CA1101973A - Photoconductor device for imaging a linear object - Google Patents
Photoconductor device for imaging a linear objectInfo
- Publication number
- CA1101973A CA1101973A CA312,090A CA312090A CA1101973A CA 1101973 A CA1101973 A CA 1101973A CA 312090 A CA312090 A CA 312090A CA 1101973 A CA1101973 A CA 1101973A
- Authority
- CA
- Canada
- Prior art keywords
- conductors
- bar
- photoconductive
- layer
- elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003384 imaging method Methods 0.000 title claims abstract description 7
- 239000004020 conductor Substances 0.000 claims abstract description 41
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 9
- 239000010409 thin film Substances 0.000 claims description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 2
- 229910001887 tin oxide Inorganic materials 0.000 claims description 2
- 238000005286 illumination Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 3
- CJOBVZJTOIVNNF-UHFFFAOYSA-N cadmium sulfide Chemical group [Cd]=S CJOBVZJTOIVNNF-UHFFFAOYSA-N 0.000 description 2
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14665—Imagers using a photoconductor layer
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
PHOTOCONDUCTOR DEVICE FOR IMAGING A LINEAR OBJECT
Abstract of the Disclosure A photoconductive device for imaging a linear object has a plurality of photoconductive elements, extending in a line, on a substrate, with first and second patterns of electrical conductors, a pattern on each side of the line. Connections are made to the elements. The conductor patterns are formed as columns on one side of the line and as rows on the other side to provide connections between columns and elements and rows and elements such that the number of external connections is minimized. By applying a voltage to a column, and then connecting a detector circuit sequentially to each row, and repeating for each column, the current flowing through each element can be determined and a signal generated related to the illumination of each element. The elements can be a continuous bar of photoconductive material.
Abstract of the Disclosure A photoconductive device for imaging a linear object has a plurality of photoconductive elements, extending in a line, on a substrate, with first and second patterns of electrical conductors, a pattern on each side of the line. Connections are made to the elements. The conductor patterns are formed as columns on one side of the line and as rows on the other side to provide connections between columns and elements and rows and elements such that the number of external connections is minimized. By applying a voltage to a column, and then connecting a detector circuit sequentially to each row, and repeating for each column, the current flowing through each element can be determined and a signal generated related to the illumination of each element. The elements can be a continuous bar of photoconductive material.
Description
This invention relates to a photoconductor device for imaging a linear object and is particularly applicable to line imaging in such applications as facsimile read and print systems.
Conventionally, in a reading, or imaging device, the object is imaged onto a detector array such as a charge-coupled device (CCD) array. Such systems are expensive.
The present invention provides a device which is much cheaper to produce. The device comprises a linear photo-conductive member and associated conductors and connectors arranged as a matrix, in rows and columns. The photoconductive member can be a continuous bar of photoconductive material, or a plurality of closely spaced separate elements of photoconductive elements. A detector circuit is associated with the device.
The invention will be readily understood by the following description of certain embodiments, by way of example, in conjunction with the accompanying drawings, in which:-Figure 1 is a diagrammatic plan view of part of -an array;
Figure 2 is a plan view of one form of photo-conductive member and associated conductor patterns;
Figure 3 is a typical cross-section to a greatly enlarged scale, on the line III-III of Figure 2-Figure 1 illustrates, very diagrammatically, asection of a device or array. A plurality of photoconductive elements lOa to lOn extend in a line. To one side are made ~k g73 connections via connectors 11, which are arranged in columns, in the present example three connectors 11 forming a column. To each column is connected a conductor 12a, 12b and 12c. On the other side of the line of elements 10 are connectors 13. In the example illustrated the connectors 13 are connected to conductors 14a, 14b and 14c in rows, three elements 10 to each row.
As stated, Figure 1 is a section of a device and normally many more elements 10 would be provided. For example, for reading of a line of print on a page there would be 1600 elements assuming a line 8" long and a resolution of 200 lines per inch. These would be connected, via connectors 11 and 13 and conductors 12 and 14 as a 4Qx40 matrix, that is 40 rows and 40 columns. Each row would connect to 40 elements and each column would connect to 40 elements.
While the elements 10 are shown as separate from each other in Figure 1, the elements are preferably formed as a continuous bar, as indicated by the dotted lines 15. The continuous bar may be scribed, as by a laser, to reduce the thickness of the bar between elements.
