CA1296415C - X-ray image scanner - Google Patents

Abstract

ABSTRACT

An apparatus for providing electrical signals representative of an image formed by X-rays projected thereon includes a two-dimensional array of spaced apart light sensitive sensors formed from deposited semiconductor material. The elements are capable of effecting a detectable electrical characteristic responsive to the intensity of light received thereon. A
phosphorescent layer overlying the light sensitive elements receives the projected X-ray image and produces light in response to the impingement of the X-rays thereon. Isolation elements enable the selective addressing of the light sensitive elements.

Description

3t~ 5 The present invention relates to an apparatus for providing electrical signals representative of an image formed by projected X-rays or other forms of energy having high and low intensities.
This application is a divisional application of application Serial No.
480,707, filed May 3, 1985.
BACKGROUND OF THE INVENTION
Systems are known for converting an image, such as characters of a document to electrical signals which can be stored in a memory for later recall or transmitted to a remote location over, for example, telephone communication or similar systems. Systems of this type have generally been referred to as line scanners. In one type of line scanner, the document is held stationary and a photodetector or detectors are scanned across each line of the document along with a localized light source. In another type of scanner, the photodetector and light source are held stationary and the document is moved. In both types of systems, as the document is scanned, the high optical density or dark portions of the document reflect less light from the light source into the detector than the low optical density or light portions. As a result, the high`and low optical density portions can be contrasted by the photodetector for generating electrical signals representative of the character images of the document.
While systems of the type above have been generally successful in fulfilling their intended purposes and have found commercial acceptance, these systems have exhibited several deficiencies. For example, line scanner systems are rather complex. They require mechanical drive and servo systems to rn/ 3 precisely control the movement of the photosensor and light source relative to the document being scanned to enable accurate data storage or transmission of the electrical signals for the ultimate faithful reproduction of the document.
When a single detector and light source are used, these mechanical drives and servo systems must accurately control such relative movement both across the document and down the length of the document.
When a plurality of colinear detectors and light sources are employed to enable line-by-line scanning of a document, fiber optics are generally used to convey light to operative association with each detector. Hundreds of individual detectors and corresponding optical fibers are required for such operation. This not only adds to the complexity of the overall system, but in addition, introduces fiber optic coupling problems as well.
Prior art line scanners also require frequent or periodic servicing.
This results due to their complexity and the incorporation of moving parts which are subject to wear.
In addition to the foregoing, prior art line scanners require a significant period of time to scan a document. This is due to the fact that the mechanical moving parts can only be driven at a speed which precludes damage to the moving parts and which ensures proper synchronization with a companion printer or data input storage. Scanners of the prior art are therefor extremely inconvenient to use when a document of many pages must be scanned.
~astly, prior art scanners are physically bulky and heavy. This is due to the rather heavy mechanical parts incorporated therein and most particularly rn/

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the motor or motors utilized for driving the moving parts. Hence, prior art scarmers do not lend themselves to portabili~ and generally can only be used at a fi~ed location.
SUMMARY OF THE INVENTION
The invention provides a new and improved apparatus for providing electrical signals representat*e of an image formed by a spat;al distribution of a first form of energy projected onto the apparatus. The apparatus includes an array of spaced apart, energy sensitive elements and converting means arranged for receiving said energy distribution and for converting the first form of energy to a second form of energy. The elements are capable of effecting a detectable electrical characteristic responsive to the intensity of the second form of energy received from the converting means. The apparatus further includes means for enabling the selective detection of the electrical characteristic of each element.
The present invention more particularly provides an apparatus for providing electrical signals representative of an electromagnetic image projected thereon. The apparatus includes a first set of address lines and a second set of address lines spaced from and crossing at an angle to the first set of address lines to form a plurality of crossover points. The apparatus further includes a photosensor comprising light sensitive elements associated with at least some of the crossover points and adapted to effect a detectable change in electrical conductivity in response to receipt of incident light. The apparatus further includes converting means overlying the elements and arranged for receiving the projected electromagnetic image and for providing the incident light responsive rn/

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to the impingement thereof. Isolation means associated with each light sensitive ele~ment facilitate the selective addressing and detection of the electrical conductivity of each light sensitive element by the application of read potentials to respective pairs of the first and second sets of address lines.
In accordance with a preferred embodiment of the invention, the image is represented by spatially distributed X-rays with intensities in a first energy range. Any other form of electromagnetic energy may also be used.
The light sensitive elements can comprise, for example, photovoltaic cells or photoresistors. The light sensitive elements can be formed from deposited semiconductor material, and preferably from an amorphous semiconductor alloy.
The converting means includes a layer of phosphorescent material.
The phosphorescent material is positioned between a ground metal layer and a transparent insulating layer. The insulating layer, preferably silicon dioxide, overlies the array of energy sensitive elements. The energy converter converts a first form of energy, (such as X-rays), with photon/particle energy in a first energy range into a second form of energy, (such as visible }ight), with photon or particle energies in a second range. The first form of energy can be not only radiant electromagnetic energy, such as X-rays, but could also be an accelerated particle beam, such as an accelerated beam of electrons.
The isolation devices can comprise diodes or field effect transistors, for example. The isolation devices can also be formed from deposited semiconductor material and preferably amorphous semiconductor alloys.

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~RIEF DESCRIPTION OF THE DRAWINGS

In the drawings, which form an integral part of the specification and which are to be read in conjunction therewith, and in which like reference numerals are employed to designate similar components in various views:
Figure 1 is a partial side view, partly in cross section, of a contact-type document scanner system and apparatus embodying the present invention with a document to be scanned disposed over the apparatus;
Figure 2 is a top plan view of the contact-type scanner of Figure 1 with the document removed;
Figure 3 is a part;al cross-sectional side view 111ustrating a light sensitive element and an isolating device associated therewith embodying the present invention;
Figure 4 is a top plan view of the light senSitive element and isolating device of Figure 3;

;4~5 Figure 5 is an equivalent circuit diagram of the light sensitive element and isolating device of Figure 3;
Figure 6 is a partial cross-sectional side view of another light sensitive element and isolating device embodying the present invention; and Figure 7 is the e~uivalent circuit diagram of the light sensitive element and isolating device of Figure 6;
Figure 8 is a partial cross-sectional side view illustrating a light sensitive element similar to that shown in Figure 3, except that an energy conversion means has been placed over its photosensitive elements;
Figure 9 is a partial cross-sectional side view of another light sensitive element similar to that shown in Figure 6, except that an energy conversion means has been placed over its photosensitive elements;
Figure 10 is a schematic circuit diagram of an integrating radiation sensing apparatus according to another embodiment of the present invention;
Figures lla through 17a are schematic representations indicating the voltages applied to the row and column address lines of the integrating radiation sensing apparatus shown in Figure 10, and Figures llb through 17b are schematic circuit diagrams of the photosensitive element contained in the upper left hand corner of the array shown in Figure 10, ; 30 indicating the voltages of its various elements during the various phases of the scanning sequence shown in the corresponding Figures lla through 17a;
Figure 18 is a partial top plan view of an integrated circuit in which an array of photosensitive elements have been formed according to an embodiment of the present invention;

~291~4i5 Figure 19 is a partial cross-sectional side view of the integrated circuit shown in Figure 18 taken along the line of 19-19 in that figure;
Figure 20 is a partial cross-sectional side view of the integrated circuit shown in Figure 18 taken along the line 20-2~ shown in that figure;
Figure 21 is a partial cross-sectional side view of an integrated circuit similar to that shown in Figure 20 except that the diode formed ~y its lo semiconductor layer is a Schottky diode formed by the contact of that semiconductor layer with its bottom metal layer, rather than a PIN diode as in Figure 20;
Figure 22 is a partial cross-sectional side view of an integrated circuit similar to that shown in Figure 20, except that the semiconductor region associated with its photosensitive element does not form a diode, but instead acts as a photoresistor;
Figure 23 is a partial cross-sectional side view of an integrated circuit substantially identical to that shown in figure 20 except that it is covered with a layer of fluorescent material;
Figure 24 is a cross-sectional side view of an incident radiation sensing apparatus according to the present invention for use in forming an image of a document placed in close proximity to its array of photosensitive elements, with a portion of such a document being shown;
Figure 25 is a cross-sectional side view of : an incident radiation sensing apparatus according to the present invention which includes focusing means for focusing a light image upon its array of photosensitiVe elements.

~ 5 DETAILED DESCRIPTION OF THE PREFERRED EMBO~IMENTS
-Figures 1 and 2 illustrate a contact-type document scanner system and apparatus.
The system 10 illustrated in Figure 1 generally includes an apparatus 12 capable of providing electrical signals representative of an image carried by an image-bearing member such as a document 14 disposed thereover, and a light source 16.
The apparatus 12 includes a transparent substrate 18, a first set of X address lines including address lines 20, 22, and 24, a second set of Y
address lines including address lines 26, 28, and 30, and a plurality of light sensitive elements 32, 34, 36, 38, 40, 42, 44, 46, and 48. The apparatus 12 further includes an isolation device 50, 52, 54, 56, 58, 60, 62, ~4, and 66 associated with each light sensitive element, and, a transparent cover means 68.
As can be noted in Figure 2, the X address 2Q lines 20, 22, and 24 and the Y address lines 26, 28, and 30 cross at an angle, and, as will be more apparent hereinafter, are spaced from one another to form a plurality of crossover points 7Q, 72, 74, 76, 78, 80, 82, 84, and 86. Associated with each of the crossover points is a respective one of the light sensitive elements. The light sensitive elements ; 32-48 are formed on the substrate 18 and are distributed thereover in spaced apart relation to form spaces 88 between the light sensitive elements. The 0 light sensitive elements 32-48 are further of the type which effects a detectable electrical characteristic in response to the receipt of light thereon. As will be more fully described hereinafter, the light senstive elements 32-48 can comprise photovoltaic cells or photoresistors whicn effect a detectable hange in electrical conductivity in response to the ~2'~`~4~S

g receipt of incident light thereon. The light sensitive elements are preferable formed from a deposited semiconductor material, such as, an amorphous semiconductor allQy. Preferably, the amorphous semiconductor alloy includes silicon and hydrogen and/or fluorine. Such alloys can be deposited by plasma-assisted chemical vapor deposition, i.e., glow discharge, as disclosed, for example, in U.S. Pa~ent No. 4,226,898 which issued on October 7, 1980 in the names of Stanford R. Ovshinsky and Arun Madan for "Amorphous Semiconductors Equivalent To Crystalline Semiconductors Produced By A
Glow Discharge Process".

Each of the isolating devices 50-66 is associated with a respective one of the light sensitive elements 32-48. The isolation devices are also preferably formed from a deposited semiconductor material, and most preferably, an amorPhous semiconductor alloy including silicon. The amorphous silicon alloy can also include hydrogen and/or fluorine and can be deposited by plasma-assisted chemical vapor deposition as disclosed in the aforementioned U.S. Patent No. 4,226,898. As can be noted in Figure 2, each of the isolation devices 50-66 is coupled in series relation with its associated light sensitive element 32-48 between respective pairs of the X address lines 20, 22, and 24 and the Y
address lines 26, 28, and 30. As a result, the isolation devices facilitate the selective addressing and detection of the electrical conductivity of each of the light sensitive elements by the application of read potentials to respective pairs of the X and Y
address lines.

Referring now more particularly to Figure 1, as can there be noted, the light source 16 comprises a plurality of individual light sources 90, 92, and 94.
Associated with each of the sources 90, 92, and 94 is a reflector 96, 98, and 100. The light sources 90, 92, and 94 and the reflectors 96, 98, and 100 are arranged to provide diffuse light indicated by the arrows 102 which is projected onto the apparitus 12 on the side of the substrate 18 opposite the light sensitive elements and the document 14 to be scanned.
The document 14 is disposed over the transparent cover 68 which includes a substantially planar surface 104.
The document 14 includes at least one portion 106 of high optical density, hereinafter referred to as the dark portions of the document, and portions 108 which are of low optical density, and are hereinafter referred to as the light portions of the document.
The cover 68 is preferably relatively thin so that the document 14 is closely spaced in juxtaposed relation to tne light sensitive elements, such as, light sensitive elements 44, 46, and 48 illustrated in Figure 1. The thickness of the cover 68 is chosen to give maximum useable signal consistent with a number of other variable parameters. These parameters include the angular distribution of the diffuse light intensity, the width of the light sensitive elements, and the spacing between the light sensitive elements.
Preferably, the thickness of the cover 68, the width of the light sensitive elements, and the spacing between the light sensitive elements are all of comparable dimension.
The cover 68 is adhered to the substrate 18 by a transparent adhesive 110. The adhesive 110 is preferably a material having an index of refraction i5 which matches the index of refraction of the substrate 18 to that of the cover 68 to miximize the reflection from the surface boundaries bordered by the matching material.
When the document 14 is to be scanned, it is first placed over the apparatus 12 in substantial contact with the planar surface 104 of the transparent cover 68 so that the document is disposed in closely spaced juxtaposed relation to the light sensitiYe elements. Then, the light source 16 is energized for projecting the diffuse light 102 onto the back side of the apparatus 12. The diffuse light is thereby projected onto the surface of the document 14 adjacent the planar surface 14. In the dark protions 106 of the document 14, the light will be substantially absorbed so that very little of the light impinging upon the dark portions 106 will be reflected back onto the light sensitive elements adjacent thereto, for example, light sensitive elements 44 and 46. ~owever, the light striking the light portions 108 will not be substantially absorbed and a substantially greater portion of the light impinging upon the light portions 108 of the document will be reflected back onto the light sensitive elements adjacent thereto, such as light sensitive element 48. The light sensitive elements adjacent the light portions 108 of the document will thereby effect a detectable change in their electrical conductivity. When the light sensitive elements are formed from photovoltaic cells, they will not only effect a change in electrical conductivity, but will also generate current~ When the light sensitive elements are photoresistors, they will effect an increased electrical conducti~ity which can be detected by the application of read potentials to the respective pairs of the X address lines 20, 22, and 24, and the Y address lines 26, 28, and 30.

