CA1044744A - Electronic storage tube target having a radiation insensitive layer - Google Patents
Electronic storage tube target having a radiation insensitive layerInfo
- Publication number
- CA1044744A CA1044744A CA197,028A CA197028A CA1044744A CA 1044744 A CA1044744 A CA 1044744A CA 197028 A CA197028 A CA 197028A CA 1044744 A CA1044744 A CA 1044744A
- Authority
- CA
- Canada
- Prior art keywords
- insulating
- target
- conducting
- layer
- storage tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003860 storage Methods 0.000 title claims abstract description 38
- 230000005855 radiation Effects 0.000 title claims abstract description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 21
- 239000010703 silicon Substances 0.000 claims abstract description 21
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 19
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000000463 material Substances 0.000 claims abstract description 15
- 230000005865 ionizing radiation Effects 0.000 claims abstract description 9
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 72
- 235000012239 silicon dioxide Nutrition 0.000 claims description 36
- 239000000377 silicon dioxide Substances 0.000 claims description 36
- 230000014759 maintenance of location Effects 0.000 claims description 26
- 238000010894 electron beam technology Methods 0.000 claims description 22
- 238000009826 distribution Methods 0.000 claims description 6
- 239000011810 insulating material Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 230000003993 interaction Effects 0.000 claims 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 10
- 239000012774 insulation material Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 238000009413 insulation Methods 0.000 description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 5
- 230000006872 improvement Effects 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- 229910000077 silane Inorganic materials 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 229910021529 ammonia Inorganic materials 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 230000036039 immunity Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- FRIKWZARTBPWBN-UHFFFAOYSA-N [Si].O=[Si]=O Chemical compound [Si].O=[Si]=O FRIKWZARTBPWBN-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000002301 combined effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000005562 fading Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 210000003141 lower extremity Anatomy 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000001846 repelling effect Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
- H01J29/36—Photoelectric screens; Charge-storage screens
- H01J29/39—Charge-storage screens
Landscapes
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
- Semiconductor Memories (AREA)
- Apparatus For Radiation Diagnosis (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US43025774A | 1974-01-02 | 1974-01-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1044744A true CA1044744A (en) | 1978-12-19 |
Family
ID=23706754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA197,028A Expired CA1044744A (en) | 1974-01-02 | 1974-04-08 | Electronic storage tube target having a radiation insensitive layer |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5530656B2 (en, 2012) |
| CA (1) | CA1044744A (en, 2012) |
| DE (1) | DE2420789C3 (en, 2012) |
| FR (1) | FR2256529B1 (en, 2012) |
| GB (1) | GB1478594A (en, 2012) |
| IT (1) | IT1021128B (en, 2012) |
| NL (1) | NL7407172A (en, 2012) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6831784B2 (ja) * | 2014-12-01 | 2021-02-17 | エーエスエムエル ネザーランズ ビー．ブイ． | リソグラフィ製造プロセスに関する診断情報を取得するための方法および装置、診断装置を含むリソグラフィックプロセシングシステム |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4849378A (en, 2012) * | 1971-10-22 | 1973-07-12 | ||
| JPS49118366A (en, 2012) * | 1973-03-10 | 1974-11-12 |
-
1974
- 1974-04-08 CA CA197,028A patent/CA1044744A/en not_active Expired
- 1974-04-29 DE DE19742420789 patent/DE2420789C3/de not_active Expired
- 1974-05-09 JP JP5169574A patent/JPS5530656B2/ja not_active Expired
- 1974-05-15 FR FR7416924A patent/FR2256529B1/fr not_active Expired
- 1974-05-29 NL NL7407172A patent/NL7407172A/xx not_active Application Discontinuation
- 1974-06-07 GB GB2000174A patent/GB1478594A/en not_active Expired
- 1974-09-06 IT IT2700074A patent/IT1021128B/it active
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5530656B2 (en, 2012) | 1980-08-12 |
| FR2256529A1 (en, 2012) | 1975-07-25 |
| DE2420789B2 (de) | 1979-12-06 |
| JPS5099677A (en, 2012) | 1975-08-07 |
| DE2420789C3 (de) | 1980-08-21 |
| IT1021128B (it) | 1978-01-30 |
| DE2420789A1 (de) | 1975-07-10 |
| NL7407172A (nl) | 1975-07-04 |
| FR2256529B1 (en, 2012) | 1979-01-26 |
| GB1478594A (en) | 1977-07-06 |
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