CA2000243A1 - Method of growing silicon ingots using a rotating melt - Google Patents
Method of growing silicon ingots using a rotating meltInfo
- Publication number
- CA2000243A1 CA2000243A1 CA 2000243 CA2000243A CA2000243A1 CA 2000243 A1 CA2000243 A1 CA 2000243A1 CA 2000243 CA2000243 CA 2000243 CA 2000243 A CA2000243 A CA 2000243A CA 2000243 A1 CA2000243 A1 CA 2000243A1
- Authority
- CA
- Canada
- Prior art keywords
- meltstock
- silicon
- impurities
- crucible
- silica
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 80
- 239000010703 silicon Substances 0.000 title claims abstract description 80
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 78
- 238000000034 method Methods 0.000 title claims abstract description 66
- 239000012535 impurity Substances 0.000 claims abstract description 78
- 239000002245 particle Substances 0.000 claims abstract description 37
- 238000010438 heat treatment Methods 0.000 claims abstract description 18
- 230000008018 melting Effects 0.000 claims abstract description 11
- 238000002844 melting Methods 0.000 claims abstract description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 75
- 230000008569 process Effects 0.000 claims description 44
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 44
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 44
- 239000000377 silicon dioxide Substances 0.000 claims description 37
- 239000007787 solid Substances 0.000 claims description 20
- 239000007795 chemical reaction product Substances 0.000 claims description 7
- 239000007789 gas Substances 0.000 claims description 6
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 230000001464 adherent effect Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000000460 chlorine Substances 0.000 claims description 3
- 229910052801 chlorine Inorganic materials 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 230000009467 reduction Effects 0.000 claims description 3
- 230000002829 reductive effect Effects 0.000 claims description 2
- 239000000047 product Substances 0.000 claims 3
- 239000013078 crystal Substances 0.000 abstract description 64
- 239000007788 liquid Substances 0.000 abstract description 26
- 230000001133 acceleration Effects 0.000 abstract description 4
- 239000000155 melt Substances 0.000 description 41
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 32
- 229910002804 graphite Inorganic materials 0.000 description 18
- 239000010439 graphite Substances 0.000 description 18
- 229910052799 carbon Inorganic materials 0.000 description 14
- 238000007711 solidification Methods 0.000 description 10
- 230000008023 solidification Effects 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 9
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 9
- 239000000463 material Substances 0.000 description 7
- 229910052796 boron Inorganic materials 0.000 description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 5
- 239000002585 base Substances 0.000 description 5
- 239000007858 starting material Substances 0.000 description 5
- 238000005266 casting Methods 0.000 description 4
- 229910052681 coesite Inorganic materials 0.000 description 4
- 229910052906 cristobalite Inorganic materials 0.000 description 4
- 238000002425 crystallisation Methods 0.000 description 4
- 230000008025 crystallization Effects 0.000 description 4
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 238000007670 refining Methods 0.000 description 4
- 238000005204 segregation Methods 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000002893 slag Substances 0.000 description 4
- 229910052682 stishovite Inorganic materials 0.000 description 4
- 229910052905 tridymite Inorganic materials 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 150000001340 alkali metals Chemical class 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000009877 rendering Methods 0.000 description 2
- 241000894007 species Species 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- -1 tricholosilane) Chemical class 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 238000002231 Czochralski process Methods 0.000 description 1
- 101150073597 DLST gene Proteins 0.000 description 1
- 101100295675 Dictyostelium discoideum odhB gene Proteins 0.000 description 1
- 241001010081 Metallus Species 0.000 description 1
- 229920004482 WACKER® Polymers 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002939 deleterious effect Effects 0.000 description 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000005247 gettering Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- FBAFATDZDUQKNH-UHFFFAOYSA-M iron chloride Chemical compound [Cl-].[Fe] FBAFATDZDUQKNH-UHFFFAOYSA-M 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 229910021422 solar-grade silicon Inorganic materials 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/008—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method using centrifugal force to the charge
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
Abstract
Abstract of the Disclosure The invention is a method and apparatus for producing silicon ingots of substantially single crystallinity from metallurgical grade silicon by heating it in a crucible to above its melting point to melt it and then extracting heat from the bottom of the crucible with a heat exchanger in heat conducting relationship with the bottom, and by moving the crucible and growing crystal in a first direction and accelerating the motion, thereby detaching from the crystal/liquid interface adhered impurity particles. The crucible may be rotated and the acceleration may be rotational.
Description
znQv~4~
Method o~ Growing Silicon Ingots Using a Rotating Melt Field of the Invention This invention relates to the manufacture of silicon crystals suitable for use in photovoltaic cells from low purity silicon melt stock. This application is a continuation-in-part of co-pending, co-assigned application United States Serial No. 081,560, filed July 31, 1987 in the names of Frederick Schmid and Chandra P. Khattak which is a continuation of U.S.S.N. 825,960, filed February 4, 1986, which is a continuation of U.S.S.N.
598,828, filed May 10, 1984, which is a continuation of V.S.S.N.
423,170, filed September 24, 1982, which is a continuation of U.S.S.N. 191,260, filed September 26, 1980l all co-assigned and all in the names of Frederick Schmid and Chandra Khattak.
Background of the Invention The best photovoltaic solar cells have been fabricated from high-purity, single-crystal silicon, the making of which by conventional processes involves many steps. The process begins with metallurgical grade silicon, which is only 98-99% pure. This impurity level inhibits single crystal growth and creates conductivity that is too high for solar cells, owing primarily to the presence of boron and phosphorous. Metallurgical grade ~,:
Method o~ Growing Silicon Ingots Using a Rotating Melt Field of the Invention This invention relates to the manufacture of silicon crystals suitable for use in photovoltaic cells from low purity silicon melt stock. This application is a continuation-in-part of co-pending, co-assigned application United States Serial No. 081,560, filed July 31, 1987 in the names of Frederick Schmid and Chandra P. Khattak which is a continuation of U.S.S.N. 825,960, filed February 4, 1986, which is a continuation of U.S.S.N.
598,828, filed May 10, 1984, which is a continuation of V.S.S.N.
423,170, filed September 24, 1982, which is a continuation of U.S.S.N. 191,260, filed September 26, 1980l all co-assigned and all in the names of Frederick Schmid and Chandra Khattak.
Background of the Invention The best photovoltaic solar cells have been fabricated from high-purity, single-crystal silicon, the making of which by conventional processes involves many steps. The process begins with metallurgical grade silicon, which is only 98-99% pure. This impurity level inhibits single crystal growth and creates conductivity that is too high for solar cells, owing primarily to the presence of boron and phosphorous. Metallurgical grade ~,:
2~ 3 silicon is typically produced in large quantities in arc furnaces by the carbothermic reduction of silica. The carbothermic process causes the presence of significant amounts of the impurity of carbon, primarily in the form of silicon carbide. Further, since the silicon is poured in air, the surface of the silicon i5 oxidized to silica. Additional metallic impurities are present, arising from metals present in the naturally occurring silica.
According to a known method, this grade of silicon is then chemically converted by another process to an intermediate compound (e.g., tricholosilane), which is in turn converted by still another process (e.g., Siemens process) to semiconductor grade silicon (having impurities in the ppb range), which in turn is used to grow a single crystal suitable for use in a solar cell.
This process is discussed in Pizzini, S., "Solar Grade Silicon as a Potential Candidate Material for Low Cost Terrestrial Cells,"
Solar Energy Materiàls 6 North-Holland Publishing Company ~1982) p. 257. A method that has proved useful in growing crystals from such resulting high purity silicon (e.g., impurities less than 10 ppb) is the Heat Exchanger Method, which involves heating material in a crucible to above its melting point in vacuum to melt the material therein and thereafter extracting heat from the bottom of -the crucible by providing a heat exchanger in heat conducting relationship with the bottom. The Heat Exchanger Method is -2~
Z()~ 43 described in U.S. Patents Nos. 3,653,432 and 3,898,051 and Applications Serial Nos. 4,465 filed January 18, 1979 and 967,114 filed December 7, 1978, all of which are hereby incorporated by reference.
In another process, Dow Corning Corporation used specially selected silica and carbon in an arc furnace, and produced metallurgical silicon that is about 99.8~ pure, having low concentrations of boron and phosphorous, impurities which have high segregation coefficients and are therefore difficult to segregate during directional crystal solidification. This silicon was poured in air, resulting in a silica layer, which was then etched away. After etching, an ingot was grown by the Czochralski process (a directional solidification process). Loss of single crystallinity still resulted; but growth of a second crystal, using the best portions from the first growth as starting material, enabled the production of a single crystal material suitable for solar cell production.
In another process, Wacker, GmbH in West Germany conducts a multiple step process to arrive at raw material for use in crystal growth. This process is described in Dietl, J., "Metallurgical Ways of Silicon Meltstock Processing," ch. 6 of Materials -~
Processing Theory and Practices, Khattak, C. and Ravi, K.(ed.) North-Holland (1987) p. 342. Metallurgical grade silicon is ,, j . . .
.
pyrometallurgically upgraded by slagging or, alternatively, by solvent extraction (A1 based refining). The resultant is ground and acid leached. An additional pyrometallurgical step by liquid gas extraction i9 applied. Depending on the crystallization technique and type of device processing, final purification by in situ or additional directional solidification may be applied.
After this complicated series of steps, the silicon is finally ready for crystallization.
Researchers at Hitachi, Ltd., in Japan, in one project, attempted to grow silicon crystals suitable for solar cells from metallurgical grade silicon using the Czochralski technique.
E. Kuroda and T. Saitoh, in "Growth and Characterization of Polycrystalline Silicon Ingots From Metallurgical Grade Source Material," Journal of Crystal Growth 47, p. 251-260 (1979), report that slag floating on the melt surface made growth of single crystals impossible. Further, grown crystals included impurities at greater concentration than would be expected from the --~
segregation coefficient. These impurities caused multi-crystallinity rendering the crystals unsuitable for use in solar cells.
Saitoh, et al., in "Impurity Gettering of Polycrystalline Solar Cells Fabricated from Refined Metallurgical Grade Silicon," ~ -IEEE Transactions on Electron Devices, V. ED-27, No. 4, (April .
Z()OQ~3 1980) p. 671 et seq., reported a two-stage method of growing crystals for solar cell use. An acid-leached metallurgical grade silicon was solidified in vacuum. This material was pulled according to the Czochralski method to produce polycrystalline ingots. A second pull was required to achieve single crystals.
T. Warabisako, et al., in "Efficient Solar Cells from Metallurgical-Grade Silicon," Proceedings of the 11th Conference (1979 International) on Solid State Devices, Tokyo, 1979: Japanese Journal of Applied PhYsics, Volume 19 (1980) Supplement 19-1, pp. 539-544, report that, using the Czochralski method, after a single pull, all ingots were polycrystalline, with crystal sizes from 0.1 mm to several cm. A portion of this crystal was pulled a second time and only 66~ of the crystal was mono-grain or bi-crystal.
Thus, three distinct impurity problems arise when growing silicon crystals from metallurgical grade silicon. First, boron and phosphorous impurities are incorporated into the crystal.
Second, carbon is incorporated into the crystal. Finally, metallic impurities are present in the meltstock. These impurities disrupt growth and contaminate silicon, rendering the end product less uniform and less useful. The impurities increase the conductivity of the crystals beyond that which is useful.
Carbon also renders it difficult to cleanly machine the crystals "~
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due to SiC inclusions (e.g., by cutting them) because SiC
particles are relatively hard as compared to the silicon crystal.
Carbon, by itself, is not per se harmful, but in SiC molecules it generates a stress ield which in turn generates an electric field (due to the piezoelectric effect), which attracts metal and phosphorous and boron impurities and thus creates unacceptably large regions of unacceptably high impurity.
There are three sources of carbon contamination. It can result from carbon in the furnace. It can result from free carbon in the starting material. Einally, it can result from carbon in the starting material in the form of SiC.
Summary of the Invention It has been discovered that silicon with impurity levels greater than 10,000 ppm by weight (e.g., metallurgical grade ; -silicon that is less than 99% pure) can be grown into a single crystal ingot using the Heat Exchanger Method ~HEM) in a single step. The directional solidification accomplishes removal of a large amount of the metallic impurities. This is because the segregation coefficient of the metals in silicon is quite low. ~-It has also been discovered that refining processes and reactions can be employed in the Heat Exchanger Method prior to or during crystal growth. In a most preferred embodiment, carbon in . ;~ . i . . : ~ .
. , ~ .
:~OQ~43 the form of SiC is removed from the melt by causing the crucible to rotate and by accelerating and decelerating the rotation periodically. SiC particles that accumulate at the crystal growth interface are broken off and migrate toward the outside of the melt under the influence of their momentum and the temperature gradient. Further, in preferred embodiments, the silica layer covering the starting material metallurgical grade silicon, is left intact rather than being etched away prior to loading. This silica layer promotes silicon carbide removal by slagging of the silicon oxide. Pure powdered silica ((SiO2) in its amorphous phase, i.e., glass) is also added to the melt prior to crystal growth to encourage reactions that incorporate the carbon into gaseous molecules which leave the melt.
~ oron impurities are removed in other embodiments where the melt is also stirred or where moist hydrogen is passed through the melt prior to crystal growth. Chlorine is passed through the melt resulting in volatile reaction products and also causing the removal of impurities. The melt is also heated to high temperatures, prior to crystal growing at a lower temperature, to remove impurities with a high vapor pressure by boiling them off.
In all of the above embodiments, refining is promoted by the expanding area of the solid/liquid interface (as opposed to a constant interface area occurring with directional solidification ~ - .. . .
:~. ;.
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``" znooz43 such as the Czochralski method or a shrinking interface area occurring with casting, when the exterior solidifies before the interior), which increases the impurity concentration on the liquid side of the interface. An impurity increase with known methods can cause deleterious interface breakdown and loss of single crystallinity. The convex to the liquid shape of the solid/liquid interface facilitates removal of SiC particles by the forces from rotation and from rotational deceleration/
accelerations. Also, impurities are transported to exterior surfaces where they can be easily cropped off, and the temperature gradient, with the hottest melt at the top, stabilizes temperature gradients. The silica slag layer floats on the surface of the melt and does not interfere with the solid/liquid interface some distance below the interface. In the embodiments featuring gas bubbling and stirring of the melt, the increased turbulence ~-promotes removal of impurities from the interface and their transport to the upper surface.
The vacuum operation of HEM with a high impurity content -silicon (such as metallurgical grade silicon) allows further refinement by vaporization of high vapor pressure species. These species are impurities (such as alkali metals, manganese, etc.) -~
that have a tendency to go into vapor phase in preference to staying in the silicon melt. Under vacuum operation (e.g., below :. ,,, ,~ . , : :
Z~)~)V~13 30 torr and preferably near 0.1 torr), the impurity vapor is continuously removed from the site of the reaction in preference to building up near the melt surface, thereby enhancing removal of these impurities from the melt.
The process of the invention removes unwanted impurities from the melt by four processes: 1) vaporization of impurities that is enhanced by vacuum operations eg. alkali metals and group V
elements (such as As,P); 2) scavanging and reaction of impurities that is enhanced by slagging with silica and gas blowing, eg.
glass forming elements (eg. B, Al, Na)/ heavy metals ~eg. W, Mo, Ti, Zr) and transition metals (eg. Fe, Cr, Mg); 3) segregation of impurities that is enhanced by controlled directional solidification with a convex to the liquid interface and rotational deceleration/acceleration; and 4) centrifuging of insoluable particles such as SiC to the outside enhanced by rotational acceleration of the convex interface. Each of these processes can be practiced individually or in combination to remove unwanted contamination. The process of the invention can achieve over 75% single crystallinity in the grown crystal.
Description of the Preferred Embodiment Objects, features and advantages of the invention will appear from the following detailed description of the structure and use ~v .
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-`""` znouz43 of a preferred practice thereof, taken together with the attached drawing in which:
Fiq. 1 is a schematic view, partially in section, of a crucible, molybdenum retainer, conducting graphite plug, and insulation within the heating chamber of a casting furnace.
Fig. 2a is a schematic elevation view of a growing silicon crystal showing detachment of a SiC partial upon deceleration of rotation of the melt.
