CA1161273A - Differential pressure transducer with high compliance, constant stress cantilever beam - Google Patents
Differential pressure transducer with high compliance, constant stress cantilever beamInfo
- Publication number
- CA1161273A CA1161273A CA000381111A CA381111A CA1161273A CA 1161273 A CA1161273 A CA 1161273A CA 000381111 A CA000381111 A CA 000381111A CA 381111 A CA381111 A CA 381111A CA 1161273 A CA1161273 A CA 1161273A
- Authority
- CA
- Canada
- Prior art keywords
- diaphragm
- transducer
- pressure
- differential pressure
- strain gauges
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 210000000188 diaphragm Anatomy 0.000 claims description 71
- 230000004044 response Effects 0.000 claims description 5
- 238000005452 bending Methods 0.000 abstract description 5
- 238000010276 construction Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000009972 noncorrosive effect Effects 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 241000003910 Baronia <angiosperm> Species 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 206010052804 Drug tolerance Diseases 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 241000353097 Molva molva Species 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- LUTSRLYCMSCGCS-BWOMAWGNSA-N [(3s,8r,9s,10r,13s)-10,13-dimethyl-17-oxo-1,2,3,4,7,8,9,11,12,16-decahydrocyclopenta[a]phenanthren-3-yl] acetate Chemical compound C([C@@H]12)C[C@]3(C)C(=O)CC=C3[C@@H]1CC=C1[C@]2(C)CC[C@H](OC(=O)C)C1 LUTSRLYCMSCGCS-BWOMAWGNSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17210180A | 1980-07-25 | 1980-07-25 | |
| US172,101 | 1980-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1161273A true CA1161273A (en) | 1984-01-31 |
Family
ID=22626368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000381111A Expired CA1161273A (en) | 1980-07-25 | 1981-07-03 | Differential pressure transducer with high compliance, constant stress cantilever beam |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS5752836A (enrdf_load_stackoverflow) |
| CA (1) | CA1161273A (enrdf_load_stackoverflow) |
| DE (1) | DE3130118A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2487516A1 (enrdf_load_stackoverflow) |
| GB (1) | GB2080546B (enrdf_load_stackoverflow) |
| MX (1) | MX150732A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1194839B (it) * | 1980-12-22 | 1988-09-28 | Bourns Instr Inc | Apparecchio per misurare la pressione in particolare di un fluido che scorre attraverso un orifizio o simile |
| GB2159953B (en) * | 1984-05-31 | 1987-08-12 | Stc Plc | Variable resistance piezo-resistive devices |
| GB2175398A (en) * | 1985-05-21 | 1986-11-26 | Stc Plc | Pressure transducer |
| US4878385A (en) * | 1988-02-02 | 1989-11-07 | Fisher Controls International, Inc. | Differential pressure sensing apparatus |
| DE59103069D1 (de) * | 1990-01-18 | 1994-11-03 | Wirth Gallo Messtechnik | Differenzdruckmesser. |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3869920A (en) * | 1973-04-13 | 1975-03-11 | Yokogawa Electric Works Ltd | Symmetrically arranged, deflection type differential pressure transmitters for controlling industrial systems and processes |
| US4058788A (en) * | 1976-04-05 | 1977-11-15 | Bourns, Inc. | Differential pressure transducer |
| US4161887A (en) * | 1977-09-02 | 1979-07-24 | Bourns, Inc. | Media independent differential pressure transducer |
| JPS5458481A (en) * | 1977-10-03 | 1979-05-11 | Honeywell Inc | Difference pressureetoocurrent converter |
-
1981
- 1981-07-03 CA CA000381111A patent/CA1161273A/en not_active Expired
- 1981-07-22 GB GB8122639A patent/GB2080546B/en not_active Expired
- 1981-07-24 FR FR8114488A patent/FR2487516A1/fr active Granted
- 1981-07-24 JP JP11631081A patent/JPS5752836A/ja active Pending
- 1981-07-27 MX MX18847481A patent/MX150732A/es unknown
- 1981-07-27 DE DE19813130118 patent/DE3130118A1/de not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5752836A (en) | 1982-03-29 |
| FR2487516A1 (fr) | 1982-01-29 |
| FR2487516B1 (enrdf_load_stackoverflow) | 1984-11-30 |
| MX150732A (es) | 1984-07-06 |
| GB2080546A (en) | 1982-02-03 |
| GB2080546B (en) | 1984-05-31 |
| DE3130118A1 (de) | 1982-03-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |