CA1181670A - Methode d'attaque selective pour l'obtention de facettes de miroir optiquement plates dans des heterostructures ingaasp/inp - Google Patents

Methode d'attaque selective pour l'obtention de facettes de miroir optiquement plates dans des heterostructures ingaasp/inp

Info

Publication number
CA1181670A
CA1181670A CA000448586A CA448586A CA1181670A CA 1181670 A CA1181670 A CA 1181670A CA 000448586 A CA000448586 A CA 000448586A CA 448586 A CA448586 A CA 448586A CA 1181670 A CA1181670 A CA 1181670A
Authority
CA
Canada
Prior art keywords
etching
layers
layer
inp
ingaasp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000448586A
Other languages
English (en)
Inventor
Kazuhito Furuya
Larry A. Coldren
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/276,942 external-priority patent/US4354898A/en
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Priority to CA000448586A priority Critical patent/CA1181670A/fr
Application granted granted Critical
Publication of CA1181670A publication Critical patent/CA1181670A/fr
Expired legal-status Critical Current

Links

Landscapes

  • Semiconductor Lasers (AREA)
  • Weting (AREA)
CA000448586A 1981-06-24 1984-02-29 Methode d'attaque selective pour l'obtention de facettes de miroir optiquement plates dans des heterostructures ingaasp/inp Expired CA1181670A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA000448586A CA1181670A (fr) 1981-06-24 1984-02-29 Methode d'attaque selective pour l'obtention de facettes de miroir optiquement plates dans des heterostructures ingaasp/inp

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US06/276,942 US4354898A (en) 1981-06-24 1981-06-24 Method of preferentially etching optically flat mirror facets in InGaAsP/InP heterostructures
US276,942 1981-06-24
CA000405781A CA1170550A (fr) 1981-06-24 1982-06-23 Obtention par decapage selectif de facettes de miroir optiquement plates dans des heterostructures de ingaasp/inp
CA000448586A CA1181670A (fr) 1981-06-24 1984-02-29 Methode d'attaque selective pour l'obtention de facettes de miroir optiquement plates dans des heterostructures ingaasp/inp

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CA000448586A Division CA1181670A (fr) 1981-06-24 1984-02-29 Methode d'attaque selective pour l'obtention de facettes de miroir optiquement plates dans des heterostructures ingaasp/inp

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CA000448586A Division CA1181670A (fr) 1981-06-24 1984-02-29 Methode d'attaque selective pour l'obtention de facettes de miroir optiquement plates dans des heterostructures ingaasp/inp

Publications (1)

Publication Number Publication Date
CA1181670A true CA1181670A (fr) 1985-01-29

Family

ID=27167254

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000448586A Expired CA1181670A (fr) 1981-06-24 1984-02-29 Methode d'attaque selective pour l'obtention de facettes de miroir optiquement plates dans des heterostructures ingaasp/inp

Country Status (1)

Country Link
CA (1) CA1181670A (fr)

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Legal Events

Date Code Title Description
MKEC Expiry (correction)
MKEX Expiry