Fig. 2b is a schematic plan view of a growing silicon ingot, showing detachment of a SiC particle upon deceleration of rotation of the melt.
Fig. 3 is a schematic view, partially in section, of a crucible suitable for multi-crystalline growth within the heating chamber of a casting furnace. `-~
Referring now to Fig. 1, a silica crucible 10 is shown within ;~
the cylindrical heating chamber defined by the resistance heater 12 of a casting furnace of the type disclosed in U.S. Patent No. --3,898,051. The crucible 10 rests on a graphite plate 11 which itself is supported by graphite rods 14 mounted on a graphite support plate 16 on turntable 18 at the bottom of ths heating chamber, and is surrounded by a cylindrical graphite retainer 9.
A helium cooled molybdenum heat exchanger 20, of the type disclosed in U.S. Patent No. 3,653,432, extends through openings in the center of the plate 16 and turntable 18.
-: Z00(~243 Crucible 10 is about 6 in. (15 cm.) in height and diameter and its cylindrical wall 22 and base 24 are 0.15 in. (3.7 mm.~
thick. Graphite plate 11 is about 0.500 in. (1.25 cm.) thick, and graphite retainer 9, is about 0.250 in. (0.625 cm) thick. A
silicon ingot 26, partially solidified according to the process described in aforementioned patents, is shown within the crucible, the convex to the liquid solid-liquid interface 28 having advanced from the seed (shown in dashed lines at 30~. -~ stepped cylindrical graphite plug 50 (upper portion diameter 1.9 in., and lower portion diameter 2.5 in.) extends from turntable 18 upwardly through coaxial holes 52, 54, 56 in, respectively, plate 16, graphite plate 11 and crucible base 24.
The top 58 of plug 50 is flush with the inside bottom surface of crucible base 24. The seed 30 is placed over the plug 50 and the adjacent portion of crucible bottom 24 so as to cover opening 56.
The exterior of the plug upper portion fits loosely in openings 54, 56 to allow for thermal expansion; and the step 60 between the plug's upper smaller diameter and lower larger diameter portions engages the underside of plate 11. A small quantity of silicon powder is placed in the area of opening 56 where seed 30, crucible 10 and graphite plug 50 are in proximity. ~eat exchanger 20 fits within a coaxial recess 62 in the bottom of plug 50, with the top of the heat exchanger about 1/8 in. below the top 58 of the plug.
A graphite felt insulation and/or molybdenum heat shield sleeve 64 : .,:-, ., .
;", ,, ~ ~,, . :
.,. .. :
-,. ,. ~
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SENT ~Y:HALE DORR B~S ;1~- 4-~9 ; 3:27PM ; B173679920~ CCITT ~3;$ 2/ 2 r~ ~X~O U Z 43 closely ~urrounds the larger dlam~ter p~rtion of plug 50, extending axially of the plus the full dlst~nce be~ween turntable 18 and plate ll, A~ shown, thc exterlor sur~ace o~
$nsulat~on ~leeve 64 engage~ the interlor o~ openlng 52~
searin9 70 in the furnace b~se rotatlondlly su~port3 the : :
entire crucible structure described above, relatlve to stationary foundatlon 72. A ~ultable coupl~ng ~not shown) i~ provlded to ~:~
permit heat exchange from the rotatlng heat exchanger shaft 20. -~
~eat exchanqer 20 19 caused to rotate by ~uitable means, not Qhown, such a5 by applylng to~gue to the end of heat exchanger sh~ft 20.
In an embodiment described below, movable ~ilica tube 66 i8 ~uspended ~by means not ~hown~ ~o tha~ one end extends lnto ~ -cruclb~e 10 and the other end ls connected to a gas supply ~not ~;
shcwn~. :
~he apparatu~ de~cribed above and the operatlng condltlons and methods dlsclo6ed in the above-mentioned patcnt~ and patent . -~
appllcatlons are used ~n growlng slngle cry~tal~ fro~ ~
metallu~glcal grade sllicon. Etched metallurqical grade silicon ~:
1~ ~pwardly and outwardly solldif~ed ln 6 lnch crucible lO u~ing ~ ::
the ~eat Exchanger Method ~M). The melt ~tock i~ heated under vacuum condit~on ~0.1 torr pressure). Furnace temperature is increased to 100C above the melt point untll the melt~tock 1 . -12-~t)0~243 melted and reduced to less than 3C above melting point. The heat exchanger temperature is kept 113C below the melting point. The heat exchanger temperature is decreased during growth at a rate of 420C/hr., the furnace temperature is kept constant, and crystal growth lasts about 7.75 hrs. A single crystal ingot with impurities segregated to the outside of the ingot results. Even impurities present in the crystal in the form of solid particles that do not float or sink but remain suspended do not prevent single crystallinity. This is due to the very stable solid/liquid interface, the low temperature and impurity gradients and to the damping of mechanical vibrations of, and temperature variations in, the heating element by the liquid buffer region between the solid/liquid interface 28 and the crucible wall 22.
An important feature of HEM growth that is useful in removing impurities from metallurgical grade silicon is that the crystal grows outwardly from the bottom center so that the last regions to solidify are at the upper surface and at the crucible walls. As solidification proceeds, impurities are segregated in front of the solid/liquid interface, causing an increase in impurity concentration in the remaining liquid. Although the increase in impurities concentration in front of the interface causes interface breakdown and loss of single crystallinity in other unidirectional solidification processes, because the HEM interface : .
` ~noo243 expands, this impurity buildup is distributed over a larger interface area; hence, concentration buildup is not as rapid as for unidirectional solidi~ication. Therefore, by using the HEM
process, higher impurities are tolerated without loss of structure. The impurities are transported to exterior surfaces where they can be easily cropped off.
It has also been determined that carbon impurities in the form of SiC can be excluded from the growing crystal by rotating and decelerating or accelerating the rotation of the melt.
Silicon carbide particles are present in the liquid due to supersaturation of carbon and the presence of SiC from starting materials. The larger SiC particles settle to the bottom because of their hiqher density compared to the silicon of the melt; some of the SiC particles are floating on the surface of the melt, supported by surface tension; a number of different size particles are suspended in the melt. During growth the smaller, suspended particles are pushed ahead of the interface till they combine to form larger particles. According to known methods not incorr^rating the present invention, these particles would be entrapped in the solid growing crystals. Referring to Fig. 2, and in particular Fig. 2b, a top view of a growing crystal is shown schematically, with SiC particles at the surface indicated by the symbol "SiC". The particle may be one that would be entrapped in ?' ~
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--~ zn.r)~243 the solid but for the method of the invention. According to the invention, if the melt is rotated, the silicon carbide can be dislodged from the interface by abruptly changing the rate o~
rotation, e.g., by decelerating the rotation. Fig. 2b depicts the situation where the melt is rotated counter clockwise, as viewed from above. Consequently, all of the SiC particles adhered to the surface rotate in that direction. If the melt rotation is abruptly decelerated in the clockwise direction, as indicated by the arrow R, the SiC particles continue to move in the counter clockwise direction, due to their momentum in that direction.
Meanwhile, the solid crystal has decelerated, including those points at which the SiC particles attach. If the deceleration is abrupt enough, the momentum of the particles break the bond to the crystal interface, and the SiC particles continue to move through the melt in the directions indicated by the arrows for the individual particles. Under the influence of its own momentum, a SiC particle continues to move away from the crystal along a tangent to the surface at the point from which it detached. This is shown schematically in Fig. 2a by the arrows at each illustrated SiC particle. Turbulence caused by the detachment clears out the particle from the interface. The SiC particles come to rest at the outer perimeter of the crucible, and are .: : . , .
...
: , ,~ , -00~)243 thereby solidified into the crystal at the outermost surface.
They can be easily removed from the surface by cropping or other machining.
It will be understood that this deceleration technique would not provide advantageous results other than with a convex to the liquid interface. ~ith a concave to the liquid interface, any particles which did detach would either be held against the sloping wall, or, fall down the slope to accumulate in the center, which will ultimately become an internal zone of the grown crystal. They will not migrate to the outside of the melt where they can be easily removed.