64-~5 l12-Electrical signals representing a faithful reproduction of the document 14 can be obtained because the light sensitive elements 32-48 can be made very small. For example, the light sensitive elements can be made to have dimensions of approximately 90 microns on a side. The isolating devices 50-66 can be formed to have a dimension of about 10-40 microns on a side and preferably 20 microns on a side. Also, the light sensitive elements 32-48 can be spaced apart so that they cover only a portion of the substrate 12 to permit the light to be projected onto the document to be scanned. For example, the light sensitive elements can be spaced so that they cover about 25-50X of the overall surface area of the substrate 18. Also, the light sensitive elements can be arranged in substantially coplanar relation so that each will be equally spaced from the document to be scanned.
Although Figure 2 illustrates a 3 x 3 matrix of light sensitive elements, it can be appreciated that a much larger array of elements would be required in actual practice for scanning a document.
The electrical characteristic, and, in accordance with this preferred embodiment, the electrical conductivity of the light sensitive elements can be detected by applying read potentials to respective pairs of the X and Y address lines in series, and one at a time. However, and most preferably, the light sensitive elements can be divided into groups of elements and the read potentials can be applied to each group of elements in parallel to facilitate more rapid scanning of the document. Within each group of elements, the elements can be scanned in series.
Referring now to Figures 3 and 4, they illustrate in greater detail a configuration of light sensitive element 120 and isolation device 122.

Here, the apparatus 12 includes the transparent or glass substrate 18. Formed on the substrate 18 is a metal pad which is electrically connected to a Y address line 126. The metal pad 124 can be formed from alum;num, chromium, or molybdenum, for e~ample.
Formed on the metal pad 124 is the light sensitive element 120 which can take the form of a photovoltaic cell. The photovoltaic cell or light 10 sensitive elements 120 can include an amorphous silicon alloy body having a first doped region 128, an intrinsic region 130, and a second doped region 132.
The regions 128 and 132 are preferably opposite in conductivity wherein the region 128 is p-tye and the region 132 is n-type. Overlying the n-type regions 132 is a layer of a transparent conductor 134.
Photovoltaic cells of this type are fully disclosed, for example, in the aforementioned U.S. Patent No.
4,226,898 and therefor need not be described in detail 20 herein.
The metal pad 124 not only forms an ohmic contact with the light sensitive element 120 but in addition, serves to block light from reaching the back side of the light sensitive element. This function of the metal pad 124 is particularly important when the scanning system is to be used in accordance with the embodiment illustrated in Figure 1.
The isolation device 122, in accordance with this embodiment, comprises a diode, also formed from 30 an amorphous silicon alloy having a p-type region 136, an intrinsic region 138, and an n-type region 140.
The diode 122 is also formed on a metal pad 148 which 3~2~6~i~

is formed on a layer of a deposited insulator 142 which can be formed from, for example, silicon oxide or silicon nitride. The diode 122 can be formed during the same deposition as the photovoltaic device 120.
The diode 122 is coupled to the photovoltaic cell 120 by an interconnect lead 144. Separating the diode 122 from the photovoltaic cell 120 is a deposited insulator 146 which can also be formed from I0 silicon oxide or silicon nitride.
The metal pad 148 is coupled to an X address line 150. As can be noted in Figure 3, the X address line 150 and the Y address line 126 are spaced apart by the insulating layer 142. Because the address lines cross at an angle and are separated from one another, an insulated crossover point 152 is thereby formed.
The structure of Figure 3 is completed ~y the transparent cover member 68 which can be formed from 0 glass. It is disposed over the diode and light sensitive element and is adhered thereto by a transparent adhesive which can fill the space 154. As previously mentioned, the transparent adhesive preferably has an index of refraction which matches the index of refraction of the glass substrate 18 to that of the cover member 68.
Referring now to Figure 5, it illustrates the equivalent circuit diagram of the light sensitive element 120, the isolating diode 122, and the address lines 126 and 150. It can be noted that the interconnect lead 144 connects the cathodes of the photovoltaic cell 120 and diode 122 together. The anode of the diode 122 is coupled to the X address line 150 and the anode of the photovoltaic cell 120 is coupled to the Y address line 126. It is to be understood that the diodes formed by the isotation device 122 and the photovoltaic cell 120 can be connected in an opposite polarity so that their anodes rather than their cathodes touch.
In order to read the electrical characteristic of the photovoltaic cell 120, a positive potential is applied to the X address line lS0 and a negative potential is applied to the Y
address line 126. This forward biases the isolating diode 122. ~f light is being reflected off of a light I0 portion of the document being scanned onto the photovoltaic cell 120, a photogenerated current will be produced within the cell 120 and will be detected through the forward biased diode 122. However, if the cell 120 is adjacent one of the dark portions of the document, substantially no photogenerated current will be produced by the cell 120. The difference between the two current levels can therefor be contrasted for deriving an electrical signal representative of the image adjacent the cell 120.
Referring now to Figure 6, it illustrates a further configuration of light sensitive element 190 and isolation device 192. Here, the light sensitive element takes the form of a photoresistor and the isolating device 192 takes the form of a thin film field effect transistor.
The apparatus 12 illustrated in Figure 6 includes a transparent substrate 18, which can be formed from glass, for example. The gate of the thin film field effect transistor 192 is first formed on the substrate 18. A layer of insulating material 196 is then deposited over the gate 194 and the substrate 18. A metallic pad 198 is then formed over the ; insulator 196 to form one contact of the light sensitive element or photoresistor 190.

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-lG-A substantially intrins;c amorphous silicon alloy layer 200 is then deposited as shown for forming the semiconductor of the thin film field effect transistor 192 and the semiconductor of the photoresistor 190. A layer 202 of n-type amorphous silicon can then be formed over the intrinsic amorphous silicon alloy 200 to enhance the ohmic contact between the source and drain electrodes 204 and 206 with the amorphous silicon alloy 200. A layer I0 of a transparent conductor 208 can be formed over the amorphous silicon alloy 200 in contact with the transistor electrode 26 and in a corresponding configuration to the metal pad 198 to form the top contact of the photoresistor 190. The structure of Figure 6 is completed with the transparent cover 68 which can be formed from glass and a transparent adhesive filling the space 210 as previously described.
As will be noted in Figure 6, the gate 194, the electrode 204, and the bottom contact 198 of the 20 photoresistor 190 are all vertically separated from one another. As a result, each of these elements can be connected to respective address lines while being insulated from one another. Figure 7 shows the e~uivalent circuit diagram of the structure of Figure 6.
In Figure 7, it can be noted that the electrode 104 of the thin film field effect transistor 192 is coupled to an X address line 212. The gate 194 of the transistor 192 is coupled to a Y address line 30 240. The bottom contact 198 of the photoresistor 190 is coupled to a common potential such as ground by a lead 216. As a result, the electrical conductivity of the photoresistor 190 can be sensed by the application of suitable potentials to the electrode 204 and gate 194 for turning the transistor 192 on. If light is ~eing reflected off of a light portion of a document onto the photoresistor 190, a current will flow between the transistor electrodes 204 and 206 which can be sensed on the X address lead 212. However, if the photoresistor 190 is immediately adjacent a dark portion of the document, very little light will be projected onto the photoresistor 190 so that substantially no current will flow from the electrode 204 to the electrode 206. In this manner, the condition of the photoresistor 190 can be detected.
Electrical signals can be provided which represent the color hues of an image. For example, each of the light sources 96, 9~, and 100 can include three separate light sources each being arranged to emit light of a different primary color of red, green, and blue. To generate the electrical signals representative of the color hues of the image, the image-bearing member 14 can be sequentially exposed to the red, green, and blue light. During each exposure,the light sensitive elements can be addressed. For example, when the document 14 is exposed to the red light, those image portions thereof which include a redcolor component will reflect red light onto the light sensitive elements adjacent thereto. These elements will effect a greater change in electrical conductivity than those elements adjacent image portions which do not include a red color component. After this procedure is performed for each of the red, green, and blue primary colors, the three electrical signals provided from each lighe sensitive element can be combined to derive both intensity and color hue of the image.
Figures 8 and 9 illustrate an X-ray image scanning system and apparatus embodying the present invention. These figures are similar to Figures 3 and 6 discussed above respectively, except that the photosensors shown in Figures 8 and 9 are covered by energy converting means 121 and 191, respectively.

