CA2057452A1 - Mounting frame for a filter disposed at the front of the ceiling in a clean room - Google Patents
Mounting frame for a filter disposed at the front of the ceiling in a clean roomInfo
- Publication number
- CA2057452A1 CA2057452A1 CA 2057452 CA2057452A CA2057452A1 CA 2057452 A1 CA2057452 A1 CA 2057452A1 CA 2057452 CA2057452 CA 2057452 CA 2057452 A CA2057452 A CA 2057452A CA 2057452 A1 CA2057452 A1 CA 2057452A1
- Authority
- CA
- Canada
- Prior art keywords
- mounting frame
- filter
- air
- ceiling
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000001914 filtration Methods 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 239000007769 metal material Substances 0.000 abstract 1
- 239000011230 binding agent Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 2
- 230000032683 aging Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000005373 porous glass Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
- Ventilation (AREA)
Abstract
ABSTRACT OF THE DISCLOSURE
By making a mounting frame for a filter disposed at the front of the ceiling in a clean room of a sintered metallic material, the mounting frame obtains a structure with a strength capable of supporting the filter and with an air filtering resistance comparable to that of the filter, thereby preventing standing air in the lower part of the mounting frame and solving the problem of lowered purity of air.
By making a mounting frame for a filter disposed at the front of the ceiling in a clean room of a sintered metallic material, the mounting frame obtains a structure with a strength capable of supporting the filter and with an air filtering resistance comparable to that of the filter, thereby preventing standing air in the lower part of the mounting frame and solving the problem of lowered purity of air.
Description
20~7~2 MOUNTING FRAME FOR A FILTER
2 DISPOSED AT l~HE FRONT OF I~IE CEILlNG I~ A CLEAN ROOM
4 BACKGROUND QF THE lNVEN~ON
The present invention relates to a mounting frame for a 6 filter disposed at the front of the ceiling in a clean room.
7 Conventionally various clean rooms with a sufficiently 8 purified space have been used widely in producing precision 9 instruments, electronic parts such as LSIs, medicines or others.
Although various types of clean rooms are known to public, a I l laminar downflow type wherein purified air is fed vertically from 12 an air port disposed at the front of the ceiling into the room is 13 generally employed. In this case a super clean room is realized 14 wherein purified air is fed through a filter disposed on the overall surface of the ceiling. Although the filter generally used in a 16 super clean room has a good filtering capacity because of glass 17 fiber bonded by means of a binder, the binder possesses not only 18 a peculiar odor, but glass fiber corpuscles may flow into the room l9 and scatter therein because of the deterioration of the binder associated with aging. The filter now in use has the above-21 mentioned disadvantages.
22 Since in a conventional clean room the filter is fixed in a 23 mounting frame hung from the ceiling, and since the 24 circumference of the filter is sealed with a sealing compound, purified air can not pass through the vicinity of the mounting 26 frame, standing air is easily formed in the lower part of the 27 mounting frame, and a vortex flow of floating dusts formed 28 downstream of the mounting frame may lower the purify of air.
29 It is an object of the present invention to provide a filter 3() -20~7~2 ¦ mounting frame which itself works as a filter and forms no 2 ¦ standing air downstream thereof.
3 ¦ In order to attain said object, a filter mounting frame for 4 ¦ a clean room is constructed of a hard material molding having a 5 ¦ strength capable of supporting the filter and also having an air 6 ¦ filtering resistance comparable to that of the filter according to 7 ¦ the present invention.
4 BACKGROUND QF THE lNVEN~ON
The present invention relates to a mounting frame for a 6 filter disposed at the front of the ceiling in a clean room.
7 Conventionally various clean rooms with a sufficiently 8 purified space have been used widely in producing precision 9 instruments, electronic parts such as LSIs, medicines or others.
Although various types of clean rooms are known to public, a I l laminar downflow type wherein purified air is fed vertically from 12 an air port disposed at the front of the ceiling into the room is 13 generally employed. In this case a super clean room is realized 14 wherein purified air is fed through a filter disposed on the overall surface of the ceiling. Although the filter generally used in a 16 super clean room has a good filtering capacity because of glass 17 fiber bonded by means of a binder, the binder possesses not only 18 a peculiar odor, but glass fiber corpuscles may flow into the room l9 and scatter therein because of the deterioration of the binder associated with aging. The filter now in use has the above-21 mentioned disadvantages.
22 Since in a conventional clean room the filter is fixed in a 23 mounting frame hung from the ceiling, and since the 24 circumference of the filter is sealed with a sealing compound, purified air can not pass through the vicinity of the mounting 26 frame, standing air is easily formed in the lower part of the 27 mounting frame, and a vortex flow of floating dusts formed 28 downstream of the mounting frame may lower the purify of air.
29 It is an object of the present invention to provide a filter 3() -20~7~2 ¦ mounting frame which itself works as a filter and forms no 2 ¦ standing air downstream thereof.
3 ¦ In order to attain said object, a filter mounting frame for 4 ¦ a clean room is constructed of a hard material molding having a 5 ¦ strength capable of supporting the filter and also having an air 6 ¦ filtering resistance comparable to that of the filter according to 7 ¦ the present invention.
8 For the mounting frame materials having an air filtering 9 ¦ resistance comparable to that of a high performance filter is used, ¦ such as alumina or stainless sintered material, porous glass, and 11 ¦ FRP. By applying an air permeable sealing material to the 12 ¦ stepped part of the mounting frame in contact with the high 13 performance filter, the overall front of the ceiling becomes a 14 filter.
17 Fi~. 1 is a sectional view of a clean room filter part using 18 a filter mounting frame according to the present invention, 19 Fig. 2 is an upward looking view of the ceiling.