A suitable rotational velocity depends somewhat on the radius of the crucible. For crucibles on the order of 6 inches (15 cm.) to 36 inches (91 cm), a rotational velocity in the range from 100 revolutions per minute to S rpm, respectively, is appropriate. If the melt is decelerated on the order of every one half minute to one minute, the SiC particles will not have a chance to adhere permanently to the interface. Because the detaching force depends on the linear momentum, which depends in part upon the size of the particle, the angular velocity and the radius at which the particle is attached, it is not possible to predetermine an angular deceleration which will detach SiC in every case.
However, such deceleration can be easily determined by routine testing.
, .
.
z~)o(t;~43 It is beneficial to provide a modest temperature gradient in the liquid, so that the liquid is less viscous and so that the SiC
particles, once detached, can move away from the interface unimpeded by a viscous fluid drag. A temperature difeerence of 25C from the interface to the liquid surface (1412C at the interface and 1437C at the liquid surface) is adequate at the start of crystallization.
It has been proposed to dislodge the SiC particles from the interface during directional solidification by researchers at Siemens Research Laboratories, of West Germany, by creating turbulence caused by a very high temperature gradient in the crystal. Urbach, H.F., Lerchenberqer A., "Important Factors Determining the Removal of SiC From Silicon Employed for the Production of Solar Cells," Presented at the Eighth European Photovoltaic Solar Energy Conference in Florence, Italy, May 9-13 (1988). This prosess has met with poor results because it is not possible to generate high temperature gradients in a large crystal. Further, with a large temperature gradient in the crystal, a fine grain structure arises. This result is unacceptable, because the object is to grow crystals with a large grain structure, in order to maximize single crystallinity. Thus, it is necessary to apply to the Si an addîtional crystallization step, such as a Czochralski pull, as was done by the Siemens researchers.
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. - , znoQz43 In addition to enhancing the growth of single crystals, the method is applied advantageously to the growth of ingots having multiple, large-grained crystals. In this embodiment, ~ seed is not used. Growth proceeds from multiple initiation sites on the crucible floor 24. An apparatus suitable for multiple crystal growth is shown in Fig. 3. This apparatus is identical to that of Fig. 1, but for a modification in graphite plug 50'; graphite plate 11' and crucible base 24. In the embodiment for multiple crystal qrowth, crucible base 24' and graphite plate 11' are solid, rather than having concentric openings, and graphite plug SO' is not stepped but rather is flush at the top. The reason for the stepped graphite plug 50 in the single crystal embodiment of Fig. 1 relates to the fact that graphite is a much better conductor of heat than is the silica of crucible bottom 24.
For a single crystal, it is important to remove heat from the seed so that it remains solid, while allowing solidification of the crystal at a larger radius.
For multiple crystal growth of Fig. 3, it is desired to -initiate crystal growth uniformly around crucible floor 24.
Therefore it is not desired to cause more efficient heat transfer at the center, and thus it is not beneficial for the graphite plug 50' to extend to the melt.
Concentration of the impurities at the solid/liquid interface 28 is also minimized by stirring the melt.
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2~0~2~3 Unetched silicon with its adherent silica layer is used to reduce even further the silicon carbide content of the end product. Silica reacts with silicon carbide according to the following reactions:
SiC + 2 SiO~ 3 SiO + CO
sic + sio2 - ~ sio + co + si 2 SiC + SiO2 - ~ 3 Si + 2 CO
SiC + SiO2 ~ 2 Si + C02 SiC + SiO2 ~ C + 2 SiO
These reactions all have negative free energy at the melting point of silicon and approximately 0.1 torr pressure, and therefore tend to proceed to the right. Because the carbon monoxide, carbon dioxide, and silicon monoxide created by these reactions form bubbles, which rise to the surface, a net removal of the carbon from the melt is caused~ The presence of silica also causes the removal of carbide and other impurities (e.~., aluminum) by the slagging phenomenon. The slag layer rises to the melt surface where it does not interfere with the solid/liquid interface, and the impurities are, therefore, not incorporated in the crystal.
High purity silica powder is also added to the melt stock prior to crystal growth by the HEM to further reduce silicon carbide content by virtue of the above reactions. In the --19-- .
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2nooz43 6" crucible 10, 150 grams of silica (99% pure and in powdered form with 100 micrometer particles) is added to 3 kilograms of metallurgical grade silicon.
In both the unetched and the unetched plus added silica embodiments, the slag i5 removed after crystal growth by cropping.
In the added silica embodiment, the ingot is found to have low enough conductivity to allow use in photovoltaic cells.
Solar cells fabricated from such silicon show up to 12.33%
conversion efficiency.
Other Embodiments It will be understood that in decelerating the rotation of the melt, it may be advantageous to actually reverse the direction of rotation. It may also be advantageous to vibrate the melt at a frequency sufficient to dislodge the adhered SiC particles. In ~ -addition to rotating the melt and leaving the metallurgical grade silicon unetched and adding silica to the melt, the use of other refining processes involving reacting a substance with the impurities in the silicon to form either a solid immiscible liquid, or gas is made possible by the stability and expanding nature of the solid/liquid interface.
For example, impurities can be stripped from the melt by passing, via tube 66, gasses that react with the impurities to -?-... ,.......... ~ :.- :
Z~O(~Z43 form reaction products that are volatile or will otherwise remove themselves from the melt. Specifically, moist hydrogen causes the removal of boron by the formation of boron oxide.
Also, chlorine reacts with metallic impurities to form volatile reaction products such as iron chloride.
Finally, the melt stock temperature is increased to 50 to 100C above the silicon melting point to improve volatization of impurities. After sufficient removal of impurities, the temperature is then lowered to 3C above melting point to allow crystal growth.
The foregoing description should be taken as illustrative and should not be considered limiting in any way.
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According to a known method, this grade of silicon is then chemically converted by another process to an intermediate compound (e.g., tricholosilane), which is in turn converted by still another process (e.g., Siemens process) to semiconductor grade silicon (having impurities in the ppb range), which in turn is used to grow a single crystal suitable for use in a solar cell.
This process is discussed in Pizzini, S., "Solar Grade Silicon as a Potential Candidate Material for Low Cost Terrestrial Cells,"
Solar Energy Materiàls 6 North-Holland Publishing Company ~1982) p. 257. A method that has proved useful in growing crystals from such resulting high purity silicon (e.g., impurities less than 10 ppb) is the Heat Exchanger Method, which involves heating material in a crucible to above its melting point in vacuum to melt the material therein and thereafter extracting heat from the bottom of -the crucible by providing a heat exchanger in heat conducting relationship with the bottom. The Heat Exchanger Method is -2~
Z()~ 43 described in U.S. Patents Nos. 3,653,432 and 3,898,051 and Applications Serial Nos. 4,465 filed January 18, 1979 and 967,114 filed December 7, 1978, all of which are hereby incorporated by reference.
In another process, Dow Corning Corporation used specially selected silica and carbon in an arc furnace, and produced metallurgical silicon that is about 99.8~ pure, having low concentrations of boron and phosphorous, impurities which have high segregation coefficients and are therefore difficult to segregate during directional crystal solidification. This silicon was poured in air, resulting in a silica layer, which was then etched away. After etching, an ingot was grown by the Czochralski process (a directional solidification process). Loss of single crystallinity still resulted; but growth of a second crystal, using the best portions from the first growth as starting material, enabled the production of a single crystal material suitable for solar cell production.
In another process, Wacker, GmbH in West Germany conducts a multiple step process to arrive at raw material for use in crystal growth. This process is described in Dietl, J., "Metallurgical Ways of Silicon Meltstock Processing," ch. 6 of Materials -~
Processing Theory and Practices, Khattak, C. and Ravi, K.(ed.) North-Holland (1987) p. 342. Metallurgical grade silicon is ,, j . . .
.
pyrometallurgically upgraded by slagging or, alternatively, by solvent extraction (A1 based refining). The resultant is ground and acid leached. An additional pyrometallurgical step by liquid gas extraction i9 applied. Depending on the crystallization technique and type of device processing, final purification by in situ or additional directional solidification may be applied.
After this complicated series of steps, the silicon is finally ready for crystallization.
Researchers at Hitachi, Ltd., in Japan, in one project, attempted to grow silicon crystals suitable for solar cells from metallurgical grade silicon using the Czochralski technique.
