CA1213354A - Surface acoustic wave sensors - Google Patents
Surface acoustic wave sensorsInfo
- Publication number
- CA1213354A CA1213354A CA000437841A CA437841A CA1213354A CA 1213354 A CA1213354 A CA 1213354A CA 000437841 A CA000437841 A CA 000437841A CA 437841 A CA437841 A CA 437841A CA 1213354 A CA1213354 A CA 1213354A
- Authority
- CA
- Canada
- Prior art keywords
- area
- orientation
- temperature
- pressure
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 37
- 238000009530 blood pressure measurement Methods 0.000 claims abstract description 28
- 230000007306 turnover Effects 0.000 claims description 26
- 239000013078 crystal Substances 0.000 claims description 20
- 230000000694 effects Effects 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 230000035945 sensitivity Effects 0.000 claims description 14
- 238000006073 displacement reaction Methods 0.000 claims description 9
- 230000002277 temperature effect Effects 0.000 claims description 7
- 210000000188 diaphragm Anatomy 0.000 claims 9
- 239000012530 fluid Substances 0.000 abstract description 22
- 230000008859 change Effects 0.000 abstract description 10
- 239000002178 crystalline material Substances 0.000 abstract description 2
- 230000005489 elastic deformation Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 39
- 238000005259 measurement Methods 0.000 description 28
- 239000010453 quartz Substances 0.000 description 27
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 27
- 239000000463 material Substances 0.000 description 24
- 239000000758 substrate Substances 0.000 description 21
- 238000003801 milling Methods 0.000 description 19
- 230000004044 response Effects 0.000 description 14
- 230000035882 stress Effects 0.000 description 14
- 238000009529 body temperature measurement Methods 0.000 description 9
- 230000001133 acceleration Effects 0.000 description 5
- 238000012937 correction Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 5
- 230000014509 gene expression Effects 0.000 description 5
- 230000007774 longterm Effects 0.000 description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000010363 phase shift Effects 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 229930186657 Lat Natural products 0.000 description 3
- 230000032683 aging Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 230000002706 hydrostatic effect Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- SUBDBMMJDZJVOS-UHFFFAOYSA-N 5-methoxy-2-{[(4-methoxy-3,5-dimethylpyridin-2-yl)methyl]sulfinyl}-1H-benzimidazole Chemical compound N=1C2=CC(OC)=CC=C2NC=1S(=O)CC1=NC=C(C)C(OC)=C1C SUBDBMMJDZJVOS-UHFFFAOYSA-N 0.000 description 1
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 244000118350 Andrographis paniculata Species 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 101100068345 Mus musculus Ggt1 gene Proteins 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
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- 230000006835 compression Effects 0.000 description 1
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- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
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- 238000005553 drilling Methods 0.000 description 1
- 238000011067 equilibration Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
- G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S73/00—Measuring and testing
- Y10S73/04—Piezoelectric
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US427,240 | 1982-09-29 | ||
| US06/427,240 US4535631A (en) | 1982-09-29 | 1982-09-29 | Surface acoustic wave sensors |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1213354A true CA1213354A (en) | 1986-10-28 |
Family
ID=23694045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000437841A Expired CA1213354A (en) | 1982-09-29 | 1983-09-28 | Surface acoustic wave sensors |
Country Status (15)
| Country | Link |
|---|---|
| US (1) | US4535631A (forum.php) |
| EP (1) | EP0107549B1 (forum.php) |
| AU (1) | AU577031B2 (forum.php) |
| BR (1) | BR8305365A (forum.php) |
| CA (1) | CA1213354A (forum.php) |
| DE (1) | DE3380417D1 (forum.php) |
| DK (1) | DK448583A (forum.php) |
| EG (1) | EG16077A (forum.php) |
| ES (1) | ES526029A0 (forum.php) |
| IE (1) | IE54943B1 (forum.php) |
| IN (1) | IN162121B (forum.php) |
| MX (1) | MX156560A (forum.php) |
| NO (1) | NO162534C (forum.php) |
| OA (1) | OA07550A (forum.php) |
| PH (1) | PH21855A (forum.php) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4622855A (en) * | 1984-12-31 | 1986-11-18 | Schlumberger Technology Corporation | Low thermal response time surface acoustic wave sensors |
| EP0192903B1 (en) * | 1984-12-31 | 1991-08-14 | Schlumberger Limited | Low thermal response time surface acoustic wave pressure sensors |