A device can operate as follows. Column 12a would be taken to voltage V, typically 20V. columns 12b, 12c--------12n would be grounded. A detector circuit would look at the currents flowing through the elements lOa, lOb and lOc. Typical currents would be 2.0ma (lOK) in the on state to 0.2ma (lOOK) in the off state, the on and off states depending upon whether or not light impinged on the elements. Thus by sequentially "looking" at the elements it would be possible to produce signals, indicative of the on or off state of an element, thus indicative of a light or dark spot on the line being read or scanned and these signals can then 1~1973 be transmitted to a printer.
Some indication of the sensitivity and accuracy of the system is as follows. Typical print reflectivities exhibit contrast ratios of 10:1, although in the case of poor print it may be as low as 5:1. The resistivity is approximately inversely proportional to light power and will also be in the ratio of 5:1 in the poor print example. Tnus on white prints the resistance will be near 10,000 ohms and on dark prints the resistivity will be near 50,000 ohms. As a worst case analysis, with column 12a raised to 20V and the remaining columns grounded, a detector on elements lOa, lOb and lOc must sense the difference between 2.0 ma for a white area flowing to virtual ground and 0.4 ma for a black area flowing to vertical ground.
Possible parallel paths place as little as 250 ohms (10,000/40) or as high as 1250 ohms in parallel with the detection impedance which therefore should be below 25 ohms to reduce signal shift to below 10%. The voltage signal generated across 25 ohms by 2.0ma is 50mV and the signal generated by 0.4ma across 25 ohms is 10 mV. This gives an effective on signal to off signal of 5:1.
The 50mV to lOmV swing is in the range where good signal to noise ratio is possible.
Figure 2 illustrates one form of arrangement for the linear photoconductive member and conductor patterns associated therewith. The photoconductive member or bar is ~; indicated at 20. At one side of the bar 20 extends a pattern of closely spaced electrical connectors 21, the connectors 21 being parallel and extending from beneath the bar 20 and being connected in columns or blocks to contact pads 22a to 22n. The connectors 21 correspond to connectors 11 of Figure 1 while the contact pads 22a-22n correspond to the conductors 12a-12c and so on of Figure 1.
l9~3 Qn the other side of the bar 21 is a pattern comprising a plurality of parallel transverse electrical conductors ~-23a to 23n extending as rows across the substrate 24. From the conductors 23 extend electrical connectors 25. A connector 25 connects between each conductor 23 to the bar 20, the connector connecting to the bar in opposition to a connector 21. The connectors from a particular conductor 23 are spaced apart so that each connector 25 is connected to the bar opposite a connector 21 ~r from a different contact pad 22. Thus, for example, assuming that twenty connectors 21 extend from each contact pad 22, the first conductor 23a is connected to the bar 20 by connectors 25 which are opposed to the first connector 21, then the twenty-first, forty-first and so. The next conductor 23b is connected to the second connector 21, the twenty-second, the forty-second and so on.
This continues for each conductor 23. By this arrangement, by selection of a particular contact pad 22 and a particular conductor 23, an unique position on the bar 20 can be connected to a circuit.
- Contact pads 26 are provided at alternate ends of the conductors 23. In one method of forming the conductor patterns, the conductors 23 are formed on the substrate 24, a layer of electrically insulating material formed over the conductors and then the connectors 25 formed. Electrical connection is provided between connectors 25 and conductors 23 through vias formed in the insulating layer, the vias indicated at 27.
Figure 3 illustrates to a larger scale a typical cross-section through the bar 20, connectors 21 and 25, conductors 23 and contact pads 22. Also shown in Figure 3 is insulating layer 28, between connectors 25 and conductors 23.
In use as a detector or reading head, the device is connected via leads from the contact pads 22 and 26 to drive . . .
circuitry. The drive circuitry can be of conventional form and effectively connects each pad 22 to a particular potential and then sequentially connects each pad 26 to, for example, a unity gain switch, the switches connected to a level detection circuit.
Light falling on the bar makes it conductive. Thus if a line of print is imaged on the bar 20, each picture element will be either photoconductive or non-conductive, depending upon whether the related portion of the image is white or black. By stepping connections to pads 22a-22n, and to pads 26, the whole bar can be scanned to produce a pattern of output pulses from the detector ; circuit indicative of white (or light) picture elements.
A particular process for producing a device as in Figures 2 and 3 is as follows. The electrical connectors 21 and 25 are formed by thin film techniques, either by first -~
forming a patterned mask on the substrate 24 and then forming the conductors. Alternatively the substrate can be covered with the ~- connector material and then the material photolithographically etched to produce the connectors. The layer of insulating material 28 is applied and then the through connection vias prepared. Conductors 23 are then formed by deposition through a mask, or by a layer which is photolithographically etched to produce the desired pattern. Conductors 23 can be thin film form.
Again, as an alternative, the conductors 23 can be deposited by thick film techniques. Finally the photoconductive material forming the bar 20 is deposited. This can again be thin film techniques.
~ nstead of forming the insulating layer over the entire pattern of connectors 23, the layer can be in sections, the edge of a section inclined from the bar 20, to define the particular position on each connector 25 at which the conductor 97~
make contact with the particular connector. The conductors 23 could be formed first on the substrate 24, then the areas of insulating layer formed and then the connectors 25 formed.
One example of material for the bar 20 is cadmium selenide, and a further example is cadmium sulphide.
The conductors and connectors can conveniently be of a three part layer; a first layer of titanium for good adhesion to the substrate, a second layer of palladium which gives good adhesion to the titanium and provides good adhesion for the third layer of gold. The three layers can be formed by evaporation.
The contact between the connectors and bar would normally be ohmic contacts with the materials described, but by appropriate choice of metal to semiconductor (bar) contacts, rectifying junctions can be provided. Such junctions would minimize any loop current problem in the detection circuitry.
An example of a rectifying junction contact is a sandwich structure, with the photoconductor, for example, of cadmium sulphide contained between an Indium (metal) contact and tin oxide (semiconductor).
. -
Conventionally, in a reading, or imaging device, the object is imaged onto a detector array such as a charge-coupled device (CCD) array. Such systems are expensive.
The present invention provides a device which is much cheaper to produce. The device comprises a linear photo-conductive member and associated conductors and connectors arranged as a matrix, in rows and columns. The photoconductive member can be a continuous bar of photoconductive material, or a plurality of closely spaced separate elements of photoconductive elements. A detector circuit is associated with the device.
The invention will be readily understood by the following description of certain embodiments, by way of example, in conjunction with the accompanying drawings, in which:-Figure 1 is a diagrammatic plan view of part of -an array;
Figure 2 is a plan view of one form of photo-conductive member and associated conductor patterns;
Figure 3 is a typical cross-section to a greatly enlarged scale, on the line III-III of Figure 2-Figure 1 illustrates, very diagrammatically, asection of a device or array. A plurality of photoconductive elements lOa to lOn extend in a line. To one side are made ~k g73 connections via connectors 11, which are arranged in columns, in the present example three connectors 11 forming a column. To each column is connected a conductor 12a, 12b and 12c. On the other side of the line of elements 10 are connectors 13. In the example illustrated the connectors 13 are connected to conductors 14a, 14b and 14c in rows, three elements 10 to each row.
As stated, Figure 1 is a section of a device and normally many more elements 10 would be provided. For example, for reading of a line of print on a page there would be 1600 elements assuming a line 8" long and a resolution of 200 lines per inch. These would be connected, via connectors 11 and 13 and conductors 12 and 14 as a 4Qx40 matrix, that is 40 rows and 40 columns. Each row would connect to 40 elements and each column would connect to 40 elements.
While the elements 10 are shown as separate from each other in Figure 1, the elements are preferably formed as a continuous bar, as indicated by the dotted lines 15. The continuous bar may be scribed, as by a laser, to reduce the thickness of the bar between elements.
A device can operate as follows. Column 12a would be taken to voltage V, typically 20V. columns 12b, 12c--------12n would be grounded. A detector circuit would look at the currents flowing through the elements lOa, lOb and lOc. Typical currents would be 2.0ma (lOK) in the on state to 0.2ma (lOOK) in the off state, the on and off states depending upon whether or not light impinged on the elements. Thus by sequentially "looking" at the elements it would be possible to produce signals, indicative of the on or off state of an element, thus indicative of a light or dark spot on the line being read or scanned and these signals can then 1~1973 be transmitted to a printer.
