CA1271049A - Transducteur a semiconducteur - Google Patents

Transducteur a semiconducteur

Info

Publication number
CA1271049A
CA1271049A CA000508500A CA508500A CA1271049A CA 1271049 A CA1271049 A CA 1271049A CA 000508500 A CA000508500 A CA 000508500A CA 508500 A CA508500 A CA 508500A CA 1271049 A CA1271049 A CA 1271049A
Authority
CA
Canada
Prior art keywords
well
diaphragm
transducer
set forth
semiconductor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000508500A
Other languages
English (en)
Inventor
Henry V. Allen
Kurt E. Petersen
James W. Knutti
Carl R. Kowalski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tactile Perceptions Inc
Original Assignee
Tactile Perceptions Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tactile Perceptions Inc filed Critical Tactile Perceptions Inc
Priority to CA000508500A priority Critical patent/CA1271049A/fr
Application granted granted Critical
Publication of CA1271049A publication Critical patent/CA1271049A/fr
Expired legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
CA000508500A 1986-05-06 1986-05-06 Transducteur a semiconducteur Expired CA1271049A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA000508500A CA1271049A (fr) 1986-05-06 1986-05-06 Transducteur a semiconducteur

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA000508500A CA1271049A (fr) 1986-05-06 1986-05-06 Transducteur a semiconducteur

Publications (1)

Publication Number Publication Date
CA1271049A true CA1271049A (fr) 1990-07-03

Family

ID=4133072

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000508500A Expired CA1271049A (fr) 1986-05-06 1986-05-06 Transducteur a semiconducteur

Country Status (1)

Country Link
CA (1) CA1271049A (fr)

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Legal Events

Date Code Title Description
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