| US4622854A (en) * | 1984-12-31 | 1986-11-18 | Schlumberger Technology Corporation | Rounded wall surface acoustic wave sensors |
| US5040415A (en) * | 1990-06-15 | 1991-08-20 | Rockwell International Corporation | Nonintrusive flow sensing system |
| US5505092A (en) * | 1994-03-04 | 1996-04-09 | Dinsmore Instrument Company | Non-invasive fluid condition sensing transducer |
| NO304328B1 (no) * | 1996-02-27 | 1998-11-30 | Nyfotek As | TrykkmÕler |
| WO1997043703A1 (en) * | 1996-05-10 | 1997-11-20 | Automated Precision, Inc. | Real time machine tool error correction using global differential wet modeling |
| US6269284B1 (en) | 1997-05-09 | 2001-07-31 | Kam C. Lau | Real time machine tool error correction using global differential wet modeling |
| JP2002122614A (ja) * | 2000-10-12 | 2002-04-26 | Murata Mfg Co Ltd | 加速度センサ |
| NO314963B1 (no) * | 2001-07-13 | 2003-06-16 | Presens As | Trykksensor |
| ITVE20010036A1 (it) * | 2001-08-08 | 2003-02-08 | Fpt Ind Spa | Metodo per effettuare in modo automatico la correzione degli errori sistematici in macchine di misura ed in macchine operatrici ed apparecch |
| NO323064B1 (no) * | 2003-06-13 | 2006-12-27 | Bjorn Burmann | Anordning for maling av forspenningskraft i en bolt-mutter-forbindelse |
| GB0329019D0 (en) * | 2003-12-15 | 2004-01-14 | Imp College Innovations Ltd | Acoustic wave devices |
| CH701162B1 (de) * | 2006-04-20 | 2010-12-15 | Vectron International Inc | Elektro-akustischer Sensor für Hochdruckumgebungen. |
| GB0807405D0 (en) * | 2008-04-23 | 2008-05-28 | Transense Technologies Plc | Pressure sensor |
| IT1390960B1 (it) * | 2008-07-09 | 2011-10-27 | Tvp Solar Sa | Pannello termico solare a vuoto |
| US8022595B2 (en) * | 2008-09-02 | 2011-09-20 | Delaware Capital Formation, Inc. | Asymmetric composite acoustic wave sensor |
| US8073640B2 (en) * | 2009-09-18 | 2011-12-06 | Delaware Capital Formation Inc. | Controlled compressional wave components of thickness shear mode multi-measurand sensors |
| WO2011096937A1 (en) * | 2010-02-05 | 2011-08-11 | Honeywell International Inc | Media-isolated measurements of pressurized media |
| US10502648B1 (en) * | 2016-09-28 | 2019-12-10 | Triad National Security, Llc | High-pressure, high-temperature hollow sphere acoustic pressure sensor |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3128628A (en) * | 1961-06-09 | 1964-04-14 | Lebow Associates Inc | Pressure transducer |
| US3362226A (en) * | 1964-07-06 | 1968-01-09 | Kobe Steel Ltd | System for measuring fluid pressure |
| US3878477A (en) * | 1974-01-08 | 1975-04-15 | Hewlett Packard Co | Acoustic surface wave oscillator force-sensing devices |
| FR2467388A1 (fr) * | 1979-10-12 | 1981-04-17 | Thomson Csf | Dispositif de mesure de debit d'un fluide et systeme senseur du debit d'air dans un moteur a combustion interne mettant en oeuvre un tel dispositif |
-
1982
- 1982-09-29 US US06/427,240 patent/US4535631A/en not_active Expired - Fee Related
-
1983
- 1983-09-07 NO NO833195A patent/NO162534C/no unknown
- 1983-09-27 MX MX198858A patent/MX156560A/es unknown
- 1983-09-28 IE IE2281/83A patent/IE54943B1/en unknown
- 1983-09-28 EG EG369/80A patent/EG16077A/xx active
- 1983-09-28 OA OA58120A patent/OA07550A/xx unknown
- 1983-09-28 AU AU19684/83A patent/AU577031B2/en not_active Ceased
- 1983-09-28 ES ES526029A patent/ES526029A0/es active Granted
- 1983-09-28 CA CA000437841A patent/CA1213354A/en not_active Expired
- 1983-09-28 PH PH29613A patent/PH21855A/en unknown
- 1983-09-29 DE DE8383401906T patent/DE3380417D1/de not_active Expired
- 1983-09-29 IN IN1197/CAL/83A patent/IN162121B/en unknown
- 1983-09-29 EP EP83401906A patent/EP0107549B1/en not_active Expired
- 1983-09-29 BR BR8305365A patent/BR8305365A/pt not_active IP Right Cessation
- 1983-09-29 DK DK448583A patent/DK448583A/da not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| DK448583D0 (da) | 1983-09-29 |
| OA07550A (en) | 1985-03-31 |
| IE54943B1 (en) | 1990-03-28 |
| PH21855A (en) | 1988-03-25 |
| EP0107549A3 (en) | 1985-05-22 |
| ES8405943A1 (es) | 1984-06-16 |
| EP0107549B1 (en) | 1989-08-16 |
| IE832281L (en) | 1984-03-29 |
| EP0107549A2 (en) | 1984-05-02 |
| DK448583A (da) | 1984-03-30 |
| DE3380417D1 (en) | 1989-09-21 |
| EG16077A (en) | 1989-06-30 |
| IN162121B (forum.php) | 1988-04-02 |
| NO162534B (no) | 1989-10-02 |
| AU1968483A (en) | 1984-04-05 |
| ES526029A0 (es) | 1984-06-16 |
| MX156560A (es) | 1988-09-09 |
| US4535631A (en) | 1985-08-20 |
| AU577031B2 (en) | 1988-09-15 |
| NO833195L (no) | 1984-03-30 |
| NO162534C (no) | 1990-01-10 |
| BR8305365A (pt) | 1984-05-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |