independently o~ the electrical contact that they provide.
Claims (4)
1. An electro-pneumatic signal converter for controlling at least one pneumatic port, the signal converter comprising a housing, and a piezoelectric bending element mounted in said housing and resiliently biased against at least three supports, at least one of which is adjustable to permit setting of the bending element relative to said at least one port, said at least one adjustable support comprising a sleeve insert fixedly-mounted in said housing and a supporting pin axially-movable in said sleeve.
2. A signal converter as claimed in claim 1, wherein said adjustable support is an electrical contact establishing electrical connection with the bending element.
3. A signal converter as claimed in claim 1 or 2, wherein said support pin has a fine-pitch thread that cooperates with the sleeve insert to permit fine adjustment of said bending element.
4. A signal converter as claimed in claim 1, 2 or 3, wherein said support pin has a sloping front end which rests against a support that projects on the bending element eccentrically relative to the supporting pin.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ATA704/92,F15B | 1992-04-03 | ||
| AT70492A AT398331B (en) | 1992-04-03 | 1992-04-03 | ELECTRO-PNEUMATIC SIGNAL CONVERTER |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2093257A1 CA2093257A1 (en) | 1993-10-04 |
| CA2093257C true CA2093257C (en) | 2002-08-20 |
Family
ID=3497609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA 2093257 Expired - Fee Related CA2093257C (en) | 1992-04-03 | 1993-04-02 | Electro-pneumatic signal converter |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP0565510B1 (en) |
| JP (1) | JPH0620553A (en) |
| AT (1) | AT398331B (en) |
| CA (1) | CA2093257C (en) |
| DE (1) | DE59305506D1 (en) |
| ES (1) | ES2098021T3 (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5628411A (en) * | 1994-12-01 | 1997-05-13 | Sortex Limited | Valve devices for use in sorting apparatus ejectors |
| DE29514495U1 (en) * | 1995-09-08 | 1995-11-02 | Bürkert Werke GmbH & Co., 74653 Ingelfingen | Valve with piezoelectric lamella |
| DE29718306U1 (en) | 1997-10-15 | 1998-01-22 | Bürkert Werke GmbH & Co., 74653 Ingelfingen | Piezo valve |
| DE19810009C1 (en) * | 1998-03-09 | 1999-07-15 | Honeywell Bv | Electrically actuated small valve |
| GB9922069D0 (en) | 1999-09-17 | 1999-11-17 | Technolog Ltd | Water distribution pressure control method and apparatus |
| DE19957953C2 (en) * | 1999-12-02 | 2003-08-28 | Festo Ag & Co | Method and device for producing a piezo valve |
| DE19957959C1 (en) * | 1999-12-02 | 2001-01-18 | Festo Ag & Co | Piezovalve manufacturing method has cooperating surfaces between fixing body for piezo flexure element and valve housing used for relative positioning to obtain required closure force |
| DE10161888A1 (en) * | 2001-08-14 | 2003-02-27 | Continental Teves Ag & Co Ohg | Piezo-electrically operated fluid valve |
| US20040144696A1 (en) | 2003-01-29 | 2004-07-29 | Stewart Mills | Valve device for use in sorting apparatus ejectors |
| JP4555129B2 (en) * | 2005-03-10 | 2010-09-29 | 株式会社ダイシン | Flow path switching unit, suction holding unit, atmospheric pressure operation unit, and parts transfer device |
| DE102007034049B3 (en) | 2007-07-19 | 2008-06-12 | Hoerbiger Automatisierungstechnik Holding Gmbh | Piezoelectric valve has stop provided outside annular face formed by abutting first and second sealing structures and in closed position of flexible element limits deformation of second sealing structure in region of sealing face |
| DE102007033529A1 (en) | 2007-07-19 | 2009-01-22 | Hoerbiger Automatisierungstechnik Holding Gmbh | Piezoelectric valve |
| DE102007034048B3 (en) * | 2007-07-20 | 2008-06-12 | Hoerbiger Automatisierungstechnik Holding Gmbh | Piezo-electric valve has flexible pad with valve seat face resting against a jet insert that slides at right angles to the seat |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT380934B (en) * | 1983-01-13 | 1986-07-25 | Enfo Grundlagen Forschungs Ag | ELECTRICAL-PNEUMATIC SIGNAL CONVERTER |
| AT382431B (en) * | 1985-02-08 | 1987-02-25 | Enfo Grundlagen Forschungs Ag | ELECTRICAL-PNEUMATIC SIGNAL CONVERTER |
| US4629926A (en) * | 1985-10-21 | 1986-12-16 | Kiwi Coders Corporation | Mounting for piezoelectric bender of fluid control device |
-
1992
- 1992-04-03 AT AT70492A patent/AT398331B/en not_active IP Right Cessation
-
1993
- 1993-03-10 DE DE59305506T patent/DE59305506D1/en not_active Expired - Fee Related
- 1993-03-10 EP EP19930890039 patent/EP0565510B1/en not_active Expired - Lifetime
- 1993-03-10 ES ES93890039T patent/ES2098021T3/en not_active Expired - Lifetime
- 1993-03-31 JP JP7366793A patent/JPH0620553A/en active Pending
- 1993-04-02 CA CA 2093257 patent/CA2093257C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0620553A (en) | 1994-01-28 |
| ATA70492A (en) | 1993-03-15 |
| AT398331B (en) | 1994-11-25 |
| ES2098021T3 (en) | 1997-04-16 |
| EP0565510B1 (en) | 1997-02-26 |
| CA2093257A1 (en) | 1993-10-04 |
| EP0565510A3 (en) | 1994-12-14 |
| EP0565510A2 (en) | 1993-10-13 |
| DE59305506D1 (en) | 1997-04-03 |
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