CA2006950A1 - Vacuum chuck - Google Patents
Vacuum chuckInfo
- Publication number
- CA2006950A1 CA2006950A1 CA 2006950 CA2006950A CA2006950A1 CA 2006950 A1 CA2006950 A1 CA 2006950A1 CA 2006950 CA2006950 CA 2006950 CA 2006950 A CA2006950 A CA 2006950A CA 2006950 A1 CA2006950 A1 CA 2006950A1
- Authority
- CA
- Canada
- Prior art keywords
- planar
- valve
- passage
- chuck according
- vacuum chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
ABSTRACT
VACUUM CHUCK
The invention provides a vacuum chuck for retaining a planar workpiece. The chuck comprises a support member (1) providing a planar surface (2) for supporting a workpiece (3). Passages (4a, 4b), extend through the support member (1) from said planar surface (2) thereof, said passages each being connected to a source of vacuum at a particular pressure. Valves (5, 5a), are provided for closing each said passage (4a, 4b), when the passage is subjected to both atmospheric pressure and said vacuum pressure simultaneously, said valves (5, 5a) remaining open when subjected to either atmospheric pressure or said vacuum pressure alone. By this arrangement the workpiece (3) can be cut or apertured without interfering with the vacuum pressure acting on the workpiece (3).
VACUUM CHUCK
The invention provides a vacuum chuck for retaining a planar workpiece. The chuck comprises a support member (1) providing a planar surface (2) for supporting a workpiece (3). Passages (4a, 4b), extend through the support member (1) from said planar surface (2) thereof, said passages each being connected to a source of vacuum at a particular pressure. Valves (5, 5a), are provided for closing each said passage (4a, 4b), when the passage is subjected to both atmospheric pressure and said vacuum pressure simultaneously, said valves (5, 5a) remaining open when subjected to either atmospheric pressure or said vacuum pressure alone. By this arrangement the workpiece (3) can be cut or apertured without interfering with the vacuum pressure acting on the workpiece (3).
Description
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VACUUM CHUCK
This invention relates to vacuum chucks.
Vacuum chucks are used for retaining planarworkpieces, such as printed or other electrical cirouits, in a fixed position during manufacturing operations or testing. Vacuum chucks have not hitherto been suitable for use where the workpiece i8 to be cut or apertured, e.g., drilled, because cutting or aperturing of the workpiece immediately releaies the vacuum preissure so that the workpieoe is no longer firmly held by the vaouu~
chuck. This problem can be overcome when the workpiece i8 rigid by simply applying mechanical clamping pressure to the edges of the workpiece. However, where the workpiece is flexible e.g., is a flexible printed or other electrical oirouit, clamping of the workpiece by its edges ia not pos~ible. There is accordingly a need for some form of means for securely holding planar flexible workpieces, such as flexible printed cirouits, while outting and/or aperturing operations are carried out thereon and the present invention has as its object to provide a vacuum chuck which will meet this requirement.
The present invention provides a vacuum chuck for retaining a planar workpiece, the ohuck oompri~ing a support member providing a planar surface for supporting a said workpiece, passages extending through ~aid ~upport member from ~aid planar surfaoe thereof, ~aid pRssages each being oonneoted to a source of vacuum at a particular pressure, and valve means fo~ olosing each said passage when the passage is subjected to both atmospheric pre~sure snd said vaouum pressure simultaneously.
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Said valve m~an~ may compri~e a normally open valve associated with each said passage, each said valve being adapted to open or remain open when ~ubjected to either atmospheric pressure or said vacuum pressure alone and to close when subjected to both atmo~pherio pre~sure and ~aid vacuum pressure simultaneously. Each said valve may comprise a flap valve, e.g., in the flDrm of a slit silicone disc.
Each of ~aid passages may be of larger cross-sectional dimensions e.g., larger diameter, at that end thereof remote from said planar surface and said valve may be provided in the larger dimen~ion portion of each passage. To thi~ end at least some of said valves may be mounted between said support member and a clampin~ plate secured to the support member and said pas~ages may extend through the olamping plate.