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.``~5 These energy conversion means, when they are struck by radiant energy of a first enerqy range, such as X-rays or particle beams, emit radiation of a second energy level which can be sensed by the energy sensitive elements 120 and 190 of Figures 8 and 9, respectively.
The converter of energy 121 showin in Figure 8 includes a continuous, transparent, insulating layer 121a formed of silicon dioxide. The layer 121a can have a thickness on the order of ~00 angstroms to 1 I0 micron. The converter 121 also includes phosphorescent layer 121b formable of zinc sulfide with a thickness between 1 micron and 100 microns with 20 microns preferred. The converter 121 also includes a layer 121c of deposited metal such as aluminum that is grounded at 121d. The thickness of the metal layer 121c is between 100 angstroms and 1000 angstroms with 300 angstroms being the preferred thickness. The energy converter 121 converts X-rays, a form of electromagnetic radiation with an intensity in a first energy range into visible light, also a form of electromagnetic energy, with an intensity in a second energy range.
The structure of Figure 8 is completed by the cover member 68 which is transparent to X-rays. It is disposed over the energy converter 121 and is adhered thereto by an adhesive which is transparent to X-riys and preferably opaque to visible light.
The converter of energy 191 shown in Figure 9 is similar to the converter 121 just described. It includes a silicon dioxide insulating layer l91a, a phosphorescent layer l91b overlying the insulator l91a and a grounded conductive layer l91c overlying the phosphorescent layer l91b. A cover 68 can be affixed to the conductive layer l91c.

An alternate embodiment of the invention uses an accelerated beam of electrons in place of the X-rays disclosed above. In this alternate embodiment, the electron beam can be deflected as in a raster scanning system. As the deflected beam of electrons impinges upon the sensor elements, such as the sensor element of Figure 8, the energy of the electrons excites the phosphorescent layer l91b causing it to emit visible light as do the X-rays. The visible light is detected by the element 190. Hence, as in the embodiments of Figure 1-9, there is a conversion from a first form of energy with an intensity in a first range, that of the moving electrons, to a second form of energy with an intensity in a second energy range, that of emitted light.
In other embodiments of the invention, the energy converting layer can be made by placing a simple layer of fluorescent material over the photosensors of the array, as is described below with regard to an X-ray sensor used with the embodiment of the present invention that integrates the radiation incident upon its photosensors.
Now referring to Figure 10, the circuitry shown in schematic form is designed to integrate the radiation which falls upon its sensors, so as to greatly increase its sensitivity. The apparatus 310 comprises an array of photosensitive elements 312 formed as an integrated circuit on a substrate, as shown in Figures 18 through 20, below. For purposes of simplification, the array of photosensitive elements 312 shown in Figure 10 is a 3 x 3 array. However, in most embodiments of the invention much larger arrays are used.

6~15 The photosensitive etements 312 are formed at the crossings of x lines 314 and y lines 316, with one such photosensitive element connected between one x line and one y line near the intersection of those two lines. Each of the photosensitive elements includes two back-to-back diodes, a photoresponsive diode 318 and a blocking diode 320. Each of these diodes has associated with it a capacitance formed by its electrodes. The two electrodes of the photodiode 318 form a capacitor 322, and the two electrodes of the blocking diode 320 form a capacitor 324. Since the rectifying junctions of the diodes 318 and 320 are located between the electrodes of the capacitors 322 and 324, respectively, those diodes operate as if they were connected electrically in parallel with those capacitors, as is illustrated schematically in Figure 10.
The y lines 316 are driven by column select and drive circuitry 326. This circuitry provides zero volts to all of the y lines except for a selected one, to which it supplies +5 volts . The x lines 314 are each connected through a pull-up resistor 328 to a +5 volt power supply 330. Each of the x lines 314 are also connected to one input of a multiplexer 332. The multiplexer 332 connects a selected one of the x lines 314 to its output 334, which is supplied to the input of an amplifier 336. As is described below in greater detail, the output 338 of the amplifier 336 provides a signal which successively indicates the amount of light incident upon each of the photosensitive elements 312. The voltages to which the selected y line 316 and the pull-up resistors 328 are connected --2~--are both selected to be +5 volts in the embodiment illustrated, since it is a convenient voltage commonly associated with electronic circuitry. Of course, other voltage values could be used without materially affecting the invention's principles of operation.
Referring now to Figures lla through 17a and Figures llb through 17b, the operation of the circuitry shown in Figure 10 will be described.
Figures llb through 17b show the voltages and current 10 flows in the photosensitive element 312a in the upper left hand corner of the 3 x 3 array shown in Figure 10. The location of this element is indicated schematically in Figùres lla through 17a by the circle surrounding the intersection between the upper most x line 314a and the left most y line 316a.
The amplifier 336 is constructed so that it drives its input to zero volts. As is well known in the electronic arts, this can be accomplished by the use of an operational amplifier with a resistive 20 feedback loop connected between its output and its input. Such an amplifier is a current to voltage converter, often called a transconductance amplifier.
The input voltage to such an amplifier typically varies by less than .001 volts, and thus such voltage variations can be ignored in this discussion. As a result of the operation of amplifier 336, the individual x line 314 which is connected at any given moment by the multiplexer 332 to the input of that amplifier has its voltage level driven to 0 volts.
30 All the other x lines 314 have their voltage level pulled up to +5 volts by the pull-up resistors 328 connected to the +5 voltage supply 330.
Figures lla and llb show the state of the photosensitive element 312a before any voltages have been applied . In this initial state bot~l the x line 314a and the y l;ne 316a are at 0 volts, and thus the 4iS

-2~-two capacitors 322 and 324 are not yet charged, and the connection 340 which joins them is at 0 volts.
When the column select and drive circuitry 326 and the multiplexer 332 select element 312a, the select and drive circuitry 326 provides +5 volts to y line 316a and 0 volts to all other y lines. During the selection of element 312a, the amplifier 336 causes x line 314a to be driven to 0 volts, while all the other x lines 314 are pulled to ~5 volts through the resistors 328. This is shown schematically in Figure 12a. As is shown in Figure 12b, when this voltage scheme is first applied to the element 312a, current flows down the address line 316a and through the blocking diode 320 and the connection 340 to charge up the capacitor 322. The capacitive coupling through capacitor 322 to the x line 314a, causes a corresponding flow of current in line 314a toward the input of the operational amplifier 336. As can be seen from Figure 12b, the diode 320 is forward-biased with regard to the flow of current from the y line 316a toward the caPacitor 322. Thus it provides relatively little impedance to such current. The diode 320 is designed so that the capacitance 324 of its electrodes is relatively small and thus can be substantially neglected for purposes of determining the operation o~ an element 312. However, as can be seen from Figure 12b, the diode 318 is reverse-biased relative to the current flowing from the y line 316a toward the x line 314a. As a result, the diode 318 offers a high impedance to the flow of such current across it, and thus the voltage drop across the diode 318 and the resulting charge across capacitor 322 is substantially equal to the +5 volt difference applied between lines 316a and 314a.