E. Kuroda and T. Saitoh, in "Growth and Characterization of Polycrystalline Silicon Ingots From Metallurgical Grade Source Material," Journal of Crystal Growth 47, p. 251-260 (1979), report that slag floating on the melt surface made growth of single crystals impossible. Further, grown crystals included impurities at greater concentration than would be expected from the --~
segregation coefficient. These impurities caused multi-crystallinity rendering the crystals unsuitable for use in solar cells.
Saitoh, et al., in "Impurity Gettering of Polycrystalline Solar Cells Fabricated from Refined Metallurgical Grade Silicon," ~ -IEEE Transactions on Electron Devices, V. ED-27, No. 4, (April .
Z()OQ~3 1980) p. 671 et seq., reported a two-stage method of growing crystals for solar cell use. An acid-leached metallurgical grade silicon was solidified in vacuum. This material was pulled according to the Czochralski method to produce polycrystalline ingots. A second pull was required to achieve single crystals.
T. Warabisako, et al., in "Efficient Solar Cells from Metallurgical-Grade Silicon," Proceedings of the 11th Conference (1979 International) on Solid State Devices, Tokyo, 1979: Japanese Journal of Applied PhYsics, Volume 19 (1980) Supplement 19-1, pp. 539-544, report that, using the Czochralski method, after a single pull, all ingots were polycrystalline, with crystal sizes from 0.1 mm to several cm. A portion of this crystal was pulled a second time and only 66~ of the crystal was mono-grain or bi-crystal.
Thus, three distinct impurity problems arise when growing silicon crystals from metallurgical grade silicon. First, boron and phosphorous impurities are incorporated into the crystal.
Second, carbon is incorporated into the crystal. Finally, metallic impurities are present in the meltstock. These impurities disrupt growth and contaminate silicon, rendering the end product less uniform and less useful. The impurities increase the conductivity of the crystals beyond that which is useful.
Carbon also renders it difficult to cleanly machine the crystals "~
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due to SiC inclusions (e.g., by cutting them) because SiC
particles are relatively hard as compared to the silicon crystal.
Carbon, by itself, is not per se harmful, but in SiC molecules it generates a stress ield which in turn generates an electric field (due to the piezoelectric effect), which attracts metal and phosphorous and boron impurities and thus creates unacceptably large regions of unacceptably high impurity.
There are three sources of carbon contamination. It can result from carbon in the furnace. It can result from free carbon in the starting material. Einally, it can result from carbon in the starting material in the form of SiC.
Summary of the Invention It has been discovered that silicon with impurity levels greater than 10,000 ppm by weight (e.g., metallurgical grade ; -silicon that is less than 99% pure) can be grown into a single crystal ingot using the Heat Exchanger Method ~HEM) in a single step. The directional solidification accomplishes removal of a large amount of the metallic impurities. This is because the segregation coefficient of the metals in silicon is quite low. ~-It has also been discovered that refining processes and reactions can be employed in the Heat Exchanger Method prior to or during crystal growth. In a most preferred embodiment, carbon in . ;~ . i . . : ~ .
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:~OQ~43 the form of SiC is removed from the melt by causing the crucible to rotate and by accelerating and decelerating the rotation periodically. SiC particles that accumulate at the crystal growth interface are broken off and migrate toward the outside of the melt under the influence of their momentum and the temperature gradient. Further, in preferred embodiments, the silica layer covering the starting material metallurgical grade silicon, is left intact rather than being etched away prior to loading. This silica layer promotes silicon carbide removal by slagging of the silicon oxide. Pure powdered silica ((SiO2) in its amorphous phase, i.e., glass) is also added to the melt prior to crystal growth to encourage reactions that incorporate the carbon into gaseous molecules which leave the melt.
~ oron impurities are removed in other embodiments where the melt is also stirred or where moist hydrogen is passed through the melt prior to crystal growth. Chlorine is passed through the melt resulting in volatile reaction products and also causing the removal of impurities. The melt is also heated to high temperatures, prior to crystal growing at a lower temperature, to remove impurities with a high vapor pressure by boiling them off.
In all of the above embodiments, refining is promoted by the expanding area of the solid/liquid interface (as opposed to a constant interface area occurring with directional solidification ~ - .. . .
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``" znooz43 such as the Czochralski method or a shrinking interface area occurring with casting, when the exterior solidifies before the interior), which increases the impurity concentration on the liquid side of the interface. An impurity increase with known methods can cause deleterious interface breakdown and loss of single crystallinity. The convex to the liquid shape of the solid/liquid interface facilitates removal of SiC particles by the forces from rotation and from rotational deceleration/
accelerations. Also, impurities are transported to exterior surfaces where they can be easily cropped off, and the temperature gradient, with the hottest melt at the top, stabilizes temperature gradients. The silica slag layer floats on the surface of the melt and does not interfere with the solid/liquid interface some distance below the interface. In the embodiments featuring gas bubbling and stirring of the melt, the increased turbulence ~-promotes removal of impurities from the interface and their transport to the upper surface.
The vacuum operation of HEM with a high impurity content -silicon (such as metallurgical grade silicon) allows further refinement by vaporization of high vapor pressure species. These species are impurities (such as alkali metals, manganese, etc.) -~
that have a tendency to go into vapor phase in preference to staying in the silicon melt. Under vacuum operation (e.g., below :. ,,, ,~ . , : :
Z~)~)V~13 30 torr and preferably near 0.1 torr), the impurity vapor is continuously removed from the site of the reaction in preference to building up near the melt surface, thereby enhancing removal of these impurities from the melt.
The process of the invention removes unwanted impurities from the melt by four processes: 1) vaporization of impurities that is enhanced by vacuum operations eg. alkali metals and group V
elements (such as As,P); 2) scavanging and reaction of impurities that is enhanced by slagging with silica and gas blowing, eg.
glass forming elements (eg. B, Al, Na)/ heavy metals ~eg. W, Mo, Ti, Zr) and transition metals (eg. Fe, Cr, Mg); 3) segregation of impurities that is enhanced by controlled directional solidification with a convex to the liquid interface and rotational deceleration/acceleration; and 4) centrifuging of insoluable particles such as SiC to the outside enhanced by rotational acceleration of the convex interface. Each of these processes can be practiced individually or in combination to remove unwanted contamination. The process of the invention can achieve over 75% single crystallinity in the grown crystal.
Description of the Preferred Embodiment Objects, features and advantages of the invention will appear from the following detailed description of the structure and use ~v .
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-`""` znouz43 of a preferred practice thereof, taken together with the attached drawing in which:
Fiq. 1 is a schematic view, partially in section, of a crucible, molybdenum retainer, conducting graphite plug, and insulation within the heating chamber of a casting furnace.
Fig. 2a is a schematic elevation view of a growing silicon crystal showing detachment of a SiC partial upon deceleration of rotation of the melt.
Fig. 2b is a schematic plan view of a growing silicon ingot, showing detachment of a SiC particle upon deceleration of rotation of the melt.
Fig. 3 is a schematic view, partially in section, of a crucible suitable for multi-crystalline growth within the heating chamber of a casting furnace. `-~
Referring now to Fig. 1, a silica crucible 10 is shown within ;~
the cylindrical heating chamber defined by the resistance heater 12 of a casting furnace of the type disclosed in U.S. Patent No. --3,898,051. The crucible 10 rests on a graphite plate 11 which itself is supported by graphite rods 14 mounted on a graphite support plate 16 on turntable 18 at the bottom of ths heating chamber, and is surrounded by a cylindrical graphite retainer 9.
A helium cooled molybdenum heat exchanger 20, of the type disclosed in U.S. Patent No. 3,653,432, extends through openings in the center of the plate 16 and turntable 18.
-: Z00(~243 Crucible 10 is about 6 in. (15 cm.) in height and diameter and its cylindrical wall 22 and base 24 are 0.15 in. (3.7 mm.~
thick. Graphite plate 11 is about 0.500 in. (1.25 cm.) thick, and graphite retainer 9, is about 0.250 in. (0.625 cm) thick. A
silicon ingot 26, partially solidified according to the process described in aforementioned patents, is shown within the crucible, the convex to the liquid solid-liquid interface 28 having advanced from the seed (shown in dashed lines at 30~. -~ stepped cylindrical graphite plug 50 (upper portion diameter 1.9 in., and lower portion diameter 2.5 in.) extends from turntable 18 upwardly through coaxial holes 52, 54, 56 in, respectively, plate 16, graphite plate 11 and crucible base 24.
The top 58 of plug 50 is flush with the inside bottom surface of crucible base 24. The seed 30 is placed over the plug 50 and the adjacent portion of crucible bottom 24 so as to cover opening 56.
The exterior of the plug upper portion fits loosely in openings 54, 56 to allow for thermal expansion; and the step 60 between the plug's upper smaller diameter and lower larger diameter portions engages the underside of plate 11. A small quantity of silicon powder is placed in the area of opening 56 where seed 30, crucible 10 and graphite plug 50 are in proximity. ~eat exchanger 20 fits within a coaxial recess 62 in the bottom of plug 50, with the top of the heat exchanger about 1/8 in. below the top 58 of the plug.
A graphite felt insulation and/or molybdenum heat shield sleeve 64 : .,:-, ., .
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SENT ~Y:HALE DORR B~S ;1~- 4-~9 ; 3:27PM ; B173679920~ CCITT ~3;$ 2/ 2 r~ ~X~O U Z 43 closely ~urrounds the larger dlam~ter p~rtion of plug 50, extending axially of the plus the full dlst~nce be~ween turntable 18 and plate ll, A~ shown, thc exterlor sur~ace o~
$nsulat~on ~leeve 64 engage~ the interlor o~ openlng 52~
searin9 70 in the furnace b~se rotatlondlly su~port3 the : :
entire crucible structure described above, relatlve to stationary foundatlon 72. A ~ultable coupl~ng ~not shown) i~ provlded to ~:~
permit heat exchange from the rotatlng heat exchanger shaft 20. -~
~eat exchanqer 20 19 caused to rotate by ~uitable means, not Qhown, such a5 by applylng to~gue to the end of heat exchanger sh~ft 20.
In an embodiment described below, movable ~ilica tube 66 i8 ~uspended ~by means not ~hown~ ~o tha~ one end extends lnto ~ -cruclb~e 10 and the other end ls connected to a gas supply ~not ~;
shcwn~. :
~he apparatu~ de~cribed above and the operatlng condltlons and methods dlsclo6ed in the above-mentioned patcnt~ and patent . -~
appllcatlons are used ~n growlng slngle cry~tal~ fro~ ~
metallu~glcal grade sllicon. Etched metallurqical grade silicon ~:
1~ ~pwardly and outwardly solldif~ed ln 6 lnch crucible lO u~ing ~ ::
the ~eat Exchanger Method ~M). The melt ~tock i~ heated under vacuum condit~on ~0.1 torr pressure). Furnace temperature is increased to 100C above the melt point untll the melt~tock 1 . -12-~t)0~243 melted and reduced to less than 3C above melting point. The heat exchanger temperature is kept 113C below the melting point. The heat exchanger temperature is decreased during growth at a rate of 420C/hr., the furnace temperature is kept constant, and crystal growth lasts about 7.75 hrs. A single crystal ingot with impurities segregated to the outside of the ingot results. Even impurities present in the crystal in the form of solid particles that do not float or sink but remain suspended do not prevent single crystallinity. This is due to the very stable solid/liquid interface, the low temperature and impurity gradients and to the damping of mechanical vibrations of, and temperature variations in, the heating element by the liquid buffer region between the solid/liquid interface 28 and the crucible wall 22.
An important feature of HEM growth that is useful in removing impurities from metallurgical grade silicon is that the crystal grows outwardly from the bottom center so that the last regions to solidify are at the upper surface and at the crucible walls. As solidification proceeds, impurities are segregated in front of the solid/liquid interface, causing an increase in impurity concentration in the remaining liquid. Although the increase in impurities concentration in front of the interface causes interface breakdown and loss of single crystallinity in other unidirectional solidification processes, because the HEM interface : .
` ~noo243 expands, this impurity buildup is distributed over a larger interface area; hence, concentration buildup is not as rapid as for unidirectional solidi~ication. Therefore, by using the HEM
process, higher impurities are tolerated without loss of structure. The impurities are transported to exterior surfaces where they can be easily cropped off.
It has also been determined that carbon impurities in the form of SiC can be excluded from the growing crystal by rotating and decelerating or accelerating the rotation of the melt.
Silicon carbide particles are present in the liquid due to supersaturation of carbon and the presence of SiC from starting materials. The larger SiC particles settle to the bottom because of their hiqher density compared to the silicon of the melt; some of the SiC particles are floating on the surface of the melt, supported by surface tension; a number of different size particles are suspended in the melt. During growth the smaller, suspended particles are pushed ahead of the interface till they combine to form larger particles. According to known methods not incorr^rating the present invention, these particles would be entrapped in the solid growing crystals. Referring to Fig. 2, and in particular Fig. 2b, a top view of a growing crystal is shown schematically, with SiC particles at the surface indicated by the symbol "SiC". The particle may be one that would be entrapped in ?' ~
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--~ zn.r)~243 the solid but for the method of the invention. According to the invention, if the melt is rotated, the silicon carbide can be dislodged from the interface by abruptly changing the rate o~
rotation, e.g., by decelerating the rotation. Fig. 2b depicts the situation where the melt is rotated counter clockwise, as viewed from above. Consequently, all of the SiC particles adhered to the surface rotate in that direction. If the melt rotation is abruptly decelerated in the clockwise direction, as indicated by the arrow R, the SiC particles continue to move in the counter clockwise direction, due to their momentum in that direction.
Meanwhile, the solid crystal has decelerated, including those points at which the SiC particles attach. If the deceleration is abrupt enough, the momentum of the particles break the bond to the crystal interface, and the SiC particles continue to move through the melt in the directions indicated by the arrows for the individual particles. Under the influence of its own momentum, a SiC particle continues to move away from the crystal along a tangent to the surface at the point from which it detached. This is shown schematically in Fig. 2a by the arrows at each illustrated SiC particle. Turbulence caused by the detachment clears out the particle from the interface. The SiC particles come to rest at the outer perimeter of the crucible, and are .: : . , .
...
: , ,~ , -00~)243 thereby solidified into the crystal at the outermost surface.
They can be easily removed from the surface by cropping or other machining.
It will be understood that this deceleration technique would not provide advantageous results other than with a convex to the liquid interface. ~ith a concave to the liquid interface, any particles which did detach would either be held against the sloping wall, or, fall down the slope to accumulate in the center, which will ultimately become an internal zone of the grown crystal. They will not migrate to the outside of the melt where they can be easily removed.
A suitable rotational velocity depends somewhat on the radius of the crucible. For crucibles on the order of 6 inches (15 cm.) to 36 inches (91 cm), a rotational velocity in the range from 100 revolutions per minute to S rpm, respectively, is appropriate. If the melt is decelerated on the order of every one half minute to one minute, the SiC particles will not have a chance to adhere permanently to the interface. Because the detaching force depends on the linear momentum, which depends in part upon the size of the particle, the angular velocity and the radius at which the particle is attached, it is not possible to predetermine an angular deceleration which will detach SiC in every case.
However, such deceleration can be easily determined by routine testing.
, .
.
z~)o(t;~43 It is beneficial to provide a modest temperature gradient in the liquid, so that the liquid is less viscous and so that the SiC
particles, once detached, can move away from the interface unimpeded by a viscous fluid drag. A temperature difeerence of 25C from the interface to the liquid surface (1412C at the interface and 1437C at the liquid surface) is adequate at the start of crystallization.
It has been proposed to dislodge the SiC particles from the interface during directional solidification by researchers at Siemens Research Laboratories, of West Germany, by creating turbulence caused by a very high temperature gradient in the crystal. Urbach, H.F., Lerchenberqer A., "Important Factors Determining the Removal of SiC From Silicon Employed for the Production of Solar Cells," Presented at the Eighth European Photovoltaic Solar Energy Conference in Florence, Italy, May 9-13 (1988). This prosess has met with poor results because it is not possible to generate high temperature gradients in a large crystal. Further, with a large temperature gradient in the crystal, a fine grain structure arises. This result is unacceptable, because the object is to grow crystals with a large grain structure, in order to maximize single crystallinity. Thus, it is necessary to apply to the Si an addîtional crystallization step, such as a Czochralski pull, as was done by the Siemens researchers.