20 l 21 ¦ DESCRIPIIQN OF TH~ PRl~FERREV EMBODIMENTS
22 ¦ In the following the present invention is described in 23 ¦ detail referring to the drawings.
24 Pig. 1 shows one embodiment of the present invention, 25 ¦ wherein hanging bolts 1 support mounting frames 2, and high 26 ¦ performance filters 3, 3 are provided between the mounting 27 ¦ frames 2, 2. As a mounting frame 2 a square column-shaped 28 ¦ hollow body made of air permeable alumina sintered material is 29 ¦ used, but the cross-sectional shape thereof is not limited to that 30 ¦ shown in the figure. Between the lower end face of the frame ` 20~7~2 member 4 of the filter 3 and the upper face of the mounting 2 frame an air permeable seal 5 is applied.
3 Fig. 2 is an upward looking view of the ceiling, and the 4 overall ceiling including the filter 3, the mounting frame 2 and the seal material S is air permeable. No. 6 in the figure shows a 6 fluorescent light provided at the mounting frame 2.
7 As described above, the air supplied from above passes 8 through the overall front of the ceiling including the mounting 9 frame, and only purified air will be blown into the clean room. As a result thereof, no standing air is formed in the lower part of the ll mounting frame, thereby using the overall front of the ceiling as a 12 filter and maintaining a high purity of air.
13 In said embodiment, if a high performance filter 14 preferably made of metal powder sinter is supported by a mounting frame made of air permeable sintered material, both 16 the filter and the mounting frame will show the same expansion 17 coefficient, resulting in a more reliable sealing than any seal, an 18 increased air filtering area, a reduced air resistance, and a saved 19 energy.
According to the present invention, as described above, 21 since the filter mounting frame has a strength capable of 22 supporting the filter, and since it is made of a hard material with 23 an air filtering resistance comparable to that of the filter, not only 24 the air filtering area can be increased substantially and the problem of the lowered air purity because of standing air in the 26 lower part of the mounting frame can be solved, but also the 27 overall ceiling can be used as a fflter. By making the mounting 28 frame of a hard material such as sintered metallic members dust 29 and dirt can be removed by means of washing or so, thereby permitting a clean reuse thereof.
17 Fi~. 1 is a sectional view of a clean room filter part using 18 a filter mounting frame according to the present invention, 19 Fig. 2 is an upward looking view of the ceiling.
20 l 21 ¦ DESCRIPIIQN OF TH~ PRl~FERREV EMBODIMENTS
22 ¦ In the following the present invention is described in 23 ¦ detail referring to the drawings.
24 Pig. 1 shows one embodiment of the present invention, 25 ¦ wherein hanging bolts 1 support mounting frames 2, and high 26 ¦ performance filters 3, 3 are provided between the mounting 27 ¦ frames 2, 2. As a mounting frame 2 a square column-shaped 28 ¦ hollow body made of air permeable alumina sintered material is 29 ¦ used, but the cross-sectional shape thereof is not limited to that 30 ¦ shown in the figure. Between the lower end face of the frame ` 20~7~2 member 4 of the filter 3 and the upper face of the mounting 2 frame an air permeable seal 5 is applied.
3 Fig. 2 is an upward looking view of the ceiling, and the 4 overall ceiling including the filter 3, the mounting frame 2 and the seal material S is air permeable. No. 6 in the figure shows a 6 fluorescent light provided at the mounting frame 2.
7 As described above, the air supplied from above passes 8 through the overall front of the ceiling including the mounting 9 frame, and only purified air will be blown into the clean room. As a result thereof, no standing air is formed in the lower part of the ll mounting frame, thereby using the overall front of the ceiling as a 12 filter and maintaining a high purity of air.
13 In said embodiment, if a high performance filter 14 preferably made of metal powder sinter is supported by a mounting frame made of air permeable sintered material, both 16 the filter and the mounting frame will show the same expansion 17 coefficient, resulting in a more reliable sealing than any seal, an 18 increased air filtering area, a reduced air resistance, and a saved 19 energy.
According to the present invention, as described above, 21 since the filter mounting frame has a strength capable of 22 supporting the filter, and since it is made of a hard material with 23 an air filtering resistance comparable to that of the filter, not only 24 the air filtering area can be increased substantially and the problem of the lowered air purity because of standing air in the 26 lower part of the mounting frame can be solved, but also the 27 overall ceiling can be used as a fflter. By making the mounting 28 frame of a hard material such as sintered metallic members dust 29 and dirt can be removed by means of washing or so, thereby permitting a clean reuse thereof.
Claims (2)
1. A filter mounting frame in a clean room, said mounting frame in a clean room having a strength capable of supporting said filter and being made of a hard material with an air filtering resistance comparable to that of said filter.
2. A filter mounting frame in a clean room as claimed in Claim 1, said frame being made of an alumina or stainless sintered material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA 2057452 CA2057452A1 (en) | 1991-12-11 | 1991-12-11 | Mounting frame for a filter disposed at the front of the ceiling in a clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA 2057452 CA2057452A1 (en) | 1991-12-11 | 1991-12-11 | Mounting frame for a filter disposed at the front of the ceiling in a clean room |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2057452A1 true CA2057452A1 (en) | 1993-06-12 |
Family
ID=4148913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA 2057452 Abandoned CA2057452A1 (en) | 1991-12-11 | 1991-12-11 | Mounting frame for a filter disposed at the front of the ceiling in a clean room |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA2057452A1 (en) |
-
1991
- 1991-12-11 CA CA 2057452 patent/CA2057452A1/en not_active Abandoned
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FZDE | Dead |