Some indication of the sensitivity and accuracy of the system is as follows. Typical print reflectivities exhibit contrast ratios of 10:1, although in the case of poor print it may be as low as 5:1. The resistivity is approximately inversely proportional to light power and will also be in the ratio of 5:1 in the poor print example. Tnus on white prints the resistance will be near 10,000 ohms and on dark prints the resistivity will be near 50,000 ohms. As a worst case analysis, with column 12a raised to 20V and the remaining columns grounded, a detector on elements lOa, lOb and lOc must sense the difference between 2.0 ma for a white area flowing to virtual ground and 0.4 ma for a black area flowing to vertical ground.
Possible parallel paths place as little as 250 ohms (10,000/40) or as high as 1250 ohms in parallel with the detection impedance which therefore should be below 25 ohms to reduce signal shift to below 10%. The voltage signal generated across 25 ohms by 2.0ma is 50mV and the signal generated by 0.4ma across 25 ohms is 10 mV. This gives an effective on signal to off signal of 5:1.
The 50mV to lOmV swing is in the range where good signal to noise ratio is possible.
Figure 2 illustrates one form of arrangement for the linear photoconductive member and conductor patterns associated therewith. The photoconductive member or bar is ~; indicated at 20. At one side of the bar 20 extends a pattern of closely spaced electrical connectors 21, the connectors 21 being parallel and extending from beneath the bar 20 and being connected in columns or blocks to contact pads 22a to 22n. The connectors 21 correspond to connectors 11 of Figure 1 while the contact pads 22a-22n correspond to the conductors 12a-12c and so on of Figure 1.
l9~3 Qn the other side of the bar 21 is a pattern comprising a plurality of parallel transverse electrical conductors ~-23a to 23n extending as rows across the substrate 24. From the conductors 23 extend electrical connectors 25. A connector 25 connects between each conductor 23 to the bar 20, the connector connecting to the bar in opposition to a connector 21. The connectors from a particular conductor 23 are spaced apart so that each connector 25 is connected to the bar opposite a connector 21 ~r from a different contact pad 22. Thus, for example, assuming that twenty connectors 21 extend from each contact pad 22, the first conductor 23a is connected to the bar 20 by connectors 25 which are opposed to the first connector 21, then the twenty-first, forty-first and so. The next conductor 23b is connected to the second connector 21, the twenty-second, the forty-second and so on.
This continues for each conductor 23. By this arrangement, by selection of a particular contact pad 22 and a particular conductor 23, an unique position on the bar 20 can be connected to a circuit.
- Contact pads 26 are provided at alternate ends of the conductors 23. In one method of forming the conductor patterns, the conductors 23 are formed on the substrate 24, a layer of electrically insulating material formed over the conductors and then the connectors 25 formed. Electrical connection is provided between connectors 25 and conductors 23 through vias formed in the insulating layer, the vias indicated at 27.
Figure 3 illustrates to a larger scale a typical cross-section through the bar 20, connectors 21 and 25, conductors 23 and contact pads 22. Also shown in Figure 3 is insulating layer 28, between connectors 25 and conductors 23.
In use as a detector or reading head, the device is connected via leads from the contact pads 22 and 26 to drive . . .
circuitry. The drive circuitry can be of conventional form and effectively connects each pad 22 to a particular potential and then sequentially connects each pad 26 to, for example, a unity gain switch, the switches connected to a level detection circuit.
Light falling on the bar makes it conductive. Thus if a line of print is imaged on the bar 20, each picture element will be either photoconductive or non-conductive, depending upon whether the related portion of the image is white or black. By stepping connections to pads 22a-22n, and to pads 26, the whole bar can be scanned to produce a pattern of output pulses from the detector ; circuit indicative of white (or light) picture elements.
A particular process for producing a device as in Figures 2 and 3 is as follows. The electrical connectors 21 and 25 are formed by thin film techniques, either by first -~
forming a patterned mask on the substrate 24 and then forming the conductors. Alternatively the substrate can be covered with the ~- connector material and then the material photolithographically etched to produce the connectors. The layer of insulating material 28 is applied and then the through connection vias prepared. Conductors 23 are then formed by deposition through a mask, or by a layer which is photolithographically etched to produce the desired pattern. Conductors 23 can be thin film form.
Again, as an alternative, the conductors 23 can be deposited by thick film techniques. Finally the photoconductive material forming the bar 20 is deposited. This can again be thin film techniques.