:',;" ~ .. , ' , , "''`' ', ~, . :
'',''',"' ~ .,' ~' :
''`, ' :, ' , ~'' ~' " .
. - , znoQz43 In addition to enhancing the growth of single crystals, the method is applied advantageously to the growth of ingots having multiple, large-grained crystals. In this embodiment, ~ seed is not used. Growth proceeds from multiple initiation sites on the crucible floor 24. An apparatus suitable for multiple crystal growth is shown in Fig. 3. This apparatus is identical to that of Fig. 1, but for a modification in graphite plug 50'; graphite plate 11' and crucible base 24. In the embodiment for multiple crystal qrowth, crucible base 24' and graphite plate 11' are solid, rather than having concentric openings, and graphite plug SO' is not stepped but rather is flush at the top. The reason for the stepped graphite plug 50 in the single crystal embodiment of Fig. 1 relates to the fact that graphite is a much better conductor of heat than is the silica of crucible bottom 24.
For a single crystal, it is important to remove heat from the seed so that it remains solid, while allowing solidification of the crystal at a larger radius.
For multiple crystal growth of Fig. 3, it is desired to -initiate crystal growth uniformly around crucible floor 24.
Therefore it is not desired to cause more efficient heat transfer at the center, and thus it is not beneficial for the graphite plug 50' to extend to the melt.
Concentration of the impurities at the solid/liquid interface 28 is also minimized by stirring the melt.
.... ; . ~ ., ~ .
.i , . . .
2~0~2~3 Unetched silicon with its adherent silica layer is used to reduce even further the silicon carbide content of the end product. Silica reacts with silicon carbide according to the following reactions:
SiC + 2 SiO~ 3 SiO + CO
sic + sio2 - ~ sio + co + si 2 SiC + SiO2 - ~ 3 Si + 2 CO
SiC + SiO2 ~ 2 Si + C02 SiC + SiO2 ~ C + 2 SiO
These reactions all have negative free energy at the melting point of silicon and approximately 0.1 torr pressure, and therefore tend to proceed to the right. Because the carbon monoxide, carbon dioxide, and silicon monoxide created by these reactions form bubbles, which rise to the surface, a net removal of the carbon from the melt is caused~ The presence of silica also causes the removal of carbide and other impurities (e.~., aluminum) by the slagging phenomenon. The slag layer rises to the melt surface where it does not interfere with the solid/liquid interface, and the impurities are, therefore, not incorporated in the crystal.
High purity silica powder is also added to the melt stock prior to crystal growth by the HEM to further reduce silicon carbide content by virtue of the above reactions. In the --19-- .
:
: :
, . . .
~' "
.
2nooz43 6" crucible 10, 150 grams of silica (99% pure and in powdered form with 100 micrometer particles) is added to 3 kilograms of metallurgical grade silicon.
In both the unetched and the unetched plus added silica embodiments, the slag i5 removed after crystal growth by cropping.
In the added silica embodiment, the ingot is found to have low enough conductivity to allow use in photovoltaic cells.
Solar cells fabricated from such silicon show up to 12.33%
conversion efficiency.
Other Embodiments It will be understood that in decelerating the rotation of the melt, it may be advantageous to actually reverse the direction of rotation. It may also be advantageous to vibrate the melt at a frequency sufficient to dislodge the adhered SiC particles. In ~ -addition to rotating the melt and leaving the metallurgical grade silicon unetched and adding silica to the melt, the use of other refining processes involving reacting a substance with the impurities in the silicon to form either a solid immiscible liquid, or gas is made possible by the stability and expanding nature of the solid/liquid interface.
For example, impurities can be stripped from the melt by passing, via tube 66, gasses that react with the impurities to -?-... ,.......... ~ :.- :
Z~O(~Z43 form reaction products that are volatile or will otherwise remove themselves from the melt. Specifically, moist hydrogen causes the removal of boron by the formation of boron oxide.
Also, chlorine reacts with metallic impurities to form volatile reaction products such as iron chloride.
Finally, the melt stock temperature is increased to 50 to 100C above the silicon melting point to improve volatization of impurities. After sufficient removal of impurities, the temperature is then lowered to 3C above melting point to allow crystal growth.
The foregoing description should be taken as illustrative and should not be considered limiting in any way.
. ,.,j. ., ~
. . -, ., .. -.~ ..
j,: .
Claims (20)
1. A process for producing a silicon ingot of substantially single crystallinity suitable for use in photovoltaic cells from low purity silicon meltstock, said process comprising the steps of:
a. providing a silicon meltstock having an impurity level greater than 10,000 ppm by weight;
b. heating said silicon meltstock in a crucible to above its melting point;
c. thereafter solidifying said melted silicon meltstock to product said ingot by extracting heat from a central portion of the bottom of said crucible whereby impurity particles are excluded from the solidified meltstock forming the interior of said ingot subsequent to said heating and in the course of said solidifying and adhere loosely to the surface of the growing solid; and d. periodically, ii. rotating said solidifying melt in a first direction; and iii. thereafter decelerating the rotation of the meltstock sufficiently abruptly to dislodge said adhered impurities from the solidified portion of the meltstock.
a. providing a silicon meltstock having an impurity level greater than 10,000 ppm by weight;
b. heating said silicon meltstock in a crucible to above its melting point;
c. thereafter solidifying said melted silicon meltstock to product said ingot by extracting heat from a central portion of the bottom of said crucible whereby impurity particles are excluded from the solidified meltstock forming the interior of said ingot subsequent to said heating and in the course of said solidifying and adhere loosely to the surface of the growing solid; and d. periodically, ii. rotating said solidifying melt in a first direction; and iii. thereafter decelerating the rotation of the meltstock sufficiently abruptly to dislodge said adhered impurities from the solidified portion of the meltstock.
2. The process of claim 1 wherein said adhered impurities are of silicon carbide.
3. The process of claim 2 where said silicon meltstock is metallurgical grade silicon produced by the carbothermic reduction of silica.
4. The process of claim 1 including the step of providing silica within said crucible prior to said solidifying, and wherein said impurities are removed from said meltstock by the step of reacting said silica with silicon carbide impurities in said silicon meltstock to cause the formation of reaction products that will separate from the melted silicon meltstock.
5. The process of claim 4 wherein before heating said silicon meltstock, said meltstock includes an adherent covering layer of silica.
6. The process of claim 4 wherein said silica is added to said melted silicon meltstock subsequent to said heating and prior to said solidifying.
7. The process of claim 6 wherein said silica is pure powdered silica.
8. The process of claim 1 including the step of reacting non-volatile impurities in said melt stock to form volatile impurities, and removing said volatile impurities from said silicon meltstock by reducing the pressure around said crucible to less than about 30 torr.
9. The process of claim 8 wherein said reduced pressure is about 0.1 torr.
10. The process of claim 8 including the step of heating said silicon to between about 50°C to 100°C. above the melting point of silicon to promote said removal of volatile impurities.
11. The process of claim 8 wherein said volatile impurities are produced by passing moist gas chosen from the group of hydrogen and chlorine through said melted silicon melt.
12. The process of claim 8 wherein said volatile impurities are produced by adding silica to said meltstock.
What is claimed is:
What is claimed is:
13. A process for producing a silicon ingot of large grain size multiple crystallinity suitable for use in photovoltaic cells from low purity silicon meltstock, said process comprising the steps of:
a. providing a silicon meltstock having an impurity level greater than 10,000 ppm by weight;
b. heating said silicon meltstock in a crucible to above its melting point;
c. thereafter solidifying said melted silicon meltstock to product said ingot by extracting heat from the bottom of said crucible whereby impurity particles are excluded from the solidified meltstock forming the interior of said ingot subsequent to said heating and in the course of said solidifying and adhere loosely to the surface of the growing solid; and d. periodically, ii. rotating said solidifying melt in a first direction; and iii. thereafter decelerating the rotation of the meltstock sufficiently abruptly to dislodge said adhered impurities from the solidified portion of the meltstock.
a. providing a silicon meltstock having an impurity level greater than 10,000 ppm by weight;
b. heating said silicon meltstock in a crucible to above its melting point;
c. thereafter solidifying said melted silicon meltstock to product said ingot by extracting heat from the bottom of said crucible whereby impurity particles are excluded from the solidified meltstock forming the interior of said ingot subsequent to said heating and in the course of said solidifying and adhere loosely to the surface of the growing solid; and d. periodically, ii. rotating said solidifying melt in a first direction; and iii. thereafter decelerating the rotation of the meltstock sufficiently abruptly to dislodge said adhered impurities from the solidified portion of the meltstock.
