CA2070531A1 - Microstructure design for high ir sensitivity (u) - Google Patents
Microstructure design for high ir sensitivity (u)Info
- Publication number
- CA2070531A1 CA2070531A1 CA 2070531 CA2070531A CA2070531A1 CA 2070531 A1 CA2070531 A1 CA 2070531A1 CA 2070531 CA2070531 CA 2070531 CA 2070531 A CA2070531 A CA 2070531A CA 2070531 A1 CA2070531 A1 CA 2070531A1
- Authority
- CA
- Canada
- Prior art keywords
- level
- sensitivity
- microstructure
- microstructure design
- design
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000035945 sensitivity Effects 0.000 title abstract 3
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 229910052697 platinum Inorganic materials 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
A microstructure design for high IR
sensitivity having a two level infrared bolometer microstructure, the lower level having a reflective metal film surface such as Pt, Au, or Al to reflect IR
penetrating to that level, the upper level being separated from the lower level by an air gap of about 1-2 microns which allows the reflected IR to interfere with the incident IR and increase the sensitivity to a higher level.
sensitivity having a two level infrared bolometer microstructure, the lower level having a reflective metal film surface such as Pt, Au, or Al to reflect IR
penetrating to that level, the upper level being separated from the lower level by an air gap of about 1-2 microns which allows the reflected IR to interfere with the incident IR and increase the sensitivity to a higher level.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA 2070531 CA2070531C (en) | 1992-06-05 | 1992-06-05 | Microstructure design for high ir sensitivity (u) |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA 2070531 CA2070531C (en) | 1992-06-05 | 1992-06-05 | Microstructure design for high ir sensitivity (u) |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2070531A1 true CA2070531A1 (en) | 1993-12-06 |
CA2070531C CA2070531C (en) | 2002-01-01 |
Family
ID=4149972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA 2070531 Expired - Lifetime CA2070531C (en) | 1992-06-05 | 1992-06-05 | Microstructure design for high ir sensitivity (u) |
Country Status (1)
Country | Link |
---|---|
CA (1) | CA2070531C (en) |
-
1992
- 1992-06-05 CA CA 2070531 patent/CA2070531C/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CA2070531C (en) | 2002-01-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKEX | Expiry |