CA1023826A - Method to establish the end point during the delineation of oxides on semiconductor surfaces and apparatus therefor - Google Patents
Method to establish the end point during the delineation of oxides on semiconductor surfaces and apparatus thereforInfo
- Publication number
- CA1023826A CA1023826A CA208,522A CA208522A CA1023826A CA 1023826 A CA1023826 A CA 1023826A CA 208522 A CA208522 A CA 208522A CA 1023826 A CA1023826 A CA 1023826A
- Authority
- CA
- Canada
- Prior art keywords
- delineation
- oxides
- establish
- end point
- point during
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA208,522A CA1023826A (en) | 1974-09-05 | 1974-09-05 | Method to establish the end point during the delineation of oxides on semiconductor surfaces and apparatus therefor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA208,522A CA1023826A (en) | 1974-09-05 | 1974-09-05 | Method to establish the end point during the delineation of oxides on semiconductor surfaces and apparatus therefor |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1023826A true CA1023826A (en) | 1978-01-03 |
Family
ID=4101053
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA208,522A Expired CA1023826A (en) | 1974-09-05 | 1974-09-05 | Method to establish the end point during the delineation of oxides on semiconductor surfaces and apparatus therefor |
Country Status (1)
Country | Link |
---|---|
CA (1) | CA1023826A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4208240A (en) * | 1979-01-26 | 1980-06-17 | Gould Inc. | Method and apparatus for controlling plasma etching |
-
1974
- 1974-09-05 CA CA208,522A patent/CA1023826A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4208240A (en) * | 1979-01-26 | 1980-06-17 | Gould Inc. | Method and apparatus for controlling plasma etching |
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