14. The process of claim 13 wherein said adhered impurities are of silicon carbide.
15. The process of claim 14 where said silicon meltstock is metallurgical grade silicon produced by the carbothermic reduction of silica.
16. The process of claim 13 including the step of providing silica within said crucible prior to said solidifying, and wherein said impurities are removed from said meltstock by the step of reacting said silica with silicon carbide impurities in said silicon meltstock to cause the formation of reaction products that will separate from the melted silicon meltstock.
17. The process of claim 16 wherein before heating said silicon meltstock, said meltstock includes an adherent covering layer of silica.
18. The process of claim 16 wherein said silica is added to said melted silicon meltstock subsequent to said heating and prior to said solidifying.
19. The process of claim 13 including the step of reacting non-volatile impurities in said melt stock to form volatile impurities, and removing said volatile impurities from said silicon meltstock by reducing the pressure around said crucible to less than about 30 torr.
20. A process for producing a silicon ingot of substantially single crystallinity suitable for use in photovoltaic cells from low purity silicon meltstock, said process comprising the steps of:
a. providing a silicon meltstock having an impurity level greater than 10,000 ppm by weight;
b. heating said silicon meltstock in a crucible to above its melting point;
c. thereafter solidifying said melted silicon meltstock to product said ingot by extracting heat from a central portion of the bottom of said crucible whereby impurity particles are excluded from the solidified meltstock forming the interior of said ingot subsequent to said heating and in the course of said solidifying and adhere loosely to the surface of the growing solid; and d. periodically, ii. moving said solidifying melt in a first direction;
and iii. thereafter accelerating the motion of the meltstock sufficiently abruptly to dislodge said adhered impurities from the solidified portion of the meltstock.
a. providing a silicon meltstock having an impurity level greater than 10,000 ppm by weight;
b. heating said silicon meltstock in a crucible to above its melting point;
c. thereafter solidifying said melted silicon meltstock to product said ingot by extracting heat from a central portion of the bottom of said crucible whereby impurity particles are excluded from the solidified meltstock forming the interior of said ingot subsequent to said heating and in the course of said solidifying and adhere loosely to the surface of the growing solid; and d. periodically, ii. moving said solidifying melt in a first direction;
and iii. thereafter accelerating the motion of the meltstock sufficiently abruptly to dislodge said adhered impurities from the solidified portion of the meltstock.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US25513688A | 1988-10-07 | 1988-10-07 | |
| US255,136 | 1988-10-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2000243A1 true CA2000243A1 (en) | 1990-04-07 |
Family
ID=22966994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA 2000243 Abandoned CA2000243A1 (en) | 1988-10-07 | 1989-10-06 | Method of growing silicon ingots using a rotating melt |
Country Status (2)
| Country | Link |
|---|---|
| CA (1) | CA2000243A1 (en) |
| WO (1) | WO1990003952A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5492894A (en) * | 1991-03-21 | 1996-02-20 | The Procter & Gamble Company | Compositions for treating wrinkles comprising a peptide |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8329133B2 (en) * | 2008-11-03 | 2012-12-11 | Gt Crystal Systems, Llc | Method and apparatus for refining metallurgical grade silicon to produce solar grade silicon |
| DE102009034145B4 (en) | 2009-07-20 | 2015-10-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Device, use of the device and method for producing ingots of multicrystalline silicon |
| US11441235B2 (en) * | 2018-12-07 | 2022-09-13 | Showa Denko K.K. | Crystal growing apparatus and crucible having a main body portion and a low radiation portion |
| CN111286785A (en) * | 2018-12-07 | 2020-06-16 | 昭和电工株式会社 | Crystal growth device and crucible |
| CN110565162B (en) * | 2019-09-23 | 2024-02-27 | 大同新成新材料股份有限公司 | Production equipment with heat preservation structure for polysilicon and application method of production equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2912321A (en) * | 1956-09-04 | 1959-11-10 | Helen E Brennan | Continuous casting and refining of material |
| US3012865A (en) * | 1957-11-25 | 1961-12-12 | Du Pont | Silicon purification process |
| US3267529A (en) * | 1961-10-04 | 1966-08-23 | Heraeus Gmbh W C | Apparatus for melting metals under high vacuum |
| US3265469A (en) * | 1964-09-21 | 1966-08-09 | Gen Electric | Crystal growing apparatus |
| US3653432A (en) * | 1970-09-01 | 1972-04-04 | Us Army | Apparatus and method for unidirectionally solidifying high temperature material |
| US3929557A (en) * | 1973-06-11 | 1975-12-30 | Us Air Force | Periodically and alternately accelerating and decelerating rotation rate of a feed crystal |
| US3898051A (en) * | 1973-12-28 | 1975-08-05 | Crystal Syst | Crystal growing |
| DE2623413C2 (en) * | 1976-05-25 | 1985-01-10 | Siemens AG, 1000 Berlin und 8000 München | Process for producing silicon usable for semiconductor components |
| US4013501A (en) * | 1976-05-27 | 1977-03-22 | Bell Telephone Laboratories, Incorporated | Growth of neodymium doped yttrium aluminum garnet crystals |
| US4094731A (en) * | 1976-06-21 | 1978-06-13 | Interlake, Inc. | Method of purifying silicon |
| US4298423A (en) * | 1976-12-16 | 1981-11-03 | Semix Incorporated | Method of purifying silicon |
| US4193975A (en) * | 1977-11-21 | 1980-03-18 | Union Carbide Corporation | Process for the production of improved refined metallurgical silicon |
| US4243471A (en) * | 1978-05-02 | 1981-01-06 | International Business Machines Corporation | Method for directional solidification of silicon |
| US4200671A (en) * | 1978-05-05 | 1980-04-29 | The Dow Chemical Company | Method for removing paint from a substrate |
| US4256530A (en) * | 1978-12-07 | 1981-03-17 | Crystal Systems Inc. | Crystal growing |
| US4247528A (en) * | 1979-04-11 | 1981-01-27 | Dow Corning Corporation | Method for producing solar-cell-grade silicon |
| US4312847A (en) * | 1979-05-24 | 1982-01-26 | Aluminum Company Of America | Silicon purification system |
| US4551196A (en) * | 1981-05-15 | 1985-11-05 | U.S. Philips Corporation | Method of growing crystalline cadmium mercury telluride and crystalline cadmium mercury telluride grown by the method |
| US4643833A (en) * | 1984-05-04 | 1987-02-17 | Siemens Aktiengesellschaft | Method for separating solid reaction products from silicon produced in an arc furnace |
| US4659423A (en) * | 1986-04-28 | 1987-04-21 | International Business Machines Corporation | Semiconductor crystal growth via variable melt rotation |
| DE3635064A1 (en) * | 1986-10-15 | 1988-04-21 | Bayer Ag | METHOD FOR REFINING SILICON AND ITS PURIFIED SILICUM |
| US4793894A (en) * | 1987-03-10 | 1988-12-27 | North American Philips Corporation | Process for crystal growth from solution |
| US4840699A (en) * | 1987-06-12 | 1989-06-20 | Ghemini Technologies | Gallium arsenide crystal growth |
-
1989
- 1989-10-05 WO PCT/US1989/004468 patent/WO1990003952A1/en unknown
- 1989-10-06 CA CA 2000243 patent/CA2000243A1/en not_active Abandoned
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5492894A (en) * | 1991-03-21 | 1996-02-20 | The Procter & Gamble Company | Compositions for treating wrinkles comprising a peptide |
Also Published As
| Publication number | Publication date |
|---|---|
| WO1990003952A1 (en) | 1990-04-19 |
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