CA2070531A1 - Microstructure design for high ir sensitivity (u) - Google Patents

Microstructure design for high ir sensitivity (u)

Info

Publication number
CA2070531A1
CA2070531A1 CA 2070531 CA2070531A CA2070531A1 CA 2070531 A1 CA2070531 A1 CA 2070531A1 CA 2070531 CA2070531 CA 2070531 CA 2070531 A CA2070531 A CA 2070531A CA 2070531 A1 CA2070531 A1 CA 2070531A1
Authority
CA
Canada
Prior art keywords
level
sensitivity
microstructure
microstructure design
design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA 2070531
Other languages
French (fr)
Other versions
CA2070531C (en
Inventor
Barrett E. Cole
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Priority to CA 2070531 priority Critical patent/CA2070531C/en
Publication of CA2070531A1 publication Critical patent/CA2070531A1/en
Application granted granted Critical
Publication of CA2070531C publication Critical patent/CA2070531C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

A microstructure design for high IR
sensitivity having a two level infrared bolometer microstructure, the lower level having a reflective metal film surface such as Pt, Au, or Al to reflect IR
penetrating to that level, the upper level being separated from the lower level by an air gap of about 1-2 microns which allows the reflected IR to interfere with the incident IR and increase the sensitivity to a higher level.
CA 2070531 1992-06-05 1992-06-05 Microstructure design for high ir sensitivity (u) Expired - Lifetime CA2070531C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA 2070531 CA2070531C (en) 1992-06-05 1992-06-05 Microstructure design for high ir sensitivity (u)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA 2070531 CA2070531C (en) 1992-06-05 1992-06-05 Microstructure design for high ir sensitivity (u)

Publications (2)

Publication Number Publication Date
CA2070531A1 true CA2070531A1 (en) 1993-12-06
CA2070531C CA2070531C (en) 2002-01-01

Family

ID=4149972

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2070531 Expired - Lifetime CA2070531C (en) 1992-06-05 1992-06-05 Microstructure design for high ir sensitivity (u)

Country Status (1)

Country Link
CA (1) CA2070531C (en)

Also Published As

Publication number Publication date
CA2070531C (en) 2002-01-01

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