~296~15 As is shown in Figures 13a and 13b, by the end of its select period, the element 312a has its capacitor 322 charged to +5 volts, preventing any further current from flowing from line 316a to line 314a other than a relatively small instantaneous reverse leakage current across diode 318. This discussion assumes for simplicity that the diodes have no voltage drop when conducting in the forward direction. ~he diodes actually do have a small 10 voltage drop, but this fact does not materially affect the principles of operation taught here.
In Figure 10, the coltlmn select and drive cir~uitrY 326 and the multiplexer 332 are normally controlled to select each of the photosensitive elements 312 in a sequential scanning method in which each row, and each elements within each row, are successively selected.
Figure 12a shows the state of the element 312a- during the period in which subsequent elements in its row 314a are being selected. During this period the x 20 line 314a is still held to 0 volts by the amplifier 336, but the select and drive circuitry 326 holds the y line 316a to 0 volts, instead of the +5 volts to which it is held when element 312a is selected.
However, the charge on the capacitor 322 is not altered by this state of affairs, since the blocking diode 320 is reverse-biased by the voltage applied between contact 340 and line 316a, and thus it substantially prevents the discharge of capacitor 322. Of course, there will be a small change in the voltage on contact 340 when y line 316a changes 4i5 voltage, due to the capacity divider effect between capacitors 322 and 324. However, since the capacitance 324 is much smaller than the capacitance 322, this change can be ignored in this discussion.
In any case, this change is compensated for when line 136a goes to +5 volts on the next readout cycle.
The blocking diode 320 also prevents the voltage on capacitor 322 from being discharged when other rows are selected by multiplexer 332. As is I0 indicated in Figures lSa and 15b, when multiplexer 332 selects an x line other than the line 314a, the line 314a is pulled-up to +5 volts by one of the pull-up resistors 328. It also shows that when the column select and drive circuitry 326 selects a y line other than the line 316a, the line 316a is supplied with 0 volts. This means that capactor 322 has +5 volts connected to its side which was formerly at 0 volts, driving the other side of the capacitor 322, connected to contact 340, to +10 volts, provided that the +5 volt charge previously placed on capacitor 322 has not been lost. During this state the blocking diode 320 inhibits charge on capacitor 322 from being lost to the y line 316a, which is at 0 volts.
Figures 16a and 16b show what happens when the y line 316a is selected during a period when an x line other than line 314a is selected. In this case both the x and y lines of the element 312a are supplied with a positive +5 volts. As a result, the contact 340 is driven +10 volts, provided capacitor 322 still has the +5 volts charge initially supplied it. During this state the blocking diode 320 continues to inhibit the charge on capacitor 322 from being lost to the y line 316a.
Figure 17 shows what happens when the element 312a is again selected by both the multiplexer 332 and the select and drive circuit 326. In this case ~Z~6~1~

voltages are again applied to the element 312a which are identical to those shown in Figure 12b. However, no current flows to capacitor 322 unless that capacitor has lost charge since the last time it was selected, because unless such charge has been lost, the capacitor 322 already has a voltage equal to the voltage difference between y line 316a and x line 314a.
However, if light hits the diode 318 between the successive rechargings of its associated 10 capacitance 322, something will be done to discharge that capacitance. This is because the diodes 318 are photoresponsive diodes, in which the reverse leakage current is greatly increased in the presence of light. When light hits the semiconductor material of such a ~iode, it generates electron-hole pairs which are swept by the field across such a diode in a direction that discharges the voltage generating that field. The more the light strikes a diode 318 between the recharging of its associated capacitor 20 322, the more the charge on that capacitor is lost.
As a result of this lost charge, the voltage left on capacitor 322 is less than the voltage applied across it when the capacitor is next recharged, causing current to flow onto the capacitor 322 during its recharging. Because of capacitive coupling across capacitor 322, current flow to capacitor during its recharging causes current to flow in the capacitor's x line 314 to the amplifier 336, creating an signal at the output of that amplifier. The amount of such 30 current is in proportion to the amount by which the capacitor 322 has been discharged by incident radiation since its previous recharging.
All of the photoresponsive elements 312 function in a manner similar to that of the element 312a just described. Thus the signal at the output of amplifier 336 varies in correspondence to the i5 magnitude and time incidence of radiation incident upon the semiconductor material of each diode 318 during the entire period between its successive rechargings. ln other words, the signal which results when a given photodiode is selected is not an instantaneous function of the amount of light falling on that photodiode during its selection, but rather is a function of all the radiation incident upon that photodiode during the entire period since its previous rechargjng. As a result, the apparatus of the present invention provides a much greater sensitivity and a much greater immunity to noise.
The current flow during the recharging of a given capacitor 322 is not constant. Instead it varies during the recharging period, with the amount of such current increasing rapidly to a maximum value at the beginning of each recharging period and then decreasing more slowly as the voltage on the capacitor approaches the voltage applied across it. Once the capacitor is completely charged, the current is limited to the relatively small instantaneous value of the reverse leakage current across its associated diode 318. Thus, the output signal produced by amplifier 336 in association with the selection of a given picture element is not a constant value, but rather a current pulse starting with a relatively rapid increase and ending with a relatively slow decrease. The actual rates of the increase and decrease depend upon many parameters, among them, the 3~ impedance of the driving circuitry, stray capacitance, and the time response characteristic of the diodes.
This output is used in different ways in different embodiments of the invention to indicate the amount of light which has hit each of the photosensitive elements. In some embodiments the output of amplifier 336 is integrated over the recharging period of each photosensitive element by means of an integrating amplifier. This is perhaps the most accurate method. In other embodiments, a sample and hold circuit is used to sample the magnitude of the output of amplifier 336 at a specified time during the recharging period of each picture element, such as the time at which that signal is at its maximum value. The resulting sampled value is then used as the indication of the amount of light lo which has hit the associated photoresponsive element since its last recharging. In other embodiments, the output of amplifier 336 is fed as a video signal to a cathode-ray-tube having a scanning pattern and rate similar to the array of photosensors 312. In such an embodiment, even though the amplitude of the video signal varies over the portion of a video line associated with a given photosensitive element, this is normally of little concern since the corresponding picture elements are close together on the CRT screen, and since such high frequency variations in the video signal can be reduced by the use of a low pass filter.
Referring now to Figures 18, 19 and 20, a radia~ion sensing appartus formed as an integrated circuit is shown, The radiation sensing apparatus shown in those figures comprises a substrate 341 formed of glass. In alternate embodiments of the invention other insulating substrates can be used, SUCh as substrates formed of conductive materials, for example, stainless steel, coated with an insulator to provide the necessary electrical isolation for devices formed their surface. A layer 342 formed of molybdenum or another metal which forms a good ohmic contact with P+
type amorphous silicon alloys is deposited upon the substrate 341 by means such as sputtering, and then is patterned by photolithographic techniques to form the address lines 316, the bottom electrodes 344-of the photoresponsive diode 318, and an extension of that bottom electrode which forms~part of the address lines 314. Once the metal layer 342 has been patterned, three successive layers of amorphous semiconductor material are deposited upon the substrate 340, first a P~ layer 346 having a thickness of approximately 250 angstroms, then a substantially intrinsic, or I layer 348 having a thickness of approximately 3,500 angstroms, and then an N+ layer 350 having a thickness of approximately 250 angstroms. The deposited semiconductor material is preferably an amorphous semiconductor alloy including silicon. The amorphous silicon alloy can also include hydrogen and/or fluorine and can be deposited by plasma assisted chemical vapor deposition.
Amorphous silicon alloys can be deposited in mult;ple layers over large area substrates to form structures such as the integrated circuit shown in Figures 18, 19 and 20 in high volume, continuous processing systems. Continuous processing systems of this kind are disclosed, for example, in U.S. Patent No. 4,400,409, issued August 23, 1983 for "A Method of Making P-Doped Silicon Films and Devices ~lade Therefrom";
U.S. Patent No. 4,410,558, issued October 18, 1983 for "Continuous Amorphous Solar Cell Production Systems";
U.S.Patent No. 4,438,723 issued March 27, 1984 for "Multiple Chamber Deposition and Isol~tion System and Method". As disclosed in these patents, a substrate may be continuously advanced through a succession of deposition - ~9 -chambers, where;n each chamber is dedicated to the deposition of a specific material.
For example, in mak;ng the P-I-N layers 346, 348 and 3~0 shown in Figures 19 and 20, a single deposit;on chamber can be used for batch processing, or preferably, a multiple chamber system can be used wherein a first chamber is used for depositing a P+
type amorphous s;l;con alloy, a second chamber is used for depositing an intrinsic amorphous silicon alloy, and a third chamber is used for depositing a ~+ type of amorphous silicon alloy. Since each deposited alloy, and especially the intrinsic alloy, must be of high purity, the deposition environment in the intrinsic deposition chamber is preferably isolated from undesirable doping constituents within the other chambers to provide the diffusion of doping constituents into the intrinsic chamber. Where the systems are primarily concerned with the production of photovoltaic cells, isolation between the chambers is accomplished by gas gates through which unidirectional gas flow is established and through which an inert gas may be swept about the web of substrate material. In the previously mentioned patents, deposition of the amorphous silicon alloy material onto the large area continuous substrate is accomplished by glow discharge decomposition process gases. Among these processes, radio frequency energy glow discharge processes have been found to be suitable for the continuous production of amorphous semiconductor r ~30--An Improved process ~or making amorphous semic~nductor alloys and devices is disclosed in applicant's U.S. Patent No. 4,517,223, issued May 14, 1985 for "A Method of Making Amorphous Semiconductor Alloys and Devices Using Microwave Energy". This process util;zes microwave energy to decompose the reaction gases to cause deposition of improved amorphous semiconductor materials. This process provides substantially increased deposition rates and reaction ~as feed stock utilization. ~l;crowave glow discharge processes can also be utilized in high volume mass production of devices.
After the P-I-N layers 346, 348 and 350 have been deposited across the entire surface of the sub-strate 341, a thin layer 352 of a transparent conductor such as indium tin oxide is deposited on top of the N+
layer 350. Such a layer is preverably between 200 and 500 angstroms thick. Once the multilayered structure comprised of the P+ layer 346, the intrinsic layer 348 the N+ layer 350 and the indium tin oxide layer 352 has been formed over the entire surface of the substrate 340, photolithographic techniques are used to`etch that combined layer into an array of diode pairs with one such diode pair for each photosensitive element 312 to be formed. Each of the diode pairs includes a large diode forming the photodiode 318 of its photosensitive element and having an area of approximately 200 microns by 200 microns. Each of the diode pairs also includes a much lS

smaller diode forming the blocking diode 320 and hav;ng an area of approximately 30 microns by 30 microns. The bottom electrode of the photodiode 318 is formed by the molybdenum electrode 344~ and the top electrode of that diode is formed by the ITO layer 352. Similarly, the bottom electrode of the blocking diode 320 is formed by a portion of the address line 316 and the top electrode of that diode is formed by a portion of the ITO layer 3~2. The relatively large overlapping area of the electrodes of photodiode 318 provide that diode with a relatively large capacitance. The much smaller area of the blocking diode 320 causes the capacitance 324 associated with its top and bottom electrodes to be much less.
Once the diodes 318 and 320 have been formed, the entire substrate 34~ is covered with a thin transparent insulating layer 354. Preferably this insulating layer 354 is formed of polyimide, which can be placed over the substrate 340 and the structures formed upon it by roller, extrusion, or spin-coating.
Alternatively, the insulating material in layer 354 could be formed from a deposited insulating material, such as silicon oxide or silicon nitride. Once the transparent layer 354 has been deposited, photolithographic techniques are used to form a contact opening 356 through a portion of layer 354 on top of photodiode 318 and a similar contact opening 358 through a portion of layer 354 on top of blocking diode 320. Similarly, a contact opening 360 is formed over the bottom right hand corner (as shown in Figure 18) of the bottom electrode 344 of photodiode 318, and another contact opening 362 is formed in the leftmost extension (as shown in Figure 18) of the bottom electrode 344 which forms part of its associated x line 314. When these contact openings have been formed, a layer of metal such as aluminum is deposited ~L2~ lS

and patterned to form the connection 340 between openings 356 and 358 of each diode pair, connecting the cathodes of diodes 318 and 320. This top metal layer is also patterned to form a connecting link 364 between adjacent contact openings 360 and 362, so as to connect all of the bottom electrodes of the diodes 318 in a given row, and thus comp~ete the address line 314 associated with that row. The metal contact 340 covers the blocking diode 320 from light, although this is not clearly shown in Figure 20, in which the vertical scale has been greatly exaggerated for purposes of illustration.
Once the integrated circuit has been formed in the manner described, it is preferable to coat it with a passivation layer (not shown), such as one formed of polyimide, to protect the top metal links 340 and 364 from oxidation.
The structure shown in Figures 18 through 20 forms an array of photosensitive elements 312 of the type shown in Figure 10. Since amorphous silicon alloys have very low dark conductivities and very high photoconductivities, the photodiodes 318 form very sensitive photoresponsive devices. As a result, the structure shown in Figures 18 through 20 forms an excellent photosensitive array.
Referring now to Figure 21, an alternative : arrangement iS shown which is also electrically equivalent to the schematic diagram shown in Figure 10. The structure in Figure 21 is identical 3~ to that in Figure 20, except that its address lines 316, which form the bottom electrodes of its blocking diodes 320, and the bottom electrodes 344 of its photodiodes 318 are formed of a metal, such as palladium or platinum, which forms a Schottky barrier when placed in contact with intrinsic amorphous silicon. The structure of Figure 21 is also s distinguished from that shown in Figure 20 by having only one layer 366 of ;ntrinsic amorphous semiconductor material between the electrodes of its diodes 318 and 320, rather than the three P-I-N layers 346, 348 and 350 as in Figure 20. The platinum or palladium metal of the bottom electrodes Of the diodes 318 and 320 form the anodes of those diodes, and the intrinsic silicon alloy layer 366 forms the cathodes, causing the diodes 318 and 320 shown in Figure 21 to have the same polarity as the PIN diodes shown in Figure 20. In embodiments in which it is desired to improve the ohmic nature of the contact between the top IT0 electrodes 352 and the intrinsic layer 366, a thin layer of N+ silicon alloy is placed between that ITO electrode and the intrinsic layer.
Figure 22 shows another arrangement, which is identical to that in Figure 20 except the diode 318 has been replaced with a photoresistor 368. The photoresistor 368 is comprised of the single layer 348 of intrinsic amorphous silicon alloy, placed between a bottom metal electrode 344 and a top IT0 electrode 352, both identical to those shown Figure 20. Photolithographic techniques preYent the P+ and N+ layers 346 and 3~0 used in the P-I-N
blocking diode 320 from being deposited between the electrodes of photoresistor 368. Thus, the photoresistor 68 does not have diode characteristics.
But since the intrinsic amorphous silicon alloy of layer 348 has a high dark resistivity while exhibiting a substantial photoconductivity~ the device 368 functions much like the diode 318 for the purpose of the present invention. That is~ in the absence of light it tends to maintain electrical charge placed upon the capacitor 322 formed by its top and bottom electrodes, and it discharges that electric charge in ; proportion to the amount of light which falls upon it.

~2~41S

Figure 23 shows an embodiment of the present invention for sensing x-ray images. This apparatus is virtually identical to that shown in Figure 20, with the exception that a layer of fluorescent material several hundred microns t~ick has been placed over it. Suitable fluroescent materials for such a layer include lanthanum oxysulfide with terbium, gadolinium oxysulfide with terbium, ytterbium oxysulfid~ with terbium, barium fluorochloride with europium, I0 ytterbium oxides with gadolinium, or barium orthophosphate with europium. The thickness of this layer is not drawn to scale for purposes of convenience. When x-ray radiation falls upon the fluorescent layer 370 it generates light photons having a frequency which causes the generation of charge carriers in the photodiodes 318 of its associated photoresponsive elements. As a result, the amount of current required to recharge the capacitance of each of the photodiodes 18 is a function of the amount of x-ray radiation incident upon the portion of the fluorescent layer 370 overlying each such diode.
Thus an array of photoresponsive elements 312 coated with the fluorescent layer 370 enaDles x-ray images to be electronically sensed.
In certain uses of x-ray imaging, such as certain medical uses, it is often desirable to have image sensing elements which are accurate over a broad dynamic range. With the present invention such accuracy can be achieved by the use of calibration techniques which measures the readings produced by each photosensitive element 312 in response to known levels of incident radiation and use a computer having such calibration information to adjust the output of each photosensitive element in correspondence with such calibration data. For maximum results such calibration should compensate not only for the ~2C`~

differing photoresponsive characteristics of each photodiode 318, but also for the light-independent reverse leakage current of each such photodiode.
Typically photodiodes of the type described in regard to Figure lB through 20 have a leakage current in the dark which is less than one thousandth that of the photo-induced leakage current which they generate in normal room l;ght. This difference is great enough so that the output signal produced can be used for many purposes without compensation for such light-independent leakage current. But in situations where a high dynamic range of light sensitivity is required, a computer is used to adjust for such leakage current.
In order to achieve a desired range of light sensitivity it is also important to choose the proper length of time between the recharging of the picture elements 312. A good length of time is one that is just long enough to allow the recharging voltage placed on the element to be completely discharged by light at the top end of the range of light intensities which the element is intended to measure. If the time is shorter than this, the time during which a photodiode has to integrate light incident upon it will not be enough to produce a maximum signal. If the time is longer, the capacitor 322 will be totally discharged by a whole sub-range of light intensities falling within the range of intensities to be measured, having the undesirable effect of making it impossible to distinguish between any such light intensities falling within that sub-range. If the time between recharging is made extremely long, the light-independent leakage current will totally discharge the capacitors 322 by itself, making it impossible to measure any signal produced by the incidence of light on the photodiodes.

In some large arrays constructed in the general manner shown in Figure 10, the time between recharging is reduced by connecting the pull-up resistors 328 attached to each x line to ground instead of to +5 volts. This causes all th~
photoresponsive elements 312 in a given column to be recharged in parallel each time the y line 316 associated with that column is supplied with +5 volts. As a result, each element 312 is recharged once during the scanning of each row. The resistance of the resistors 32~ is sufficiently large so that the recharging current which flows to ground f rom unselected x lines is isolated f rom the recharging current which flows to the amplifier 336 from the selected x line. This enablès the recharging currents in the selected row to be read independently of the recharging currents in non-selected rows. This recharging method is particularly suitable f~r use with large high-resolution arrays used in contact document copier of the type discussed below.
One of the advantages of the present invention is that it enables a sensing apparatus to be constructed in which the indiv;dual elements can be randomly addressed. For example, in the apparatus disclosed in Figure 10, any given photoresponsive element 312 can be read by: a) selecting its associated x and y lines to charge it, b) subsequently selecting those lines again after a known period of time has elapsed to recharge it, and, c) measuring the 0 current that flows during such recharging. This random addressability means that the time between recharging can be selectively varied over different portions of the display to vary the range of light intensity over whicn those portions are responsive.