~ nstead of forming the insulating layer over the entire pattern of connectors 23, the layer can be in sections, the edge of a section inclined from the bar 20, to define the particular position on each connector 25 at which the conductor 97~
make contact with the particular connector. The conductors 23 could be formed first on the substrate 24, then the areas of insulating layer formed and then the connectors 25 formed.
One example of material for the bar 20 is cadmium selenide, and a further example is cadmium sulphide.
The conductors and connectors can conveniently be of a three part layer; a first layer of titanium for good adhesion to the substrate, a second layer of palladium which gives good adhesion to the titanium and provides good adhesion for the third layer of gold. The three layers can be formed by evaporation.
The contact between the connectors and bar would normally be ohmic contacts with the materials described, but by appropriate choice of metal to semiconductor (bar) contacts, rectifying junctions can be provided. Such junctions would minimize any loop current problem in the detection circuitry.
An example of a rectifying junction contact is a sandwich structure, with the photoconductor, for example, of cadmium sulphide contained between an Indium (metal) contact and tin oxide (semiconductor).
. -
Claims (4)
EXCLUSIVE PROPERTY OR PRIVILEGE IS CLAIMED ARE DEFINED AS FOLLOWS:-
1. A photoconductor device for imaging a linear object, said photoconductor device comprising:-an insulating substrate;
an elongate bar of photoconductive material;
a first plurality of parallel closely-packed equispaced thin film conductors extending from the bar in a first direction and having end contact regions overlain by one side edge of the bar;
a second plurality of parallel, closely-packed, equispaced thin film conductors extending from the bar in a direction opposite to said first direction and having end contact regions overlain by the opposite side edge of the bar, the end contact regions of said first plurality of conductors being opposed to respective end contact regions of said second plurality of conductors whereby to produce a series of spaced pairs of contact regions extending, equispaced, along the photoconductive bar and wherein the junction between the bar and one contact region of each pair is an ohmic contact and the junction between the bar and the other contact region of each pair is a rectifying junction.
an elongate bar of photoconductive material;
a first plurality of parallel closely-packed equispaced thin film conductors extending from the bar in a first direction and having end contact regions overlain by one side edge of the bar;
a second plurality of parallel, closely-packed, equispaced thin film conductors extending from the bar in a direction opposite to said first direction and having end contact regions overlain by the opposite side edge of the bar, the end contact regions of said first plurality of conductors being opposed to respective end contact regions of said second plurality of conductors whereby to produce a series of spaced pairs of contact regions extending, equispaced, along the photoconductive bar and wherein the junction between the bar and one contact region of each pair is an ohmic contact and the junction between the bar and the other contact region of each pair is a rectifying junction.
2, A photoconductive device as claimed in claim 1, in which said second plurality of conductors is overlain with an insulating layer and the common terminals to which said second plurality of conductors are connected extend along at least said one side of the substrate, each such terminal being connected to respective ones of said second plurality of conductors by a series of parallel intermediate conductors overlying said insulating layer, extending transversely over said second plurality of conductors, and electrically connected to said respective conductors by vias through the insulating layer.
3. A photoconductive device according to claim 1 in which each of the ohmic contacts comprises a first layer of titanium adjacent the substrate, a second layer of palladium and a third layer of gold.
4. A photoconductive device as claimed in claim 1 in which each of the rectifying junctions is a sandwich structure with the photoconductive material contained between an indium contact layer and a tin oxide semiconductor layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA312,090A CA1101973A (en) | 1978-09-26 | 1978-09-26 | Photoconductor device for imaging a linear object |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA312,090A CA1101973A (en) | 1978-09-26 | 1978-09-26 | Photoconductor device for imaging a linear object |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1101973A true CA1101973A (en) | 1981-05-26 |
Family
ID=4112456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA312,090A Expired CA1101973A (en) | 1978-09-26 | 1978-09-26 | Photoconductor device for imaging a linear object |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA1101973A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1987000691A1 (en) * | 1985-07-22 | 1987-01-29 | Eastman Kodak Company | Image sensor having normalized areal conductive elements to effect uniform capacitative loading |
-
1978
- 1978-09-26 CA CA312,090A patent/CA1101973A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1987000691A1 (en) * | 1985-07-22 | 1987-01-29 | Eastman Kodak Company | Image sensor having normalized areal conductive elements to effect uniform capacitative loading |
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|---|---|---|---|
| MKEX | Expiry |