Ea¢h said valve ~ay cooperate with a valve seat and such valve seat may be provided by the surfaoes of said clamping plate around eaoh o~ said passages entering therethrough e.g., an end surface of a peg or pin which projects into a said pas~age. Such pegs or pins may be mounted on a planar member spaced from 8aid clampin~
plate and the space between the planar member and the clamping plate may be connected to ~aid vaouum souroe and at least some of said passages may oommunioate with said 8pace~
At least one of said passages may extend through said planar member and through a spaoer member provided between the planar member and said ol~mping plate and the valve assooiated with the or eaoh ~aid at least one passage may be mounted between ~aid planar member and a planar clamping member secured thereto with said at least one passage extendin8 through ~aid planar ¢lamping member. The peg or pin providing ~aid valve seat and extending into ~aid at lea~t one psQsage may be mounted '.
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on a base planar member spaced from said planar clamping member. Alternatively the valve vent may be provided by the surface of the planar clamping member around said at least one pas~age extending therethrou~h. The space between ~aid base planar member and said planar clamping member may be connected to said vacuum ~ource and said at least one pas~age may open into said space. With this arrangement the larger dimension portion of the at least one passage and the valve provided therein iQ provided in ~aid planar member to enable a closer spacing of the passages in ~aid support member.
~ ach said mode means may oomprise bleed means, and a8 8 bleed channel or passa~e in the valve ~eat or a bleed part in the valve flap where the valve means comprises a flap valve. The bleed means serves to ensure that the valve means will be open if subjeoted to either atmospherio pressure or said vaouum pressure alone.
That part of eaoh said pas~age exténding through said olamping plate or said planar clampiny member ~ay be offset from that part of the passage adjaoent the planar surfaoe to ensure that the valve means i8 not damaged by, ~ -e.g., laser cutting means used to out a workpieoe supported on the planar surface.
The invention will be more particularly described with referenoe to the acoompanying drawings, in whioh:-Figure 1 i8 a fragmentary ~ectional elevation on an ,~- enlarged soale of one embodiment of a vaouum ohuok aooording to the present invention, Figure 2 is a diagrammatio illustration on a smaller scale of a preferred arrangement of a group of passages extending through the support member, Z Figure 3 i8 a fragmentary seotional elevation on an enlarged seals of another embodiment of a vacuum chuck aooording to the invention and, ,. :' ',, ', 2~06950 Figure 4 i8 an enlarged fragmentary plan view of valve means u~ed in the embodiment of Fig. 3.
~ eferring to Figure 1 it will be seen that the vacuum ohuck illustrated therein compri~es a ~upport member 1 providing a planar surface 2 for supporting a planar workpiece 3 and having a serie~ of pas~ages 4 extending therethrough from said planar urface 2 thereof. A valve shown generally at 5 or 5a is associated with each of the passages 4. Each of the valve~ 5 compri~es a ~ilicone disc 6 which is clamped between the lower surface of the support member l and a clamping plate 8 secured to the under~ide of the support member 1 and which has been slit to provide re~ilient flap~ 7 having sufficient shape memory to normally remain open as shown. The flaps 7 of each valve 5 cooperate with a valve seat 9 provided by an end surface of a peg or pin 10 which extends into its as~oQiated pas~age 4a and whioh i8 mounted on and extends upwardly from a planar member 11 spaoed from the clamping plate 8. The ~pace 12 between the clamping plate 8 and the planar member ll is connected to a source of vacuum (not shown) and each of the pa~sage~ 4a opens into the space 12 as shown at 13. Eaoh of the valve~ 5 i~ aocommodated in an enlarged diameter portion 14a of each of the passa~e~ 4a.
The passage 4b extends through a spacer 15 between the clamping plste 8 and the planar member 11, through the planar member 11 and through a planar olamping member 16 seoured to the under~ide of the planar member 11. As with the passages 4a, the pa~sage 4b has a lower portion 14b of enlarged diameter which acoommodates the valve 5a.