Such random addressibility also allows a large array to be scanned quickly by reading only a representative sample of its photoresponsive elements, while allowing the option for more detailed image scanning when and where desired.
Figure 24 shows an image sensing apparatus 380 which is designed for use in forming images of documents placed in close proximity to its array of photosensitive elements. The apparatus 380 includes an array of photosensitive elements 312 similar to those shown in Figure 20. However, the glass substrate 340 of apparatus 380 is substantially thicker than shown in Figure 20, so that documents and books can be placed upon it without its being broken by their weight. In addition, the apparatus 380 has placed over its insulating layer 354 and its top metal contacts 340 and 364 a layer 382 of sputtered silicon dioxide (SiO2) or silicon nitride (Si3Cn4) to form a hard, transparent, substantially flat oxide layer approximately 100 microns thick. The apparatus 380 shown in Figure 24 is designed for copying opaque documents, such as the document 384 partially shown in Figure 24. The photosensitive elements 312 are spaced sufficiently far apart to allow a substantial amount of the light entering the substrate 340 from its backside, as indicated by arrows in Figure 24, to pass between such elements, and illuminate the surface of a document facing the transparent oxide surface 382.
Each individual photosensitive element 3t2 responds primarily to the amount of light reflected from the portion of document 384 placed closest to it. For example, in Figure 24 the document 384 is shown as having a darkened portion 386 upon its bottom surface, such as part of an inked letter of text. Since relatively little light is reflected from this ~2~ 5 darkened portion 386, the photosensitive elements 312 beneath it receive little reflected light. However, a relatively large amount of light is reflected from the light portion 388 on the bottom surface of document 384, and thus the photsensitive elements 312 below that portion receive more light. It is important that the metal which forms the bottom electrodes of the diodes 318 and 320 be over 2,0~0 angstroms thick, so as to prevent radiation from below those diodes from impinging directly upon them.
In order to form accurate copies of documents Such as business letters and pages from books and magazines, it is desirable that the sensing apparatus 380 have a resolution of at least 4 points per millimeter, and, preferably, of 8 points per millimeter. To form a sensor with a resolution of 8 points per millimeter the photosensitive elements 312 should be spaced every 125 microns, and the oxide layer 382 should be no more than approximately 100 microns thick. One of the advantages of the present invention is that it can be used to form an array of photosensitive elements that is at least 11" long and 8-1/2" wide as a single integrated circuit. This is because the deposited semiconductor materials used to form the image sensing apparatus of the present invention can be deposited over large areas, as is described above, and do not require crystalline substrates, which are presently limited in size. Thus the present invention makes it possible to ma~e a solid state document imaging device with no moving parts, with the imaging element formed as one integrated circuit on a single glass substrate.
Referring now to Figure 25, an incident radiation sensing apparatus 390 is shown in schematic form. The apparatus 390 includes a focusing means, such as a i415 lens 392 for focusing a light image upon an array ~94 of photosensitive elements 312. ~n the embodiment shown, the array of photosensitive e~ements 312 is a structure such as that shown in Figures 18 through 20. Experiments have shown that suc~, photosensitive arrays have sufficient sensitivity to produce images of objects illuminated in normal room light when scanned at a video rate and used in conjunctîon with a lens having an aperture of F4. Thus the present invention is su;table for use in v;deo cameras as well as electronic still cameras.
From the foregoing it is apparent that incident radiation sensing apparatuses according to the present invention can be employed in a variety of radiation sensing applications including not only X-ray imaging, document copying, anc electronic photographs, but also any other application in which it is desirable to sense a spatial distribution of radiation. It is recognized, of course, that those skilled in the art may make various modificationt or additions to the preferred embodiments chosen to illustrate the invention w;thout departing from the spirit and scope of the present contribution to the art.
Moreover, the scope of protection is not intended to be limited by the above described -~ embodiment and exemplifications, but solely by the claims appended hereto.

Claims

THE EMBODIMENTS OF THE INVENTION IN WHICH AN EXCLUSIVE
PROPERTY OR PRIVILEGE IS CLAIMED ARE DEFINED AS FOLLOWS:
1 . An apparatus for providing electrical signals representative of an image formed by projecting thereon a spatially varying intensity distribution of a first form of electromagnetic energy having incident energy in a first range, said apparatus comprising:
means, responsive to said spatially varying distribution, for converting said first form of electromagnetic energy incident upon a first surface thereof to a second form of electromagnetic energy in a second energy range different from said first energy range; said converting means including: a layer of phosphorescent material, a metal layer disposed proximate said energy incident surface and a layer of transparent insulating material disposed distal said energy incident surface, said photophosphorescent layer disposed between said metal layer and said insulating layer;
an array of energy sensitive elements, said elements being responsive to the impingement of said second form of energy for causing a change in a detectable electrical characteristic; and means for enabling the selective detection of said electrical characteristic of said energy sensitive element.
2. An apparatus as defined in claim 1 wherein:
said covering means overlie said energy sensitive elements.
3. An apparatus as defined in claim 1 wherein:
each said energy sensitive element includes deposited semiconductor material.
4. An apparatus as defined in claim 2 wherein:
said means for converting are arranged to convert electromagnetic energy in the first energy range to electromagnetic energy in the second energy range.
5 . An apparatus as defined in claim 4 wherein:
said electromagnetic energy in the first energy range corresponds to X-rays having photon energies in the first energy range.
6 . An apparatus as defined in claim 4 wherein:
said electromagnetic energy in the second energy range corresponds to visible light having photon energies in the second energy range.
7 . An apparatus as defined in claim 1 wherein:
said converting means are arranged to convert an accelerated beam of particles with energies in the first energy range into electromagnetic energy with photon energies in the second energy range.
8 . An apparatus as defined in claim 7 wherein:
said electromagnetic energy corresponds to visible light.
9 . An apparatus as defined in claim 4 wherein said electrical characteristic is the electrical conductivity of said elements.
. An apparatus as defined in claim 4 wherein said energy sensitive elements comprise photovoltaic cells.
11 . An apparatus as defined in claim 10 wherein each said photovoltaic cell includes amorphous silicon alloy.
12 . An apparatus as defined in claim 4 wherein said energy sensitive elements are arranged as a coplanar, two-dimensional array of sensors.
13 . An apparatus as defined in claim 4 wherein said converting means comprise a layer of phosphorescent material.

14 . An apparatus as defined in claim 13 wherein said layer of phosphorescent material is formed of a layer of zinc sulfide.
. An apparatus as defined in claim 14 wherein said layer of zinc sulfide has a thickness in a range of 1 micron to 100 microns.
16 . An integrated convertor-sensor apparatus for providing a signal corresponding to a spatially varying pattern of energy projected thereupon said apparatus including:
a substrate having disposed thereupon an array of thin film photoresponsive elements, said elements being adapted to absorb photons of a preselected energy range and generate a detectable electrical signal corresponding thereto;
means for converting said spatially varying pattern of energy into photons of said preselected energy range, said conversion means including a layer of phosphorescent material and a layer of electrically conductive material which is substantially transparent to said pattern of energy, said conductive layer being generally coextensive with the energy incident side of said conversion means, said conversion means generally co-extensive with, electrically isolated from, optically coupled to and in intimate contact with said thin film array, so that said spatially varying pattern projected upon said conversion means is converted to a corresponding spatially varying pattern of photons, which pattern is incident upon said thin film array, whereby an electrical signal corresponding to said projected pattern is generated thereby.
17 . An apparatus as in claim 16 wherein each of said thin film photoresponsive elements include therein a layer of semiconductor material chosen from the group consisting essentially of:
amorphous silicon alloy materials, amorphous germanium alloy materials, or amorphous silicon germanium alloy materials.
18 . An apparatus as in claim 16 wherein said thin film array further includes a matrix of address lines for accessing the elements thereof, and wherein each element includes an isolation device associated therewith.
19 . An apparatus as in claim 16 wherein the photoresponsive elements of said thin film array are chosen from the group consisting essentially of: diodes, photoresistors, photovoltaic devices, and combinations thereof.
. An apparatus as in claim 18 wherein said isolation device is chosen from the group consisting essentially of: diodes, thin film transistors and, combinations thereof.
21 . An apparatus as in claim 18 wherein said photoresponsive elements and said isolation devices are p-i-n type diodes.
22 . An apparatus as in claim 16 wherein said conversion means further includes a layer of electrically insulating material which is substantially transparent to said photons of a preselected energy range, said layer interposed between the sensor array and the layer of phosphorescent material and adapted to optically couple said conversion means to said thin film array.
23 . An apparatus as in claim 16 wherein said conversion means further includes a layer of material disposed upon the energy incident side thereof, said material substantially opaque to said photons of a preselected energy range and substantially transparent to said spatially varying pattern of energy.
24 . An apparatus as in claim 16 wherein said spatially varying pattern of energy is a pattern of x-radiation and said conversion means is adapted to convert X-rays incident thereupon to photons of visible light.
. An apparatus as in claim 16 where said spatially varying pattern of energy is a pattern of accelerated particles and said conversion means is adapted to convert said accelerated particles to visible photons.