The valve 5a is exactly the ~ame as the valve~ 5 except that the ~ilioone disc 6a thereof i~ mounted between the planar member 11 and the planar clamping me~ber 16 and the peg or pin lOa thereof i8 mo~nted on a base planar ember 17 ~paced ~rom the planar clamping member 16. The - `, ~ 21~0695~
space 18 between the planar clamping member 16 and the base planar member 17 is connected to the source of vacuum (not shown) and the lower end of the passage 4b opens into the space 18 as shown at 13a. By arran8ing the pas~a~e 4b and valve 5a as shown a closer spacing of the pa~sages 4a, 4b, is enabled.
A~ shown in Figure 2, the pa~sages 4 are preferably arranged in groups of five with eaoh passage 4b surrounded by four equally spaced pa~sages 4a. Although only one group of passages 4 is shown in the drawings it will be understood that similar groups will be provided over the whole of the surface 2 of the ~upport member 1.
The resiliency of the flaps 7 of the valve~ 5, 5a is 80 ohosen that each valve will remain open when subjected to atmospheria pressure or a particular vacuum pre~sure alone and will close to ¢lose its associated passage when subjeoted to both atmospherio pres~ure and the particular vacuum pressure simultaneously.
The vaouum chuok illustrated in Fig~ 3 and 4 is similar to that shown in Fi8s. 1 and 2 and like part~
have been given like reference numerals.
Referring now to Figs. 3 and 4 it will be seen that the passages 4a, 4b each have a portion of enlarged cross-section 14c in each of which a valve 5 or 5a i~
accommodated. The portion 4c of eaoh pa~sage 4a whioh extends through the clamping plate 8 is off~et from that part 4d of the passage 4a adjacent the planar surface 2.
Likewise the portion 4e of the passage 4b which extends through the planar olamping member 16 is offset from that part 4f of the pas~age 4b adjaoent the planar surface 2.
In this way a laser beam u~ed to cut or aperture the workpiece 3 and travelling down a passage 4a or 4b will not cau~e damage to the val~e 5 or 5a in that pa~sage.
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The valves 5, 5a, of this embodiment each comprise a flap 19 formed in a silicone ~heet 20 by cutting arouate slots 21 therein as ~hown in Fig.4 so as to leave the flap l9 connected to the ~heet 20 by an integral hin~e 22. ~ach valve 5, 5a is formed so that the flap 19 thereof is normally open as shown in Fig. 3. The silicone sheets 20 having the valves 5, 5a therein are clamped one between the support member 1 and the clamping plate 8 and the other between the planar member 11 and the planar clamping member 16. The pas~age 4b pas~es through the silicone sheet 20 which i8 clamped between the support member 1 and the clamping plate 8. The flap~
19 seat on the upper surface~ of the clamping plate 8 and the planar clamping member 16 around the apertures 4c and 4e a~ indicated at 23 in Fig.3.
The flaps 19 are adapted to olose when subjeoted to both atmospherio pressure and a predetermined vaouum pressure simultaneously and to open when subjeoted to either atmospherio pressure or said predeter~ined vaouum pressure alone. To erlsure that the flap~ 19 will open when subjected to either atmospheric pressure or said predetermined vaouum pre~sure above suitable bleed means may be provided. Each bleed means may compri~e, for example, a bleed passage 24 in esoh of the valve seat~ 23 as shown in Fig.3 or a bleed part 25 in each of the flaps 19 as~hown in Fig.4.
In the use of the vacuum chuck, a workpiece 3 i8 located in a required position on the surfaoe 2 of the support member 1 as by means of suitabl~ stops ~not shown? and vaouum pressure i8 applied to the spaces 12 and 18 and henoe to the passages 4a, 4b. Any passages 4a, 4b, not covered by the workpieoe 3 will be subjected to both atmospheric pre~ure and to vaouum pressure and acoordingly the valve8 5, 5a therein will close to clo~e those pa~sage~ and thu~ ensure that the vacuum pressure , , 200695(:) ':' '. :.
act on the workpiece 3 to draw the workpiece 3 into tight contact with the ~urface 2 of the support member 1.
Where the passage~ 4a, 4b are covered by the workpiece 3, sufficient air will be exhau~ted from the passa~e~ 4a, 4b either before the valves 5, 5a therein close fully or through the bleed means 24 or 25 to ensure that the pressure actin~ on those valve~ i~ less tlhan the ~um of the vacuum pres~ure and atmospheric pres~ure and accordingly these valves will open or remain open 80 that the vacuum pre&sure can act on the workpiece 3. If the workpiece 3 i~ subsequently cut or apertured in the region of a pas~age 4a, 4b, that passage will immediately be subjected to both atmospheric pressure and vacuum pressure simultaneou~ly and accordingly the valve 5, 5a assooiated therewith will close to close that pas~age and 80 maintain the vacuum pressure acting on khe workpiece 3.
It will be understood that the embodiments shown in the drawings are for illustration only snd that modifications may be made thereto. For example, if it ia found that the passages 4b are not required then the planar member 11, planar clamping member 16, valve~ 5a and space 18 may be omitted and the planar member 11 replaoed by the ba~e planar member 17 ~o that the space 12 is defined between the clamping plate 8 and the base planar member 17.
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VACUUM CHUCK
This invention relates to vacuum chucks.
Vacuum chucks are used for retaining planarworkpieces, such as printed or other electrical cirouits, in a fixed position during manufacturing operations or testing. Vacuum chucks have not hitherto been suitable for use where the workpiece i8 to be cut or apertured, e.g., drilled, because cutting or aperturing of the workpiece immediately releaies the vacuum preissure so that the workpieoe is no longer firmly held by the vaouu~
chuck. This problem can be overcome when the workpiece i8 rigid by simply applying mechanical clamping pressure to the edges of the workpiece. However, where the workpiece is flexible e.g., is a flexible printed or other electrical oirouit, clamping of the workpiece by its edges ia not pos~ible. There is accordingly a need for some form of means for securely holding planar flexible workpieces, such as flexible printed cirouits, while outting and/or aperturing operations are carried out thereon and the present invention has as its object to provide a vacuum chuck which will meet this requirement.
The present invention provides a vacuum chuck for retaining a planar workpiece, the ohuck oompri~ing a support member providing a planar surface for supporting a said workpiece, passages extending through ~aid ~upport member from ~aid planar surfaoe thereof, ~aid pRssages each being oonneoted to a source of vacuum at a particular pressure, and valve means fo~ olosing each said passage when the passage is subjected to both atmospheric pre~sure snd said vaouum pressure simultaneously.
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' '' 20~6~50 ~ ~
Said valve m~an~ may compri~e a normally open valve associated with each said passage, each said valve being adapted to open or remain open when ~ubjected to either atmospheric pressure or said vacuum pressure alone and to close when subjected to both atmo~pherio pre~sure and ~aid vacuum pressure simultaneously. Each said valve may comprise a flap valve, e.g., in the flDrm of a slit silicone disc.
Each of ~aid passages may be of larger cross-sectional dimensions e.g., larger diameter, at that end thereof remote from said planar surface and said valve may be provided in the larger dimen~ion portion of each passage. To thi~ end at least some of said valves may be mounted between said support member and a clampin~ plate secured to the support member and said pas~ages may extend through the olamping plate.
Ea¢h said valve ~ay cooperate with a valve seat and such valve seat may be provided by the surfaoes of said clamping plate around eaoh o~ said passages entering therethrough e.g., an end surface of a peg or pin which projects into a said pas~age. Such pegs or pins may be mounted on a planar member spaced from 8aid clampin~
plate and the space between the planar member and the clamping plate may be connected to ~aid vaouum souroe and at least some of said passages may oommunioate with said 8pace~
At least one of said passages may extend through said planar member and through a spaoer member provided between the planar member and said ol~mping plate and the valve assooiated with the or eaoh ~aid at least one passage may be mounted between ~aid planar member and a planar clamping member secured thereto with said at least one passage extendin8 through ~aid planar ¢lamping member. The peg or pin providing ~aid valve seat and extending into ~aid at lea~t one psQsage may be mounted '.
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~0069~C~
on a base planar member spaced from said planar clamping member. Alternatively the valve vent may be provided by the surface of the planar clamping member around said at least one pas~age extending therethrou~h. The space between ~aid base planar member and said planar clamping member may be connected to said vacuum ~ource and said at least one pas~age may open into said space. With this arrangement the larger dimension portion of the at least one passage and the valve provided therein iQ provided in ~aid planar member to enable a closer spacing of the passages in ~aid support member.
~ ach said mode means may oomprise bleed means, and a8 8 bleed channel or passa~e in the valve ~eat or a bleed part in the valve flap where the valve means comprises a flap valve. The bleed means serves to ensure that the valve means will be open if subjeoted to either atmospherio pressure or said vaouum pressure alone.
That part of eaoh said pas~age exténding through said olamping plate or said planar clampiny member ~ay be offset from that part of the passage adjaoent the planar surfaoe to ensure that the valve means i8 not damaged by, ~ -e.g., laser cutting means used to out a workpieoe supported on the planar surface.
The invention will be more particularly described with referenoe to the acoompanying drawings, in whioh:-Figure 1 i8 a fragmentary ~ectional elevation on an ,~- enlarged soale of one embodiment of a vaouum ohuok aooording to the present invention, Figure 2 is a diagrammatio illustration on a smaller scale of a preferred arrangement of a group of passages extending through the support member, Z Figure 3 i8 a fragmentary seotional elevation on an enlarged seals of another embodiment of a vacuum chuck aooording to the invention and, ,. :' ',, ', 2~06950 Figure 4 i8 an enlarged fragmentary plan view of valve means u~ed in the embodiment of Fig. 3.
~ eferring to Figure 1 it will be seen that the vacuum ohuck illustrated therein compri~es a ~upport member 1 providing a planar surface 2 for supporting a planar workpiece 3 and having a serie~ of pas~ages 4 extending therethrough from said planar urface 2 thereof. A valve shown generally at 5 or 5a is associated with each of the passages 4. Each of the valve~ 5 compri~es a ~ilicone disc 6 which is clamped between the lower surface of the support member l and a clamping plate 8 secured to the under~ide of the support member 1 and which has been slit to provide re~ilient flap~ 7 having sufficient shape memory to normally remain open as shown. The flaps 7 of each valve 5 cooperate with a valve seat 9 provided by an end surface of a peg or pin 10 which extends into its as~oQiated pas~age 4a and whioh i8 mounted on and extends upwardly from a planar member 11 spaoed from the clamping plate 8. The ~pace 12 between the clamping plate 8 and the planar member ll is connected to a source of vacuum (not shown) and each of the pa~sage~ 4a opens into the space 12 as shown at 13. Eaoh of the valve~ 5 i~ aocommodated in an enlarged diameter portion 14a of each of the passa~e~ 4a.
The passage 4b extends through a spacer 15 between the clamping plste 8 and the planar member 11, through the planar member 11 and through a planar olamping member 16 seoured to the under~ide of the planar member 11. As with the passages 4a, the pa~sage 4b has a lower portion 14b of enlarged diameter which acoommodates the valve 5a.
The valve 5a is exactly the ~ame as the valve~ 5 except that the ~ilioone disc 6a thereof i~ mounted between the planar member 11 and the planar clamping me~ber 16 and the peg or pin lOa thereof i8 mo~nted on a base planar ember 17 ~paced ~rom the planar clamping member 16. The - `, ~ 21~0695~
space 18 between the planar clamping member 16 and the base planar member 17 is connected to the source of vacuum (not shown) and the lower end of the passage 4b opens into the space 18 as shown at 13a. By arran8ing the pas~a~e 4b and valve 5a as shown a closer spacing of the pa~sages 4a, 4b, is enabled.
A~ shown in Figure 2, the pa~sages 4 are preferably arranged in groups of five with eaoh passage 4b surrounded by four equally spaced pa~sages 4a. Although only one group of passages 4 is shown in the drawings it will be understood that similar groups will be provided over the whole of the surface 2 of the ~upport member 1.
The resiliency of the flaps 7 of the valve~ 5, 5a is 80 ohosen that each valve will remain open when subjected to atmospheria pressure or a particular vacuum pre~sure alone and will close to ¢lose its associated passage when subjeoted to both atmospherio pres~ure and the particular vacuum pressure simultaneously.
The vaouum chuok illustrated in Fig~ 3 and 4 is similar to that shown in Fi8s. 1 and 2 and like part~
have been given like reference numerals.
Referring now to Figs. 3 and 4 it will be seen that the passages 4a, 4b each have a portion of enlarged cross-section 14c in each of which a valve 5 or 5a i~
accommodated. The portion 4c of eaoh pa~sage 4a whioh extends through the clamping plate 8 is off~et from that part 4d of the passage 4a adjacent the planar surface 2.
Likewise the portion 4e of the passage 4b which extends through the planar olamping member 16 is offset from that part 4f of the pas~age 4b adjaoent the planar surface 2.
In this way a laser beam u~ed to cut or aperture the workpiece 3 and travelling down a passage 4a or 4b will not cau~e damage to the val~e 5 or 5a in that pa~sage.
,'':
2Q0695(:~
. .
The valves 5, 5a, of this embodiment each comprise a flap 19 formed in a silicone ~heet 20 by cutting arouate slots 21 therein as ~hown in Fig.4 so as to leave the flap l9 connected to the ~heet 20 by an integral hin~e 22. ~ach valve 5, 5a is formed so that the flap 19 thereof is normally open as shown in Fig. 3. The silicone sheets 20 having the valves 5, 5a therein are clamped one between the support member 1 and the clamping plate 8 and the other between the planar member 11 and the planar clamping member 16. The pas~age 4b pas~es through the silicone sheet 20 which i8 clamped between the support member 1 and the clamping plate 8. The flap~
19 seat on the upper surface~ of the clamping plate 8 and the planar clamping member 16 around the apertures 4c and 4e a~ indicated at 23 in Fig.3.
The flaps 19 are adapted to olose when subjeoted to both atmospherio pressure and a predetermined vaouum pressure simultaneously and to open when subjeoted to either atmospherio pressure or said predeter~ined vaouum pressure alone. To erlsure that the flap~ 19 will open when subjected to either atmospheric pressure or said predetermined vaouum pre~sure above suitable bleed means may be provided. Each bleed means may compri~e, for example, a bleed passage 24 in esoh of the valve seat~ 23 as shown in Fig.3 or a bleed part 25 in each of the flaps 19 as~hown in Fig.4.
In the use of the vacuum chuck, a workpiece 3 i8 located in a required position on the surfaoe 2 of the support member 1 as by means of suitabl~ stops ~not shown? and vaouum pressure i8 applied to the spaces 12 and 18 and henoe to the passages 4a, 4b. Any passages 4a, 4b, not covered by the workpieoe 3 will be subjected to both atmospheric pre~ure and to vaouum pressure and acoordingly the valve8 5, 5a therein will close to clo~e those pa~sage~ and thu~ ensure that the vacuum pressure , , 200695(:) ':' '. :.
act on the workpiece 3 to draw the workpiece 3 into tight contact with the ~urface 2 of the support member 1.
Where the passage~ 4a, 4b are covered by the workpiece 3, sufficient air will be exhau~ted from the passa~e~ 4a, 4b either before the valves 5, 5a therein close fully or through the bleed means 24 or 25 to ensure that the pressure actin~ on those valve~ i~ less tlhan the ~um of the vacuum pres~ure and atmospheric pres~ure and accordingly these valves will open or remain open 80 that the vacuum pre&sure can act on the workpiece 3. If the workpiece 3 i~ subsequently cut or apertured in the region of a pas~age 4a, 4b, that passage will immediately be subjected to both atmospheric pressure and vacuum pressure simultaneou~ly and accordingly the valve 5, 5a assooiated therewith will close to close that pas~age and 80 maintain the vacuum pressure acting on khe workpiece 3.
It will be understood that the embodiments shown in the drawings are for illustration only snd that modifications may be made thereto. For example, if it ia found that the passages 4b are not required then the planar member 11, planar clamping member 16, valve~ 5a and space 18 may be omitted and the planar member 11 replaoed by the ba~e planar member 17 ~o that the space 12 is defined between the clamping plate 8 and the base planar member 17.
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Claims (22)
1. A vacuum chuck for retaining a planar workpiece, the chuck comprising a support member providing a planar surface for supporting a said workpiece, passages extending through said support member from said planar surface thereof, said passages each being connected to a source of vacuum at a particular pressure, and valve means for closing each said passage when the passage is subjected to both atmospheric pressure and said vacuum pressure simultaneously.
2. A vacuum chuck according to claim 1, wherein said valve means comprises a normally open valve associated with each said passage, each said valve being adapted to open or remain open when subjected to either atmospheric pressure or said vacuum pressure alone and to close when subjected to both atmospheric pressure and said vacuum pressure simultaneously.
3. A vacuum chuck according to claim 2, wherein each said valve comprises a flap valve.
4. A vacuum chuck according to claim 2 or 3, wherein each said valve comprises a slit silicone disc.
5. A vacuum chuck according to claim 2 or 3, wherein said valves are all formed in a sheet of silicone.
6. A vacuum chuck according to claim 5, wherein each said valve is formed in said sheet by forming an arcuate slot in said sheet to define a flap connected to the sheet by an integral hinge.
7. A vacuum chuck according to any one of the preceding claims, wherein each said passage is of larger diameter at that end thereof remote from said planar surface and wherein a said valve is provided in the larger diameter portion of each passage.
8. A vacuum chuck according to any one of claims 2 to 7, wherein at least some of said valves are mounted between said support member and a clamping plate secured to the support member and wherein said passages extend through the clamping plate.
9. A vacuum chuck according to claim 8, wherein that portion of each passage extending through said clamping plate is offset from the portion of the passage adjacent said planar surface.
10. A vacuum chuck according to any one of claims 2 to 9, wherein each said valve cooperates with a valve seat.
11. A vaccum chuck according to claim 8 or 9 and 10, wherein each said valve seat is provided by the surface of said clamping plate around a said passage extending therethrough.
12. A vacuum chuck according to claims 8 or 9 and 10, wherein each said valve seat is provided by an end surface of a peg or pin which projects into a said passage.
13. A vacuum chuck according to claims 8 to 12, wherein a planar member is spaced from said clamping plate, the space between said planar member and said clamping plate is connected to said vacuum source and at least some of said passages communicate with said space.
14. A vacuum chuck according to claims 12 and 13, wherein at least some of said pegs or pins are mounted on said planar member.
15. A vacuum chuck according to claim 13 or 14, wherein at least one of said passages extends through said planar member and through a spacer member provided between the planar member and said clamping plate.
16. A vacuum chuck according to claim 15, wherein the valve associated with the or each said at least one passage is mounted between said planar member and a planar clamping member secured thereto and wherein said at least one passage extends through said planar clamping member.
17. A vacuum chuck according to claim 16, wherein that portion of said at least one passage extending through said planar clamping member is offset from that part of the passage adjacent said planar surface.
18. A vacuum chuck according to claim 15, 16 or 17, wherein a base planar member is spaced from said planar clamping member, said space between said base planar member and said planar clamping member is connected to said vacuum source and said at least one passage opens into said space.
19. A vacuum chuck according to claim 10 and claims 16, 17 or 18, wherein the surface of said planar clamping member around that portion of said at least one passage extending therethrough provides said valve seat.
20. A vaccum chuck according to claim 10 and claim 16, 17 or 18, wherein said valve seat is provided by an end surface of a peg or pin mounted on said base planar member and extending into said at least one passage.
21. A maximum chuck according to any one of the preceding claims, wherein said valve means comprises bleed means.
22. A vacuum chuck according to claim 21, wherein the valve means comprises a flap valve and valve seat associated with each said passage and said bleed means comprises a bleed port in the flap of the valve or a bleed passage in the valve seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA 2006950 CA2006950A1 (en) | 1989-12-29 | 1989-12-29 | Vacuum chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA 2006950 CA2006950A1 (en) | 1989-12-29 | 1989-12-29 | Vacuum chuck |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2006950A1 true CA2006950A1 (en) | 1991-06-29 |
Family
ID=4143905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA 2006950 Abandoned CA2006950A1 (en) | 1989-12-29 | 1989-12-29 | Vacuum chuck |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA2006950A1 (en) |
-
1989
- 1989-12-29 CA CA 2006950 patent/CA2006950A1/en not_active Abandoned
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